KR950030250A - Tape Removal Method in Semiconductor Back Grinding Process - Google Patents
Tape Removal Method in Semiconductor Back Grinding Process Download PDFInfo
- Publication number
- KR950030250A KR950030250A KR1019940006947A KR19940006947A KR950030250A KR 950030250 A KR950030250 A KR 950030250A KR 1019940006947 A KR1019940006947 A KR 1019940006947A KR 19940006947 A KR19940006947 A KR 19940006947A KR 950030250 A KR950030250 A KR 950030250A
- Authority
- KR
- South Korea
- Prior art keywords
- tape
- back grinding
- grinding process
- semiconductor back
- removal method
- Prior art date
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Abstract
본 발명은 테이프 제거시 잔류물이 남지 않도록 UV(ultra-violet) 조사기를 사용 테이프를 경화시키는 것을 내용으로 하는 반도체 백 그라인딩 공정시의 테이프 제거 방법에 관한 것으로, 감광막 코팅 및 제거 단계를 생략함으로써 소자의 공정시간 단축 및 수율을 향상시키는 효과가 있다.The present invention relates to a method for removing a tape during a semiconductor back grinding process, wherein the tape is cured using an ultraviolet (ultra-violet) irradiator so that no residue is left upon removing the tape. It is effective in shortening the process time and improving the yield.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940006947A KR950030250A (en) | 1994-04-01 | 1994-04-01 | Tape Removal Method in Semiconductor Back Grinding Process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940006947A KR950030250A (en) | 1994-04-01 | 1994-04-01 | Tape Removal Method in Semiconductor Back Grinding Process |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950030250A true KR950030250A (en) | 1995-11-24 |
Family
ID=66677396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940006947A KR950030250A (en) | 1994-04-01 | 1994-04-01 | Tape Removal Method in Semiconductor Back Grinding Process |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950030250A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100502406B1 (en) * | 1998-05-11 | 2005-09-26 | 삼성전자주식회사 | UV tape removal device and method for semiconductor device manufacturing |
-
1994
- 1994-04-01 KR KR1019940006947A patent/KR950030250A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100502406B1 (en) * | 1998-05-11 | 2005-09-26 | 삼성전자주식회사 | UV tape removal device and method for semiconductor device manufacturing |
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