KR960008699A - Slider manufacturing method of thin film magnetic head and exposure apparatus thereof - Google Patents
Slider manufacturing method of thin film magnetic head and exposure apparatus thereof Download PDFInfo
- Publication number
- KR960008699A KR960008699A KR1019940021645A KR19940021645A KR960008699A KR 960008699 A KR960008699 A KR 960008699A KR 1019940021645 A KR1019940021645 A KR 1019940021645A KR 19940021645 A KR19940021645 A KR 19940021645A KR 960008699 A KR960008699 A KR 960008699A
- Authority
- KR
- South Korea
- Prior art keywords
- exposure
- slider
- magnetic head
- thin film
- film magnetic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
본 발명은 박막 자기헤드의 슬라이더 제조방법 및 그 노광장치에 관한 것으로, 좀 더 상세하게는 상기 방법은 a) 노광용 기판(12)위에 슬라이더 기판(8)을 배치시키고 상기 슬라이드 기판(8)위에 DLC막과 감광막(9)을 순차적으로 형성시키는 공정; b) 노광 마스크(13)를 일정속도로 이동 가능한 노광장치를 이용하여 감광막(9)이 곡면형태를 이루도록 노광시키는 공정; 및 c) 이온빔 에칭법을 이용하여 상기 곡면형 감광막(9)을 에칭시키는 공정으로 이루어지므로써 슬라이더의 ABS 가공치수 및 형태를 정밀하게 제어할 수 있으며 결함발생을 완화시키고 산화 또는 부식을 감소시킬 수 있으며 매체와의 접촉으로 인한 마모에 대처하면서 이륙시간을 줄일 수 있어 이로 인한 입지발생을 최소화할 수 있는 잇점이 있다.The present invention relates to a method for manufacturing a slider of a thin film magnetic head and an exposure apparatus thereof. More specifically, the method includes: a) arranging a slider substrate 8 on an exposure substrate 12 and a DLC on the slide substrate 8; Forming a film and a photosensitive film 9 sequentially; b) exposing the photosensitive film 9 to form a curved shape by using an exposure apparatus which is capable of moving the exposure mask 13 at a constant speed; And c) etching the curved photoresist 9 using ion beam etching, thereby precisely controlling the size and shape of the ABS machining of the slider, thereby reducing defects and reducing oxidation or corrosion. In addition, the take-off time can be reduced while coping with abrasion due to contact with the medium, thereby minimizing the occurrence of location.
한편, 박막 자기헤드의 슬라이더 제조용 노광장치는 상부에 노광램프(10)가 형성되고 하부에 노광용 기판(12)과 이를 안착시킬 수 있는 척(11)이 형성된 박막 자기헤드의 슬라이더 제조용 노광장치에 있어서, 상기 노광 램프(10)와 노광용 기판(12)사이에 노광 마스크(13)의 이동을 가능토록 한 가이드 레일(14)이 형성되고 노광 마스크(13)의 일측에 구동수단(15)이 형성된 것에 특징이 있다.On the other hand, the exposure apparatus for manufacturing a slider of a thin film magnetic head is a slider manufacturing exposure apparatus for a thin film magnetic head in which an exposure lamp 10 is formed at an upper portion thereof, and an exposure substrate 12 and a chuck 11 capable of seating the same are formed in a lower portion thereof. The guide rail 14 is formed between the exposure lamp 10 and the exposure substrate 12 to allow the movement of the exposure mask 13, and the driving means 15 is formed on one side of the exposure mask 13. There is a characteristic.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제4도는 본 발명에 따른 노광장치의 개략도이며,4 is a schematic view of an exposure apparatus according to the present invention,
제5도는 본 발명에 따른 노광 마스크와 슬라이더 로(row)의 배치도이고,5 is a layout view of an exposure mask and a slider row according to the present invention,
제6도는 본 발명에 따라 노광된 감광막의 노광에너지 분포도이다.6 is an exposure energy distribution diagram of a photosensitive film exposed according to the present invention.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940021645A KR100264005B1 (en) | 1994-08-30 | 1994-08-30 | Manufacturing method for slider of thin film magnetic head and its device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940021645A KR100264005B1 (en) | 1994-08-30 | 1994-08-30 | Manufacturing method for slider of thin film magnetic head and its device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960008699A true KR960008699A (en) | 1996-03-22 |
KR100264005B1 KR100264005B1 (en) | 2000-08-16 |
Family
ID=19391561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940021645A KR100264005B1 (en) | 1994-08-30 | 1994-08-30 | Manufacturing method for slider of thin film magnetic head and its device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100264005B1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6209591B1 (en) | 1999-02-02 | 2001-04-03 | Steuben Foods, Inc. | Apparatus and method for providing container filling in an aseptic processing apparatus |
US6475435B1 (en) | 1999-02-02 | 2002-11-05 | Steuben Foods Incorporated | Apparatus and method for providing sterilization zones in an aseptic packaging sterilization tunnel |
US6536188B1 (en) | 1999-02-02 | 2003-03-25 | Steuben Foods, Inc. | Method and apparatus for aseptic packaging |
US6702985B1 (en) | 1999-07-15 | 2004-03-09 | Steuben Foods, Inc. | Apparatus and method for providing container interior sterilization in an aseptic processing apparatus |
-
1994
- 1994-08-30 KR KR1019940021645A patent/KR100264005B1/en not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6209591B1 (en) | 1999-02-02 | 2001-04-03 | Steuben Foods, Inc. | Apparatus and method for providing container filling in an aseptic processing apparatus |
US6475435B1 (en) | 1999-02-02 | 2002-11-05 | Steuben Foods Incorporated | Apparatus and method for providing sterilization zones in an aseptic packaging sterilization tunnel |
US6536188B1 (en) | 1999-02-02 | 2003-03-25 | Steuben Foods, Inc. | Method and apparatus for aseptic packaging |
US6945013B2 (en) | 1999-02-02 | 2005-09-20 | Steuben Foods Incorporated | Method and apparatus for aseptic packaging |
US6702985B1 (en) | 1999-07-15 | 2004-03-09 | Steuben Foods, Inc. | Apparatus and method for providing container interior sterilization in an aseptic processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR100264005B1 (en) | 2000-08-16 |
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