KR950016297A - Light Path Control - Google Patents

Light Path Control Download PDF

Info

Publication number
KR950016297A
KR950016297A KR1019930023726A KR930023726A KR950016297A KR 950016297 A KR950016297 A KR 950016297A KR 1019930023726 A KR1019930023726 A KR 1019930023726A KR 930023726 A KR930023726 A KR 930023726A KR 950016297 A KR950016297 A KR 950016297A
Authority
KR
South Korea
Prior art keywords
optical path
path control
mirror body
control device
mirror
Prior art date
Application number
KR1019930023726A
Other languages
Korean (ko)
Other versions
KR970006687B1 (en
Inventor
지정범
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR1019930023726A priority Critical patent/KR970006687B1/en
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to JP51372595A priority patent/JP3165444B2/en
Priority to PL94314228A priority patent/PL176490B1/en
Priority to CA002176111A priority patent/CA2176111A1/en
Priority to PCT/KR1994/000151 priority patent/WO1995013683A1/en
Priority to RU96112195A priority patent/RU2141175C1/en
Priority to CN94194092A priority patent/CN1047903C/en
Priority to HU9601095A priority patent/HU220517B1/en
Priority to BR9408009A priority patent/BR9408009A/en
Priority to CZ19961329A priority patent/CZ290728B6/en
Priority to AU81171/94A priority patent/AU693125B2/en
Priority to DE69420669T priority patent/DE69420669T2/en
Priority to EP94117538A priority patent/EP0652455B1/en
Priority to ES94117538T priority patent/ES2140492T3/en
Priority to ITMI942257A priority patent/IT1271708B/en
Priority to TW083110340A priority patent/TW279931B/zh
Priority to US08/336,021 priority patent/US5760947A/en
Publication of KR950016297A publication Critical patent/KR950016297A/en
Application granted granted Critical
Publication of KR970006687B1 publication Critical patent/KR970006687B1/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

본 발명은 광로조절장치에 관한 것으로서, 침적등의 방법으로 형성된 변형부는 일측의 하부표면이 지지부에 부착되어 실장되어, 타측의 모서리가 'ㄱ'자 형태를 이루어 일측은 모서리가 구동기판에 부착된 거울몸체의 일측 배부표면과 부착되어 이 변형부의 하부 및 상부표면에 있는 신호 및 바이어스전극 사이의 전위차에 의해 발생되는 전계의 세기에 따라 변형부가 수평방형으로 수축된다. 그러므로 변형부의 타측 모서리에 부착된 거울몸체의 일측이 지지부쪽으로 휘어져 타측의 평탄한 표면에 형성된 거울면이 평탄하게 기울어진다. 연마등의 번거로운 생산공정을 행하지 않고 침적등의 박막형성 방법으로 쉽게 얇게 형성될 수 있고, 액츄에이터들이 분리되므로 구동시 상호간섭을 방지할 수 있으며, 또한, 동일위상의 화상신호에 의해 인접하는 거울들을 동일한 방향으로 구동시킬 수 있다.The present invention relates to an optical path control apparatus, wherein a deformation part formed by a method such as deposition is mounted by attaching a lower surface of one side to a support part, and the other side forms a '-' shape, and one side of which is attached to a driving substrate. The deformation part is attached to the rear surface of one side of the mirror body, and the deformation part is contracted horizontally in accordance with the intensity of the electric field generated by the potential difference between the signal and the bias electrode on the lower and upper surfaces of the deformation part. Therefore, one side of the mirror body attached to the other edge of the deformable part is bent toward the support part such that the mirror surface formed on the flat surface of the other side is inclined flatly. It can be easily thinly formed by thin film formation method such as deposition without the cumbersome production process such as polishing, and because the actuators are separated, mutual interference can be prevented during driving, and adjacent mirrors can be prevented by the same phase image signal. It can be driven in the same direction.

Description

광로조절장치Light Path Control

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 따른 광로조절장치의 단면도.2 is a cross-sectional view of the optical path control apparatus according to the present invention.

Claims (7)

트랜지스터들이 내장되고 표면에 이 트랜지스터와 전기적으로 연결된 접속단자를 갖는 구동기판과, 상기 구동기판의 상부에 접속단자를 덮도록 형성된 지지부와, 박막의 세라믹으로 이루어져 상부 및 하부의 표면에 제1 및 제2전극들이 형성되며 이 지지부의 상부에 하부 표면의 일측이 부착되도록 실장된 변형부와, 상기 지지부를 관통하여 상기 접속단자와 제1전극을 전기적으로 연결하는 플러그로 이루어진 액츄에이터와, 상기 구동기판와 변형부의 모서리에 일측의 모서리와 내부표면에 부착되고 상기 변형부의 표면과 타측이 평행되도록 'ㄱ'자의 형태를 갖는 거울몸체와, 상기 거울몸체의 표면에 형성된 거울면을 구비하는 광로조절장치.A driving substrate having a built-in transistor and having a connection terminal electrically connected to the transistor on a surface thereof, a support formed to cover the connection terminal on an upper portion of the driving substrate, and a thin film of ceramics, the first and second surfaces of which An actuator comprising a deformable portion having two electrodes formed thereon and attached to one side of a lower surface on an upper portion of the support portion, an actuator penetrating the support portion to electrically connect the connection terminal and the first electrode, and the drive substrate and the deformable portion; An optical path control device having a mirror body attached to the corner and the inner surface of one side and a mirror body having a shape of 'b' so that the other side is parallel to the surface of the deformable portion, the mirror surface formed on the surface of the mirror body. 제1항에 있어서, 상기 변형부가 전왜 또는 압전세라믹으로 이루어진 광로조절장치.The optical path control device according to claim 1, wherein the deformable portion is made of a whole warp or piezoelectric ceramic. 제2항에 있어서, 상기 변형부가 Sol-Gel법, 스퍼터링 또는 화학기상 침적법으로 형성된 광로조절장치.The optical path control device according to claim 2, wherein the deformation part is formed by a Sol-Gel method, a sputtering method, or a chemical vapor deposition method. 제1항에 있어서, 상기 거울몸체가 폴리이미드등과 같이 탄성이 좋은 절연 물질로 형성된 광로조절장치.The optical path control device according to claim 1, wherein the mirror body is formed of an insulating material having good elasticity such as polyimide. 제4항에 있어서, 상기 거울면이 은 또는 알루미늄등의 반사특성이 좋은 물질로 형성된 광로조절장치.The optical path control device according to claim 4, wherein the mirror surface is formed of a material having good reflection characteristics such as silver or aluminum. 제1항에 있어서, 상기 거울몸체와 거울면이 동일한 물질로 형성된 광로조절장치.The optical path adjusting device of claim 1, wherein the mirror body and the mirror surface are made of the same material. 제6항에 있어서, 상기 거울몸체와 거울면이 은 또는 알루미늄등의 탄성 및 반사특성이 좋은 물질로 형성된 광로조절장치.The optical path control device according to claim 6, wherein the mirror body and the mirror surface are made of a material having good elasticity and reflection characteristics such as silver or aluminum. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930023726A 1993-11-09 1993-11-09 An optical path regulating apparatus KR970006687B1 (en)

Priority Applications (17)

Application Number Priority Date Filing Date Title
KR1019930023726A KR970006687B1 (en) 1993-11-09 1993-11-09 An optical path regulating apparatus
AU81171/94A AU693125B2 (en) 1993-11-09 1994-11-01 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
CA002176111A CA2176111A1 (en) 1993-11-09 1994-11-01 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
PCT/KR1994/000151 WO1995013683A1 (en) 1993-11-09 1994-11-01 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
RU96112195A RU2141175C1 (en) 1993-11-09 1994-11-01 Thin-film actuating mirror matrix for its use in optical projection system and method for its manufacturing
CN94194092A CN1047903C (en) 1993-11-09 1994-11-01 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
HU9601095A HU220517B1 (en) 1993-11-09 1994-11-01 Thin film actuated mirror array and method for the manufacture thereof
BR9408009A BR9408009A (en) 1993-11-09 1994-11-01 Arrangement of m x n movable thin film mirrors optical projection system method for manufacturing an arrangement of m x n movable thin film mirrors for use in an optical projection system
JP51372595A JP3165444B2 (en) 1993-11-09 1994-11-01 M × N thin-film actuated mirror array and method of manufacturing the same
PL94314228A PL176490B1 (en) 1993-11-09 1994-11-01 Moved system of thin-layer mirrors for use in an apparatus for optical projection and method of making such system
CZ19961329A CZ290728B6 (en) 1993-11-09 1994-11-01 Array of thin film actuated mirrors and process for preparing thereof
DE69420669T DE69420669T2 (en) 1993-11-09 1994-11-07 Arrangement of controlled thin-film mirrors for an optical projection system and method for their production
EP94117538A EP0652455B1 (en) 1993-11-09 1994-11-07 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
ES94117538T ES2140492T3 (en) 1993-11-09 1994-11-07 MATRIX OF THIN FILM DRIVEN MIRRORS INTENDED FOR AN OPTICAL PROJECTION SYSTEM AND ITS MANUFACTURING METHOD.
ITMI942257A IT1271708B (en) 1993-11-09 1994-11-08 THIN FILM-OPERATED MIRROR SET TO BE USED IN AN OPTICAL PROJECTION SYSTEM AND METHOD FOR ITS MANUFACTURE
TW083110340A TW279931B (en) 1993-11-09 1994-11-08
US08/336,021 US5760947A (en) 1993-11-09 1994-11-08 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930023726A KR970006687B1 (en) 1993-11-09 1993-11-09 An optical path regulating apparatus

Publications (2)

Publication Number Publication Date
KR950016297A true KR950016297A (en) 1995-06-17
KR970006687B1 KR970006687B1 (en) 1997-04-29

Family

ID=19367651

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930023726A KR970006687B1 (en) 1993-11-09 1993-11-09 An optical path regulating apparatus

Country Status (1)

Country Link
KR (1) KR970006687B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102438266B1 (en) 2021-12-08 2022-08-30 정재우 The filter for aquarium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102438266B1 (en) 2021-12-08 2022-08-30 정재우 The filter for aquarium

Also Published As

Publication number Publication date
KR970006687B1 (en) 1997-04-29

Similar Documents

Publication Publication Date Title
KR100213281B1 (en) The lightpath modulation device
JPH07151983A (en) Electrostrictive mirror actuator for light projecting system
RU96112195A (en) THIN FILM OPERATED MIRROR MATRIX FOR USE IN OPTICAL PROJECTION SYSTEM AND METHOD FOR ITS MANUFACTURE
US4280756A (en) Piezoelectric bi-morph mirror actuator
RU2125347C1 (en) Array of thin-film controlled reflectors for optical projection system and its manufacturing process
JPH06503689A (en) Piezoelectric and electrostrictive actuators
RU96113083A (en) MATRIX OF CONTROLLED THIN-FILM REFLECTORS INTENDED FOR USE IN THE OPTICAL PROJECTION SYSTEM, AND METHOD FOR ITS MANUFACTURE
RU96110182A (en) THIN FILM DRIVING MIRROR MATRIX AND METHOD FOR ITS MANUFACTURE
US20020075380A1 (en) Apparatus for outputting laser beam
KR950016297A (en) Light Path Control
JP2004109651A5 (en)
US5710657A (en) Monomorph thin film actuated mirror array
JPH02178602A (en) Vari-focal lens
JPH07199094A (en) Mxn-thin-film actuated mirror array
JPH07140402A (en) Piezoelectric actuator mirror array and its manufacture
US11825180B2 (en) Vibration device
JP2004537056A (en) Co-fired driving device for ring laser gyroscope and method of manufacturing the same
JPS5918932A (en) Optical deflecting device
JPH02176701A (en) Variable curvature type mirror
SU1599824A1 (en) Thin-film deformable mirror
WO2021229853A1 (en) Vibration device
KR950016296A (en) Light Path Control
KR100209403B1 (en) Lightpath modulation device
KR960016278B1 (en) Optical path regulation apparatus
KR950007972A (en) Light Path Control

Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20010328

Year of fee payment: 5

LAPS Lapse due to unpaid annual fee