KR960001720Y1 - Magnetic coil cooling apparatus of ecr - Google Patents
Magnetic coil cooling apparatus of ecr Download PDFInfo
- Publication number
- KR960001720Y1 KR960001720Y1 KR92025630U KR920025630U KR960001720Y1 KR 960001720 Y1 KR960001720 Y1 KR 960001720Y1 KR 92025630 U KR92025630 U KR 92025630U KR 920025630 U KR920025630 U KR 920025630U KR 960001720 Y1 KR960001720 Y1 KR 960001720Y1
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- coil
- cooling
- ecr
- magnetic coil
- equipment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
내용 없음.No content.
Description
제1도는 종래 ECR 장비의 마그네틱 코일 단면도.1 is a cross-sectional view of a magnetic coil of a conventional ECR device.
제2도는 본 고안에 따른 ECR 장비의 마그네틱 코일 단면도.2 is a cross-sectional view of the magnetic coil of the ECR device according to the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 냉각수 주입구 2 : 냉각수 출구1: Cooling water inlet 2: Cooling water outlet
3 : 워터 자켓(water jacket) 4 : 코일3: water jacket 4: coil
5 : 냉각선 6 : 코일 케이스5: cooling line 6: coil case
본 고안은 반도체 제조 장치인 전자사이크로트론공면(Eleotroncyclotron resonance ; 이하 ECR이라 칭함) 장비의 마그네틱 코일냉각 장치에 관한 것이다.The present invention relates to a magnetic coil cooling device of an electronic cyclotron resonance (ECR) device, which is a semiconductor manufacturing device.
종래의 ECR 장비의 마그네틱 코일(magnetic coil)에서 워터자켓(water jacket)을 이용한 냉각 방식을 제1도를 통하여 살펴보면, 도면에서 1은 냉각수 주입구, 2는 냉각수 출구, 3은 워터자켓, 4는 코일, 5는 냉각선, 6은 코일 케이스를 각각 나타낸다.Looking at the cooling method using a water jacket (water jacket) in the magnetic coil of the conventional ECR equipment through Figure 1, 1 is a coolant inlet, 2 is a coolant outlet, 3 is a water jacket, 4 is a coil , 5 represents a cooling line, 6 represents a coil case, respectively.
제1도에 도시한 바와 같이 종래의 마그네틱 코일 자장은 코일의 권선수와 인가접압에 비례함으로 종래 워터자켓 냉각방식을 사용한 마그네틱 코일에서는 코일을 일체형으로 제작하지 않고, 즉 한개의 구리선을 감아서 제작한 것이아니라 소형 코일을 여러개 제작한 후 이를 직렬로 연결해서 일체형으로 제작했을때와 같은 권선수를 갖는 효과를 얻었다. 이렇게 구성된 코일사이에 워터자켓을 설치하여 코일을 냉각 시키게 되는데, 도면에 도시된 바와 같이 코일(4)사이에 워터 쟈켓(3)을 설치하여 이 워터 자켓(3)내부에 냉각수를 냉각선(5)을 통해 순환시켜 코일의 열을 냉각시켰다.As shown in FIG. 1, the magnetic field of the conventional magnetic coil is proportional to the number of coils and the applied contact pressure. Therefore, in the magnetic coil using the conventional water jacket cooling method, the coil is not manufactured integrally, that is, manufactured by winding one copper wire. Instead of making several small coils and connecting them in series, they have the same number of turns as those produced in one piece. The water jacket is installed between the coils configured as described above to cool the coil. As shown in the drawing, the water jacket 3 is installed between the coils 4 to cool the water inside the water jacket 3. Circulating through) to cool the heat of the coil.
그러나 상기 종래의 코일 냉각방식과 같이 냉각수가 코일의 구리선과 직접 접촉하여 코일을 냉각시키는 것이 아니라 금속으로 만들어진 워터 자켓 내부를 순환하면서 자켓의 온도을 냉각함으로써 코일을 냉각하는 간접 냉각 방식은 냉각효율이 떨어지게되고, 또한 워터자켓의 부피 및 무게만큼 전체 ECR장비의 무게를 증가시키는 문제점이 있었다.However, as in the conventional coil cooling method, the indirect cooling method that cools the coil by cooling the temperature of the jacket while circulating inside the water jacket made of metal, rather than cooling the coil by directly contacting the copper wire of the coil, has low cooling efficiency. Also, there was a problem of increasing the weight of the entire ECR device by the volume and weight of the water jacket.
따라서 상기 문제점을 해결하기 위하여 안출된 본 고안은 ECR 장비의 코일냉각을 직접방식으로 변화하여 냉각효과를 증가 시키고 장비의 무게를 감소시켜 장비의 효율적 관리를 도모할 수 있는 반도체 제조 장치인 이시알(ECR) 장비의 마그네틱 코일 냉각 장치을 제공하는데 그 목적이 있다.Therefore, the present invention devised to solve the above problems is to change the coil cooling of the ECR equipment in a direct manner to increase the cooling effect and reduce the weight of the equipment is a semiconductor manufacturing device that can promote the efficient management of equipment It is an object of the present invention to provide a magnetic coil cooling device for ECR) equipment.
상기 목적을 달성하기 위하여 본 고안은, 반도체 제조 장치인 ECR 장비의 마그네틱 코일 냉각 장치에 있어서, 코일 케이스 내에 간격을 두고 직렬연결되어 형성된 소형 코일, 상기 코일사이에 형성되는 간격에 냉각수가 상기 코일과 직접 접촉하면서 통과할 수 있도록 상기 코일 케이스에 형성되는 냉각수 주입구와 냉각수 출구를 포함하여 이루어 지는 것을 특징으로 한다.In order to achieve the above object, the present invention, in the magnetic coil cooling device of the ECR equipment, which is a semiconductor manufacturing apparatus, a small coil formed in series connected at intervals in the coil case, the cooling water in the gap formed between the coil and the coil It characterized in that it comprises a cooling water inlet and a cooling water outlet formed in the coil case so as to pass through while in direct contact.
이하, 첨부된 도면 제2도를 참조하여 본 고안에 따른 일 실시예를 상세히 설명하면 다음과 같다.Hereinafter, an embodiment according to the present invention will be described in detail with reference to FIG. 2.
코일 케이스(5) 내에 일정한 간격을 두고 소형 코일(4)을 직렬연결한다. 그리고 상기 코일(4) 사이에 형성되는 간격에 냉각수(3)나 절연유가 통과할 수 있도록 냉각수 주입구(1)와 냉각수 출구(2)를 형성한다.The small coils 4 are connected in series at regular intervals in the coil case 5. The coolant inlet 1 and the coolant outlet 2 are formed to allow the coolant 3 or the insulating oil to pass through the gaps formed between the coils 4.
따라서 상기 소형 코일(4)들이 워터 자켓과 같은 중간매체를 통해서 냉각되는 것이 아니라 냉각매체가 직접 상기 코일(4)에 접촉을 하게 하여 코일의 냉각을 이루게 된다.Therefore, the small coils 4 are not cooled through an intermediate medium such as a water jacket, but the cooling medium is brought into direct contact with the coils 4 to achieve cooling of the coils.
상기와 같이 이루어 지는 본 고안은 코일의 권수가 많거나, 인가전류가 커서 코일에서 많은 열이 발생하고, 특히 일체형인 경우 코일 중심부의 복합열에 의한 급격한 온도상승은 소형 코일의 직렬 연결방시과 소형 코일과 냉매에 의한 직접접촉으로 냉각 시킴으로써 냉각효율을 높일 수 있고, 또한 워터 자켓을 사용하지 않기 때문에 장비의 부피 및 무게르 줄일 수 있는 효과가 있다.The present invention made as described above has a large number of turns of the coil or a large amount of applied current, so that a lot of heat is generated in the coil, and especially in the case of an integral type, the rapid temperature rise due to the complex heat in the center of the coil causes the series connection of the small coil and the small coil. Cooling efficiency can be increased by cooling by direct contact with the refrigerant, and the volume and weight of the equipment can be reduced because the water jacket is not used.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92025630U KR960001720Y1 (en) | 1992-12-16 | 1992-12-16 | Magnetic coil cooling apparatus of ecr |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92025630U KR960001720Y1 (en) | 1992-12-16 | 1992-12-16 | Magnetic coil cooling apparatus of ecr |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940017915U KR940017915U (en) | 1994-07-28 |
| KR960001720Y1 true KR960001720Y1 (en) | 1996-02-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR92025630U KR960001720Y1 (en) | 1992-12-16 | 1992-12-16 | Magnetic coil cooling apparatus of ecr |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR960001720Y1 (en) |
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1992
- 1992-12-16 KR KR92025630U patent/KR960001720Y1/en not_active IP Right Cessation
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| Publication number | Publication date |
|---|---|
| KR940017915U (en) | 1994-07-28 |
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