KR960010420B1 - Shear type 3-dimension piezo-electric sensor - Google Patents
Shear type 3-dimension piezo-electric sensor Download PDFInfo
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Abstract
Description
제1도는 본 발명에 따른 전단형 정육면체 3차원 압전회전각 센서의 개략적인 구조도.1 is a schematic structural diagram of a shear-type cubic three-dimensional piezoelectric rotation angle sensor according to the present invention.
제2도는 본 발명에 따른 전단형 정육면체 3차원 압전회전각 센서의 원통형 구동소자의 경방향 진동상태도.Figure 2 is a radial vibration state of the cylindrical drive element of the shear-type cube three-dimensional piezoelectric rotation angle sensor according to the present invention.
제3도는 본 발명에 따른 전단형 정육면체 3차원 압전회전각 센서의 감지부 구성도.3 is a configuration diagram of a sensing unit of a shear-type cube three-dimensional piezoelectric rotation angle sensor according to the present invention.
제4도는 본 발명에 따른 전단형 정육면체 3차원 압전회전각 센서의 감지부 압전회전각 센서의 상세도.Figure 4 is a detailed view of the piezoelectric rotation angle sensor of the sensing portion of the shear-type cube three-dimensional piezoelectric rotation angle sensor according to the present invention.
제5도는 본 발명에 따른 전단형 정육면체 3차원 압전회전각 센서의 측정회로 구성도이다.5 is a configuration diagram of the measurement circuit of the shear-type cube three-dimensional piezoelectric rotation angle sensor according to the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
2,3,11,12,13 : 압전소자 4,5,14,15 : 질량체2,3,11,12,13: piezoelectric elements 4,5,14,15: mass
16 : 정육면체 금속체 17 : 감지부16: cube metal body 17: sensing unit
51,52 : 연산증폭기 53 : 구동단자51,52: operational amplifier 53: drive terminal
54 : 검출단자54: detection terminal
본 발명은 3차원 압전회전각 센서에 관한 것으로, 특히 회전각을 3차원적으로 측정할 수 있으며, 회전각 이외의 잡음을 제거할 수 있도록 고안된 정육면체 압전회전각 센서에 관한 것이다.The present invention relates to a three-dimensional piezoelectric rotation angle sensor, and in particular to a three-dimensional measurement of the rotation angle, and relates to a cube piezoelectric rotation angle sensor designed to remove noise other than the rotation angle.
일반적으로 압전회전가 센서는 압전형 진동 자이로스코프(Gyroscope)로 총칭되며 그 원리는 코프전자의 원리와 동일하며 진동하는 물체에 회전각속도가 주어지면 진동방향과 직각방향에 코리울리스힘이 발생하는 역학적인 현상을 이용하는 센서이다.In general, the piezoelectric rotating sensor is collectively referred to as a piezoelectric vibratory gyroscope, and its principle is the same as that of the cope electron. It is a sensor using phosphorus phenomenon.
이 원리는 1953년경으로부터 음편과 같은 탄성 진동체에 확장 적용되어 실용화가 시작되었으며 종래의 회전축을 갖는 회전각 센서와는 달리 압전회전각 센서에서는 축수마찰부분이 없이 수명이 길며 기동시간이 짧으며 소비전력이 적어 가격이 저렴하다.This principle has been applied to elastic vibrating bodies such as sound segments since around 1953, and has been commercialized. Unlike conventional rotary angle sensors with rotary shafts, piezoelectric rotary angle sensors have a long service life, short starting time, and no consumption. Low power and low price.
따라서 로보트 및 무인운송차의 방위각 계측, 항공기 및 선박의 자세제어, 비데오 카메라의 화면진동 방지를 위한 각속도 계측용 등에 사용되고 있다. 특히 최근 차량 운전용으로 민수적인 요구가 높고, 지구자전의 영향도 계측가능한 고정도의 압전가 개발되고 있다.Therefore, it is used for azimuth measurement of robots and unmanned transportation vehicles, attitude control of aircrafts and ships, and angular velocity measurement to prevent screen vibration of video cameras. In particular, high-precision piezoelectrics, which have high civil demand for driving a vehicle and can measure the influence of the earth's rotation, have been developed.
종래의 압전회전각 센서는 주위온도 변화에 의해 감도가 영향을 받게 되는 문제점을 갖고 있다.Conventional piezoelectric rotation angle sensor has a problem that the sensitivity is affected by the change in the ambient temperature.
본 발명은 상기한 문제점을 해결하기 위하여 된 것으로, 본 발명이 목적은 주위 온도변화에 의한 감소변화에 영향을 받지 않는 회전각 센서를 제공하는 것이다.SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a rotation angle sensor that is not affected by a change in decrease caused by a change in ambient temperature.
본 발명의 다른 목적은 외부에서 인가되는 회전력에 의해 발생하는 코리올리스힘에 기인하는 전단응력을 받아 전기신호를 발생하는 압전소자에 의한 회전각 센서를 제공하는 것이다.Another object of the present invention is to provide a rotation angle sensor by a piezoelectric element for generating an electrical signal by receiving a shear stress caused by a Coriolis force generated by a rotation force applied from the outside.
본 발명은 상기한 목적을 달성하기 위하여 항탄성 금속체의 일측 중앙부에 경방향으로 분극처리된 원통형 압전소자의 구동부가 삽입되고, 외측부가 질량체이고 내측부가 전단형으로 분극처리된 압전소자로 이루어진 감지부로 구성되는 것을 특징으로 한다.In order to achieve the above object, the present invention provides a sensing part including a piezoelectric element in which a radially polarized cylindrical piezoelectric element is inserted into a central portion of one side of an anti-elastic metal body, and an outer portion is a mass body and an inner portion is polarized in a shear type. It is characterized by consisting of parts.
이하 본 발명을 도면을 참조하여 상세히 설명한다.Hereinafter, the present invention will be described in detail with reference to the drawings.
제1도를 참조하면, 전단형 정육면체 압전회전각 센서는 정육면체의 항탄성 금속체(16)에, 원통형 압전소자(11)를 정육면체의 항탄성 금속체(16) 중심부를 제1도와 같이 관통구멍이 형성되도록 가공한 후, 그 관통구멍에 상기 원통형 압전소자(11)를 끼우고, 정육면체 항탄성 금속체(16)와 도전성 접착제(31)를 사용하여 부착한다. 그리고 4개의 직사각형의 전단형 압전소자(2),(12)를 X측상에는 분극(poling)방향이 Z축을 향하도록 부착하고 압전소자(3),(13) Y축상에는 분극(poling)방향이 X축을 향하도록 부착한 형태를 취한다. 구동부 압전소자(11)의 두께는 얇을수록 경방향의 진동모드의 선택성이 향상되므로 원통높이의 최대 1/10이하로 하며 분극(poling)방향은 경방향을 이루도록 한다. 한편 감지부 압전소자(2),(12),(3),(13)의 형태는 제4도와 같이 분극(poling)방향과 전극면이 평행하게 배열되어 있는 형태를 취하여, 전극면과 평행으로 발생하는 전단응력에 의해 전하가 발생하게 된다.Referring to FIG. 1, the shear-type cube piezoelectric rotation angle sensor includes a cylindrical piezoelectric element 11 and a cylindrical piezoelectric element 11 in the center of the anti-elastic metal body 16 of the cube, as shown in FIG. After processing to form this, the cylindrical piezoelectric element 11 is inserted into the through hole and attached using a cube anti-elastic metal body 16 and a conductive adhesive 31. Then, four rectangular shear type piezoelectric elements 2 and 12 are attached on the X-side so that the polarization direction faces the Z axis, and the piezoelectric elements 3 and 13 have a polarization direction on the Y axis. Take the form attached so that it faces the X axis. As the thickness of the driving unit piezoelectric element 11 is thinner, the selectivity of the vibration mode in the radial direction is improved, so that the maximum is 1/10 or less of the height of the cylinder, and the polarization direction is achieved in the radial direction. On the other hand, the piezoelectric elements 2, 12, 3, and 13 of the sensing unit have a form in which the polarization direction and the electrode surface are arranged in parallel as shown in FIG. 4, and parallel to the electrode surface. The electric charge is generated by the shear stress generated.
제3도를 참조하면 제4도와 같이 제조된 압전소자를 전도성 접착제(31)를 사용하여 정육면체 금속체(16)에 부착한 후 압전소자 위에 질량체(4),(14),(5),(15)를 전도성 접착제를 사용하여 부착한다. 압전소자(3),(13)은 Y축상에 놓이게 하고 압전소자(2),(12)은 X축상에 놓이도록 배치하여 감지부로 사용한다.여기서 압전소자(2,12,3,13)의 길이(ℓ), 폭(w)와 두께(t)의 관계는 길이(ℓ)폭(w)두께(t)이다.Referring to FIG. 3, the piezoelectric element manufactured as shown in FIG. 4 is attached to the cube metal body 16 using the conductive adhesive 31, and then the mass bodies 4, 14, 5, and 5 on the piezoelectric element. 15) is attached using a conductive adhesive. The piezoelectric elements 3 and 13 are placed on the Y axis, and the piezoelectric elements 2 and 12 are placed on the X axis to be used as the sensing unit. Here, the piezoelectric elements 2, 12, 3, 13 The relationship between length (l), width (w) and thickness (t) is length (l) width (w) thickness (t).
압전소자(11)가 정육면체 항탄성 금속체 내부에 고정된 상태에서 압전소자의 경방향 공진주파수와 일치된 외부신호에 의하여 경방향으로 진동을 할때 압전필름(2),(12)은 X축방향으로 선운동(Vx), 압전필름(3),(13)은 각각 Y축 방향으로 선운동(Vx)를 하게 된다. 단 선운동의 크기는 동일하다.(즉 Vx=VY)When the piezoelectric element 11 vibrates in the radial direction by an external signal matched to the radial resonant frequency of the piezoelectric element in a state where the piezoelectric element 11 is fixed inside the cube anti-elastic metal body, the piezoelectric films 2 and 12 have an X axis. The linear motion (Vx), the piezoelectric film (3), 13 in the direction of the linear motion (Vx) in the Y-axis direction, respectively. The magnitude of the linear motion is the same (ie Vx = V Y ).
한편 Y축을 중심으로 회전하는 회전속도(ΩY)와, Z축을 중심으로 회전하는 회전속도(ΩZ)가 가해질때 나타나는 코리올리스힘은 각각 다음과 같이 주어지게 된다. 즉 압전소자(11)의 경방향 진동중 X축 방향성분 Vx와 Y축을 중심으로 회전하는 회전속도(ΩY)에 의해 발생하는 코리올리스힘은 Fcz=-2mVxΩY이고, 압전소자(11)의 경방향 진동중 Y축 방향성분 VY와 Z축을 중심으로 회전하는 회전속도(ΩZ)에 의해 발생하는 코리올리스힘은 Fcx=-2mVxΩZ이다.Meanwhile, the Coriolis force that appears when the rotational speed (Ω Y ) rotating about the Y axis and the rotational speed (Ω Z ) rotating around the Z axis is applied is given as follows. That is, the Coriolis force generated by the rotational speed (Ω Y ) rotated about the X-axis component V x and the Y-axis among the radial vibrations of the piezoelectric element 11 is Fcz = -2mVxΩ Y , and the piezoelectric element 11 The Coriolis force generated by the rotational speed (Ω Z ) that rotates about the Y-axis component V Y and Z-axis during radial vibration is Fcx = -2mVxΩ Z.
따라서 이미 알고 있는 상수 m, 선운동(Vx=VY)와 측정된 코리올리스힘을 대입하면 회전각속도(ΩY),(ΩZ)를 구할 수 있다.Therefore, by substituting the known constant m, the linear motion (Vx = V Y ) and the measured Coriolis force, the rotational angular velocity (Ω Y ) and (Ω Z ) can be obtained.
한편 압전소자(2),(12)에는 Fcz, 압전소자(3),(13)에는 Fcx가 나타나게 된다. 즉 제1도에 나타난 한개의 회전각 센서로서 XZ면 ZY평면으로 이루어지는 3차원상에서의 회전각측정이 가능하게 된다. 외부에서 주어지는 회전속도가 정확히 ΩX, ΩY로 구분되지 않을 때는 압전소자(2),(13),(3),(13)에 각각 XZ, XY 평면방향의 성분이 감지될 것이며 전체 회전속도 및 회전각도는 이들 성분의 벡터합으로 나타난다.On the other hand, Fcz appears in the piezoelectric elements 2 and 12, and Fcx appears in the piezoelectric elements 3 and 13. In other words, as one rotation angle sensor shown in FIG. When the external rotational speed is not exactly divided into Ω X and Ω Y , piezoelectric elements (2), (13), (3), and (13) will detect components in the XZ and XY plane directions, respectively. And the angle of rotation is represented by the vector sum of these components.
제5도를 참조하면, 구동부 압전소자(11)은 구동단자(53)에 연결하여 전압을 인가함으로써 경방향으로 전동시키며 이로인하여 압전소자(2),(12),(3),(13)는 각각 선운동(VX)(VY)를 하게 된다. 감지부를 이루는 압전소자(2),(12),(3),(13)에는 이 경방향 진동에 의한 선운동(VX)(VY)와 외부에서 주어지는 회전속도에 의한 코리올리스힘(Coriallis Force)에 기인하는 전하가 각각 발생한다. 감지부 압전소자(2),(12),(3),(13)들은 완전히 동일한 것들로서 서로 마주보고 설치되며, 각 압전소자(2),(12),(3),(13)의 분극방향은 X축, Z축 방향을 향하도록 이루어져 있다.Referring to FIG. 5, the driving unit piezoelectric element 11 is connected to the driving terminal 53 and is electrically driven in a radial direction by applying a voltage, which causes the piezoelectric elements 2, 12, 3, 13 to be driven. Are respectively linear movement (V X ) (V Y ). The piezoelectric elements 2, 12, 3, and 13 constituting the sensing unit have a linear motion (V X ) (V Y ) by this radial vibration and a Coriolis force by the rotational speed given from the outside. Each of the charges generated by) is generated. The piezoelectric elements 2, 12, 3, and 13 of the sensing unit are installed to face each other as completely identical ones, and polarization of each of the piezoelectric elements 2, 12, 3, 13 is performed. The direction is made to face in the X-axis and Z-axis directions.
따라서 전단형 정육면체(16)의 중심점을 중심으로 회전속도가 주어지면 각 수직평면상의 두 압전소자들 즉 X축상의 압전소자 쌍(2),(12), Y축상의 압전소자 쌍(3),(13)은 서로 반대방향으로 회전하게 되기 때문에, 각각 반대부호의 전하가 발생한다.Therefore, given the rotational speed around the center point of the shear-type cube 16, two piezoelectric elements on each vertical plane, that is, piezoelectric element pairs (2) and (12) on the X-axis, piezoelectric element pairs (3) on the Y-axis, Since 13 rotates in opposite directions, charges of opposite signs are generated, respectively.
이때 압전소자의 쌍들(2),(12),(3),(13)의 전하량의 각각 차이는 연산증폭기(51),(52)에 의하여 각각 구해지고 증폭되어 검출단자(54)로 넘겨진다.At this time, the difference in the amount of charge of the pairs (2), (12), (3), and (13) of the piezoelectric elements is calculated by the operational amplifiers (51) and (52), respectively, and amplified and passed to the detection terminal (54). .
이에 반해 주위음압, 온도, 습도 변화에 의해 나타나는 잡음을 X라 하면 모두 동일한 부호로 압전소자(2,12,3,13)에 나타나며, 압전소자 쌍(2),(12)에서의 코리올리스힘은 각각 Fcz+X=-2mVxΩY, -Fcz+X=-2mVxΩY로 나타나게 되어, 코리올리스힘에 의한 전하는 반대 극성을 띠게 된다. 각 압전소자에 발생된 이 전하들을 연산증폭기(51)(예를 들면, 차동증폭기)에 의하여 차이를 구하면 잡음의 영향은 제거되고 코리올리스힘만이 2배 증폭된 값으로 나타난다.On the other hand, if the noise caused by changes in ambient sound pressure, temperature, and humidity is X, all the same symbols appear in the piezoelectric elements 2, 12, 3, and 13, and the Coriolis force in the piezoelectric element pairs 2, 12 is Represented by Fcz + X = -2mVxΩ Y and -Fcz + X = -2mVxΩ Y , respectively, the charges caused by Coriolis forces have opposite polarities. When these charges generated in each piezoelectric element are found by the operational amplifier 51 (for example, a differential amplifier), the influence of noise is eliminated, and only the Coriolis force is represented by a double amplified value.
따라서, 본 발명에 의하면 감지부 센서로 사용된 전단형 압전소자가 근본적으로 주위온도변화에 의한 감도변화를 방지하도록 되어 있으며 통상 전단응력에 의해 발생되는 전하량은 압축응력에 의하여 발생되는 전하량의 2배 가량이 되므로 통상의 압축응력에 의한 전하발생을 취하는 회전각 센서에 비하여 고강도의 측정이 가능하도록 소형화에 유리한 효과가 있게 된다.Therefore, according to the present invention, the shear type piezoelectric element used as the sensor of the sensor is designed to fundamentally prevent the sensitivity change due to the change of the ambient temperature, and the amount of charge generated by the shear stress is twice the amount of charge generated by the compressive stress. In this case, it is advantageous in miniaturization to enable high-intensity measurement as compared to the rotation angle sensor that takes charge generation due to normal compressive stress.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019920026480A KR960010420B1 (en) | 1992-12-30 | 1992-12-30 | Shear type 3-dimension piezo-electric sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019920026480A KR960010420B1 (en) | 1992-12-30 | 1992-12-30 | Shear type 3-dimension piezo-electric sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940015478A KR940015478A (en) | 1994-07-21 |
| KR960010420B1 true KR960010420B1 (en) | 1996-07-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920026480A KR960010420B1 (en) | 1992-12-30 | 1992-12-30 | Shear type 3-dimension piezo-electric sensor |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR960010420B1 (en) |
-
1992
- 1992-12-30 KR KR1019920026480A patent/KR960010420B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR940015478A (en) | 1994-07-21 |
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