KR960009281U - 버블 제거수단이 장착된 감광액 제거장치 - Google Patents

버블 제거수단이 장착된 감광액 제거장치

Info

Publication number
KR960009281U
KR960009281U KR2019940021009U KR19940021009U KR960009281U KR 960009281 U KR960009281 U KR 960009281U KR 2019940021009 U KR2019940021009 U KR 2019940021009U KR 19940021009 U KR19940021009 U KR 19940021009U KR 960009281 U KR960009281 U KR 960009281U
Authority
KR
South Korea
Prior art keywords
device equipped
photosensitive liquid
bubble
removal device
removal means
Prior art date
Application number
KR2019940021009U
Other languages
English (en)
Other versions
KR0121510Y1 (ko
Inventor
이승용
정경수
권순호
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940021009U priority Critical patent/KR0121510Y1/ko
Publication of KR960009281U publication Critical patent/KR960009281U/ko
Application granted granted Critical
Publication of KR0121510Y1 publication Critical patent/KR0121510Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
KR2019940021009U 1994-08-20 1994-08-20 버블 제거수단이 장착된 감광액 제거장치 KR0121510Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940021009U KR0121510Y1 (ko) 1994-08-20 1994-08-20 버블 제거수단이 장착된 감광액 제거장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940021009U KR0121510Y1 (ko) 1994-08-20 1994-08-20 버블 제거수단이 장착된 감광액 제거장치

Publications (2)

Publication Number Publication Date
KR960009281U true KR960009281U (ko) 1996-03-16
KR0121510Y1 KR0121510Y1 (ko) 1998-08-17

Family

ID=19391100

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940021009U KR0121510Y1 (ko) 1994-08-20 1994-08-20 버블 제거수단이 장착된 감광액 제거장치

Country Status (1)

Country Link
KR (1) KR0121510Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100421709B1 (ko) * 1996-10-16 2004-05-06 엘지.필립스 엘시디 주식회사 필터가장착된스트립장비
KR19990018143A (ko) * 1997-08-26 1999-03-15 윤종용 반도체장치 제조용 시너 분사장치

Also Published As

Publication number Publication date
KR0121510Y1 (ko) 1998-08-17

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