KR960007258U - Robot arm calibration device - Google Patents

Robot arm calibration device

Info

Publication number
KR960007258U
KR960007258U KR2019940020048U KR19940020048U KR960007258U KR 960007258 U KR960007258 U KR 960007258U KR 2019940020048 U KR2019940020048 U KR 2019940020048U KR 19940020048 U KR19940020048 U KR 19940020048U KR 960007258 U KR960007258 U KR 960007258U
Authority
KR
South Korea
Prior art keywords
robot arm
calibration device
arm calibration
robot
calibration
Prior art date
Application number
KR2019940020048U
Other languages
Korean (ko)
Other versions
KR0117491Y1 (en
Inventor
정길종
최영일
김성진
김광성
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940020048U priority Critical patent/KR0117491Y1/en
Publication of KR960007258U publication Critical patent/KR960007258U/en
Application granted granted Critical
Publication of KR0117491Y1 publication Critical patent/KR0117491Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940020048U 1994-08-09 1994-08-09 A device for correcting an robot arm KR0117491Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940020048U KR0117491Y1 (en) 1994-08-09 1994-08-09 A device for correcting an robot arm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940020048U KR0117491Y1 (en) 1994-08-09 1994-08-09 A device for correcting an robot arm

Publications (2)

Publication Number Publication Date
KR960007258U true KR960007258U (en) 1996-03-13
KR0117491Y1 KR0117491Y1 (en) 1998-06-01

Family

ID=19390341

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940020048U KR0117491Y1 (en) 1994-08-09 1994-08-09 A device for correcting an robot arm

Country Status (1)

Country Link
KR (1) KR0117491Y1 (en)

Also Published As

Publication number Publication date
KR0117491Y1 (en) 1998-06-01

Similar Documents

Publication Publication Date Title
DE59606841D1 (en) Position measuring device
KR960000743U (en) Robot anti-vibration device
DE29618149U1 (en) Six-axis adjustment device
DE69408118T3 (en) ROBOT DEVICE
DE59901037D1 (en) robot arm
DE59508231D1 (en) Position measuring device
NO951960D0 (en) Calibration device
DE69830088D1 (en) Robot device
KR960007258U (en) Robot arm calibration device
KR960017001U (en) Arm rest
KR960020595U (en) Dual Arm Robot
DE59508237D1 (en) Position measuring device
KR960030680U (en) Small robot device
KR950011082U (en) Robot arm error correction device
DE29521403U1 (en) Position measuring device
KR960020612U (en) Measuring jig device for robot arm
DE19681722T1 (en) Manipulator device
KR950024670U (en) Robot part mounting device
KR960025420U (en) Arm position adjusting device
KR960007265U (en) Robot arm cable support
DE9422027U1 (en) Position measuring device
DE9413205U1 (en) Position measuring device
DE9421534U1 (en) Position measuring device
DE9422021U1 (en) Position measuring device
KR950029752U (en) Standard position correction device for industrial robots

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20080102

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee