KR960012670U - 아암의 위치교정용 측정공구 - Google Patents

아암의 위치교정용 측정공구

Info

Publication number
KR960012670U
KR960012670U KR2019940025101U KR19940025101U KR960012670U KR 960012670 U KR960012670 U KR 960012670U KR 2019940025101 U KR2019940025101 U KR 2019940025101U KR 19940025101 U KR19940025101 U KR 19940025101U KR 960012670 U KR960012670 U KR 960012670U
Authority
KR
South Korea
Prior art keywords
arm
positioning
measuring tool
tool
measuring
Prior art date
Application number
KR2019940025101U
Other languages
English (en)
Other versions
KR0123116Y1 (ko
Inventor
채원석
정길종
배상명
이상민
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940025101U priority Critical patent/KR0123116Y1/ko
Publication of KR960012670U publication Critical patent/KR960012670U/ko
Application granted granted Critical
Publication of KR0123116Y1 publication Critical patent/KR0123116Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940025101U 1994-09-28 1994-09-28 아암의 위치교정용 측정공구 KR0123116Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940025101U KR0123116Y1 (ko) 1994-09-28 1994-09-28 아암의 위치교정용 측정공구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940025101U KR0123116Y1 (ko) 1994-09-28 1994-09-28 아암의 위치교정용 측정공구

Publications (2)

Publication Number Publication Date
KR960012670U true KR960012670U (ko) 1996-04-17
KR0123116Y1 KR0123116Y1 (ko) 1999-02-18

Family

ID=19394195

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940025101U KR0123116Y1 (ko) 1994-09-28 1994-09-28 아암의 위치교정용 측정공구

Country Status (1)

Country Link
KR (1) KR0123116Y1 (ko)

Also Published As

Publication number Publication date
KR0123116Y1 (ko) 1999-02-18

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