KR950024149A - Thin film magnetic head and its manufacturing method - Google Patents

Thin film magnetic head and its manufacturing method Download PDF

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Publication number
KR950024149A
KR950024149A KR1019940001613A KR19940001613A KR950024149A KR 950024149 A KR950024149 A KR 950024149A KR 1019940001613 A KR1019940001613 A KR 1019940001613A KR 19940001613 A KR19940001613 A KR 19940001613A KR 950024149 A KR950024149 A KR 950024149A
Authority
KR
South Korea
Prior art keywords
magnetic head
thin film
film magnetic
manufacturing
film
Prior art date
Application number
KR1019940001613A
Other languages
Korean (ko)
Other versions
KR100256066B1 (en
Inventor
동성운
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019940001613A priority Critical patent/KR100256066B1/en
Publication of KR950024149A publication Critical patent/KR950024149A/en
Application granted granted Critical
Publication of KR100256066B1 publication Critical patent/KR100256066B1/en

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)

Abstract

본 발명은 박막 자기헤드 및 이의 제조방법에 관한 것으로, 좀 더 상세하게는 기관(11)상에 기능막(12)을 적층시키고 상기 기능막(12)의 전명 일측에 도금 하지막(13), 금속 패드(14)및 금범프(17)를 순차적으로 형성시켜서 된 박막 자기헤드에서, 상기 기능막(12)의 전면 일측을 제외한 부분에 상기 금속패드(14)의 상단보다 낮게 리지스트(15’)를 형성시키고 그 위에 산화절연층(16)을 형성시키므로써 패드부 주의의 산화절연막을 균일하게 도포시키고 공정시간을 단축시킬 수 있는 박막자기헤드 및 이의 제조방법에 관한 것이다.The present invention relates to a thin film magnetic head and a method for manufacturing the same. More specifically, the functional film 12 is laminated on the engine 11 and the plated base film 13 is formed on one side of the functional film 12. In the thin film magnetic head formed by sequentially forming the metal pad 14 and the gold bump 17, the resist 15 ′ is lower than the upper end of the metal pad 14 in the portion except the one side of the front surface of the functional film 12. The present invention relates to a thin film magnetic head capable of uniformly applying the oxide insulating film of the pad portion and to shortening the processing time by forming a) and forming the oxide insulating layer 16 thereon.

Description

박막자기헤드 및 이의 제조방법Thin film magnetic head and its manufacturing method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1(a)∼(f)도는 종래의 박막 자기헤드의 제조공정도이고,(A)-(f) is a manufacturing process drawing of a conventional thin film magnetic head,

제2(a)∼(h)도는 본 발명의 박막 자기헤드의 제조공정도이다.2 (a) to (h) are manufacturing process diagrams of the thin film magnetic head of the present invention.

Claims (2)

기관(11)상에 기능막(12)을 적층시키고 상기 기능막(12)의 전면 일측에 도금 하지막(13), 금속 패드(14)및 금범프(17)를 순차적으로 형성시켜서 된 박막 자기헤드에서, 상기 기능막(12)의 전면 일측을 제외한 부분에 상기 금속패드(14)의 상단보다 낮게 리지스트(15’)를 형성시키고 그 위에 산화절연층(16)을 형성시켜서 된 박막 자기헤드.A thin film porcelain formed by stacking the functional film 12 on the engine 11 and sequentially forming the plated base film 13, the metal pad 14, and the gold bump 17 on one side of the front surface of the functional film 12. In the head, a thin film magnetic head formed by forming a resist 15 'below the upper end of the metal pad 14 and forming an oxide insulating layer 16 thereon except at one side of the front surface of the functional film 12. . 기관(11)상에 기능막(12)을 적층시키고 상기 기능막(12)의 전면 일측에 도금 하지막(13), 금속 패드(14)및 금범프(17)를 순차적으로 형성시키는 박막 자기헤드의 제조방법에 있어서, 상기 기능막(12)의 전면 일측을 제외한 부분에 상기 금속패드(14)의 상단보다 낮게 리지스트(15’)를 형성시키고 그 위에 산화절연층(16)을 형성시키는 것을 특징으로 하는 박막 자기헤드의 제조방법.A thin film magnetic head for laminating the functional film 12 on the engine 11 and sequentially forming the plated base film 13, the metal pad 14, and the gold bump 17 on one side of the front surface of the functional film 12. In the method of manufacturing, the resist 15 'is formed at a portion other than one side of the front surface of the functional film 12 than the upper end of the metal pad 14, and the oxide insulating layer 16 is formed thereon. A method of manufacturing a thin film magnetic head. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940001613A 1994-01-28 1994-01-28 Mamufacturing method for thin magnetic head and thin magnetic head KR100256066B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940001613A KR100256066B1 (en) 1994-01-28 1994-01-28 Mamufacturing method for thin magnetic head and thin magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940001613A KR100256066B1 (en) 1994-01-28 1994-01-28 Mamufacturing method for thin magnetic head and thin magnetic head

Publications (2)

Publication Number Publication Date
KR950024149A true KR950024149A (en) 1995-08-21
KR100256066B1 KR100256066B1 (en) 2000-05-01

Family

ID=19376430

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940001613A KR100256066B1 (en) 1994-01-28 1994-01-28 Mamufacturing method for thin magnetic head and thin magnetic head

Country Status (1)

Country Link
KR (1) KR100256066B1 (en)

Also Published As

Publication number Publication date
KR100256066B1 (en) 2000-05-01

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