KR950034043U - Chemical solution heating tank - Google Patents

Chemical solution heating tank

Info

Publication number
KR950034043U
KR950034043U KR2019940012332U KR19940012332U KR950034043U KR 950034043 U KR950034043 U KR 950034043U KR 2019940012332 U KR2019940012332 U KR 2019940012332U KR 19940012332 U KR19940012332 U KR 19940012332U KR 950034043 U KR950034043 U KR 950034043U
Authority
KR
South Korea
Prior art keywords
chemical solution
heating tank
solution heating
tank
chemical
Prior art date
Application number
KR2019940012332U
Other languages
Korean (ko)
Other versions
KR0113623Y1 (en
Inventor
김동석
문형영
인정환
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940012332U priority Critical patent/KR0113623Y1/en
Publication of KR950034043U publication Critical patent/KR950034043U/en
Application granted granted Critical
Publication of KR0113623Y1 publication Critical patent/KR0113623Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
KR2019940012332U 1994-05-30 1994-05-30 Heater bath for chemical solution KR0113623Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940012332U KR0113623Y1 (en) 1994-05-30 1994-05-30 Heater bath for chemical solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940012332U KR0113623Y1 (en) 1994-05-30 1994-05-30 Heater bath for chemical solution

Publications (2)

Publication Number Publication Date
KR950034043U true KR950034043U (en) 1995-12-18
KR0113623Y1 KR0113623Y1 (en) 1998-04-11

Family

ID=19384476

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940012332U KR0113623Y1 (en) 1994-05-30 1994-05-30 Heater bath for chemical solution

Country Status (1)

Country Link
KR (1) KR0113623Y1 (en)

Also Published As

Publication number Publication date
KR0113623Y1 (en) 1998-04-11

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Payment date: 20081027

Year of fee payment: 12

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