KR960012629B1 - Oxide film forming method of semiconductor device - Google Patents

Oxide film forming method of semiconductor device Download PDF

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Publication number
KR960012629B1
KR960012629B1 KR93016493A KR930016493A KR960012629B1 KR 960012629 B1 KR960012629 B1 KR 960012629B1 KR 93016493 A KR93016493 A KR 93016493A KR 930016493 A KR930016493 A KR 930016493A KR 960012629 B1 KR960012629 B1 KR 960012629B1
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KR
South Korea
Prior art keywords
oxide film
semiconductor device
film forming
forming method
forming
Prior art date
Application number
KR93016493A
Other languages
English (en)
Other versions
KR950007026A (ko
Inventor
Byung-Jin Cho
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Priority to KR93016493A priority Critical patent/KR960012629B1/ko
Publication of KR950007026A publication Critical patent/KR950007026A/ko
Application granted granted Critical
Publication of KR960012629B1 publication Critical patent/KR960012629B1/ko

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  • Formation Of Insulating Films (AREA)
KR93016493A 1993-08-25 1993-08-25 Oxide film forming method of semiconductor device KR960012629B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93016493A KR960012629B1 (en) 1993-08-25 1993-08-25 Oxide film forming method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93016493A KR960012629B1 (en) 1993-08-25 1993-08-25 Oxide film forming method of semiconductor device

Publications (2)

Publication Number Publication Date
KR950007026A KR950007026A (ko) 1995-03-21
KR960012629B1 true KR960012629B1 (en) 1996-09-23

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ID=19361864

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93016493A KR960012629B1 (en) 1993-08-25 1993-08-25 Oxide film forming method of semiconductor device

Country Status (1)

Country Link
KR (1) KR960012629B1 (ko)

Also Published As

Publication number Publication date
KR950007026A (ko) 1995-03-21

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