KR950010181U - Corrosion solution heating heater - Google Patents

Corrosion solution heating heater

Info

Publication number
KR950010181U
KR950010181U KR2019930019009U KR930019009U KR950010181U KR 950010181 U KR950010181 U KR 950010181U KR 2019930019009 U KR2019930019009 U KR 2019930019009U KR 930019009 U KR930019009 U KR 930019009U KR 950010181 U KR950010181 U KR 950010181U
Authority
KR
South Korea
Prior art keywords
heating heater
solution heating
corrosion solution
corrosion
heater
Prior art date
Application number
KR2019930019009U
Other languages
Korean (ko)
Other versions
KR960008661Y1 (en
Inventor
이건원
Original Assignee
이건원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이건원 filed Critical 이건원
Priority to KR2019930019009U priority Critical patent/KR960008661Y1/en
Publication of KR950010181U publication Critical patent/KR950010181U/en
Application granted granted Critical
Publication of KR960008661Y1 publication Critical patent/KR960008661Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019930019009U 1993-09-21 1993-09-21 Heater for heating of etching chemical KR960008661Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930019009U KR960008661Y1 (en) 1993-09-21 1993-09-21 Heater for heating of etching chemical

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930019009U KR960008661Y1 (en) 1993-09-21 1993-09-21 Heater for heating of etching chemical

Publications (2)

Publication Number Publication Date
KR950010181U true KR950010181U (en) 1995-04-24
KR960008661Y1 KR960008661Y1 (en) 1996-10-07

Family

ID=19364000

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930019009U KR960008661Y1 (en) 1993-09-21 1993-09-21 Heater for heating of etching chemical

Country Status (1)

Country Link
KR (1) KR960008661Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150064619A (en) 2013-12-03 2015-06-11 한국단자공업 주식회사 Seal and waterproof connector having the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200197146Y1 (en) * 2000-05-03 2000-09-15 박명선 Combustion device of gas burner for cooking

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150064619A (en) 2013-12-03 2015-06-11 한국단자공업 주식회사 Seal and waterproof connector having the same

Also Published As

Publication number Publication date
KR960008661Y1 (en) 1996-10-07

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 19991008

Year of fee payment: 4

LAPS Lapse due to unpaid annual fee