KR960020247U - 버블용액제거 수단을 갖는 감광액 여과 시스템 - Google Patents

버블용액제거 수단을 갖는 감광액 여과 시스템

Info

Publication number
KR960020247U
KR960020247U KR2019940034299U KR19940034299U KR960020247U KR 960020247 U KR960020247 U KR 960020247U KR 2019940034299 U KR2019940034299 U KR 2019940034299U KR 19940034299 U KR19940034299 U KR 19940034299U KR 960020247 U KR960020247 U KR 960020247U
Authority
KR
South Korea
Prior art keywords
filtration system
removal means
bubble solution
solution removal
photoresist filtration
Prior art date
Application number
KR2019940034299U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940034299U priority Critical patent/KR960020247U/ko
Publication of KR960020247U publication Critical patent/KR960020247U/ko

Links

KR2019940034299U 1994-12-16 1994-12-16 버블용액제거 수단을 갖는 감광액 여과 시스템 KR960020247U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940034299U KR960020247U (ko) 1994-12-16 1994-12-16 버블용액제거 수단을 갖는 감광액 여과 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940034299U KR960020247U (ko) 1994-12-16 1994-12-16 버블용액제거 수단을 갖는 감광액 여과 시스템

Publications (1)

Publication Number Publication Date
KR960020247U true KR960020247U (ko) 1996-07-18

Family

ID=60852252

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940034299U KR960020247U (ko) 1994-12-16 1994-12-16 버블용액제거 수단을 갖는 감광액 여과 시스템

Country Status (1)

Country Link
KR (1) KR960020247U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100336421B1 (ko) * 2000-04-11 2002-05-10 이종갑 기판 자재 제조공정에서의 현상액 거품 제거방법 및제거장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100336421B1 (ko) * 2000-04-11 2002-05-10 이종갑 기판 자재 제조공정에서의 현상액 거품 제거방법 및제거장치

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application