KR950034043U - Chemical solution heating tank - Google Patents
Chemical solution heating tankInfo
- Publication number
- KR950034043U KR950034043U KR2019940012332U KR19940012332U KR950034043U KR 950034043 U KR950034043 U KR 950034043U KR 2019940012332 U KR2019940012332 U KR 2019940012332U KR 19940012332 U KR19940012332 U KR 19940012332U KR 950034043 U KR950034043 U KR 950034043U
- Authority
- KR
- South Korea
- Prior art keywords
- chemical solution
- heating tank
- solution heating
- tank
- chemical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940012332U KR0113623Y1 (en) | 1994-05-30 | 1994-05-30 | Heater bath for chemical solution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940012332U KR0113623Y1 (en) | 1994-05-30 | 1994-05-30 | Heater bath for chemical solution |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950034043U true KR950034043U (en) | 1995-12-18 |
KR0113623Y1 KR0113623Y1 (en) | 1998-04-11 |
Family
ID=19384476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940012332U KR0113623Y1 (en) | 1994-05-30 | 1994-05-30 | Heater bath for chemical solution |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0113623Y1 (en) |
-
1994
- 1994-05-30 KR KR2019940012332U patent/KR0113623Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0113623Y1 (en) | 1998-04-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20081027 Year of fee payment: 12 |
|
EXPY | Expiration of term |