KR950010196U - Semiconductor wafer carrier - Google Patents

Semiconductor wafer carrier

Info

Publication number
KR950010196U
KR950010196U KR2019930018209U KR930018209U KR950010196U KR 950010196 U KR950010196 U KR 950010196U KR 2019930018209 U KR2019930018209 U KR 2019930018209U KR 930018209 U KR930018209 U KR 930018209U KR 950010196 U KR950010196 U KR 950010196U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
wafer carrier
carrier
semiconductor
wafer
Prior art date
Application number
KR2019930018209U
Other languages
Korean (ko)
Other versions
KR200169669Y1 (en
Inventor
백승호
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019930018209U priority Critical patent/KR200169669Y1/en
Publication of KR950010196U publication Critical patent/KR950010196U/en
Application granted granted Critical
Publication of KR200169669Y1 publication Critical patent/KR200169669Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930018209U 1993-09-11 1993-09-11 Semiconductor wafer carrier KR200169669Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930018209U KR200169669Y1 (en) 1993-09-11 1993-09-11 Semiconductor wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930018209U KR200169669Y1 (en) 1993-09-11 1993-09-11 Semiconductor wafer carrier

Publications (2)

Publication Number Publication Date
KR950010196U true KR950010196U (en) 1995-04-24
KR200169669Y1 KR200169669Y1 (en) 2000-02-01

Family

ID=19363303

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930018209U KR200169669Y1 (en) 1993-09-11 1993-09-11 Semiconductor wafer carrier

Country Status (1)

Country Link
KR (1) KR200169669Y1 (en)

Also Published As

Publication number Publication date
KR200169669Y1 (en) 2000-02-01

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Legal Events

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20071025

Year of fee payment: 9

EXPY Expiration of term