KR950019710A - Observation method of optical surface roughness measurement error using standard specimen - Google Patents

Observation method of optical surface roughness measurement error using standard specimen Download PDF

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Publication number
KR950019710A
KR950019710A KR1019930031647A KR930031647A KR950019710A KR 950019710 A KR950019710 A KR 950019710A KR 1019930031647 A KR1019930031647 A KR 1019930031647A KR 930031647 A KR930031647 A KR 930031647A KR 950019710 A KR950019710 A KR 950019710A
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South Korea
Prior art keywords
surface roughness
specimen
standard specimen
light
infrared
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KR1019930031647A
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Korean (ko)
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KR0119004B1 (en
Inventor
주만길
임충수
김달우
Original Assignee
조말수
포항종합제철 주식회사
백덕현
재단법인산업과학기술연구소
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Priority to KR1019930031647A priority Critical patent/KR0119004B1/en
Publication of KR950019710A publication Critical patent/KR950019710A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light

Abstract

본 발명은 표준시편을 이용한 광학적 표면거칠기 측정오차의 관찰방법에 관한 것이다.The present invention relates to a method for observing an optical surface roughness measurement error using a standard specimen.

그 구성은 빛살가르개(10)를 적외선 거을(9)의 후측에 위치시켜 측정시편(13)을 거친 정반사광(P2)과 표준시편(17)을 거친 정반사광(P3)을 광검출기(16) 및 (19)에서 검출하고, 상기의 표준시편의 정반사광(P3)에 의한 표면거칠기를 산출하여 이미 알고 있는 표준시편의 표면거칠기를 비교함으로서, 측정 시편(13)의 표면거칠기에 대한 산출갈을 신뢰할 수 있다.The configuration is such that the light filter 10 is positioned at the rear side of the infrared filter 9 so that the specular reflection light P 2 passing through the measurement specimen 13 and the specular reflection light P 3 passing through the standard specimen 17 are detected. The surface roughness of the measurement specimen 13 is determined by (16) and (19), and by calculating the surface roughness by the specular reflection light (P 3 ) of the standard specimen and comparing the surface roughness of the known standard specimen. You can trust the output for

Description

표준시편을 이용한 광학적 표면거칠기 측정오차의 관찰방법Observation method of optical surface roughness measurement error using standard specimen

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 의한 표준시편을 이용한 광학적 표면거칠기 측정오차의 관찰방법을 도시한 개략도,1 is a schematic diagram showing a method for observing an optical surface roughness measurement error using a standard specimen according to the present invention,

제2도는 본 발명에 의한 광학적 표면거칠기 측정오차의 관찰방법을 도시한 측정단계 흐름도,2 is a flowchart illustrating a method for observing an optical surface roughness measurement error according to the present invention;

제3도는 종래의 광학적 표면 거칠기를 측정하는 방법을 도시한 개략도이다.3 is a schematic diagram illustrating a method of measuring conventional optical surface roughness.

Claims (1)

레이저(1)로부터 출력된 광선이 광변조기(2)를 통하여 빛살가르게(3)로 입사되며, 상기 빛살가르게(3)에서 볼록렌즈(4) 및 광검출기(5)를 통하여 총반사광(p1)이 검출되고, 상기 빛살가르게(3)에서 적외선 거울(6), 볼록렌즈(7), (8), 적외선 거울(9), 측정시편(13), 적외선거울(14) 및 볼록렌지(15)를 거쳐 광 검출기(16)에서 정반사광(P2)을 검출하여 상기 측정시편(13)의 표면거칠기를 측정하는 방법에 있어서, 상기 적외선 거울(9)을 거친 광선은 빛살가르게(10)에 입사되어 일부는 적외선 거울(12), 측정시편(13), 적외선 거울(14) 및 볼록렌즈(15)를 거쳐 광검출기(16)에서 정반사광(P2)을 검술하는 상기의 과정을 거치며, 상기 빛살가르게(10)를 거친 나머지는 적외선 거울(11), (12), (14), 표준시편(17) 및 볼록렌즈(18)를 거쳐 광검출기(19)에서 표준시편(17)의 정반사광(P₃)을 검출하고, 상기 총반사광(P1)과 표준시편(17)의 정반사광(P3)으로 표준시편(17)의 표면거칠기를 산출하여 그 산출값과 이미 알고 있는 표준시편(17)의 표면거칠기를 비교함은 물론, 상기 값이 일치하면 측정시편(13)의 표면거칠기에 대한 측정값을 신뢰하고, 일치하지 않을 경우에는 상기 광학소자들을 재정렬함으로서 올바른 측정시편 (13)의 표면거칠기를 산출할 수 있음을 특징으로 하는 표준시편을 이용한 광학적 표면거칠기 측정오차의 관찰 방법.The light beam output from the laser 1 is incident on the light guide 3 through the optical modulator 2, and the total reflected light p 1 through the convex lens 4 and the photodetector 5 in the light guide 3. ), The infrared light mirror (3), convex lens (7), (8), infrared mirror (9), measuring specimen (13), infrared mirror (14) and convex lens (15) at the light source (3) In the method for detecting the surface roughness of the measurement specimen 13 by detecting the specularly reflected light (P 2 ) through the photo detector 16, the light beam passing through the infrared mirror (9) to the light (10) The incident part is subjected to the above process of inspecting the specularly reflected light P 2 in the photodetector 16 via the infrared mirror 12, the measurement specimen 13, the infrared mirror 14 and the convex lens 15, The remainder of the light guide 10 passes through the infrared mirrors 11, 12, 14, the standard specimen 17 and the convex lens 18, and the photodetector 19 is used to define the standard specimen 17. Reflected light (P₃) Ex, and the surface roughness of the total reflected light (P 1) and the standard specimen 17, regularly reflected light (P 3) as a standard specimen (17) surface roughness of the standard specimen (17) by calculating the known and the calculated value of the Of course, if the values coincide with each other, the measured value for the surface roughness of the measurement specimen 13 is trusted, and if it does not match, the surface roughness of the correct measurement specimen 13 can be calculated by rearranging the optical elements. Observation method of optical surface roughness measurement error using a standard specimen, characterized in that. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930031647A 1993-12-30 1993-12-30 Optical surface roughness measuring error watching method KR0119004B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930031647A KR0119004B1 (en) 1993-12-30 1993-12-30 Optical surface roughness measuring error watching method

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Application Number Priority Date Filing Date Title
KR1019930031647A KR0119004B1 (en) 1993-12-30 1993-12-30 Optical surface roughness measuring error watching method

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KR950019710A true KR950019710A (en) 1995-07-24
KR0119004B1 KR0119004B1 (en) 1997-09-30

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100850649B1 (en) * 1999-09-29 2008-08-07 램 리써치 코포레이션 Method and apparatus for characterization of microelectronic feature quality

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102182593B1 (en) * 2019-03-04 2020-11-24 네이버랩스 주식회사 Apparatus and method for evaluating optical performance of smart glass display module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100850649B1 (en) * 1999-09-29 2008-08-07 램 리써치 코포레이션 Method and apparatus for characterization of microelectronic feature quality

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