KR970046596U - Wafer carrier - Google Patents

Wafer carrier

Info

Publication number
KR970046596U
KR970046596U KR2019950038375U KR19950038375U KR970046596U KR 970046596 U KR970046596 U KR 970046596U KR 2019950038375 U KR2019950038375 U KR 2019950038375U KR 19950038375 U KR19950038375 U KR 19950038375U KR 970046596 U KR970046596 U KR 970046596U
Authority
KR
South Korea
Prior art keywords
wafer carrier
wafer
carrier
Prior art date
Application number
KR2019950038375U
Other languages
Korean (ko)
Other versions
KR200233842Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950038375U priority Critical patent/KR200233842Y1/en
Publication of KR970046596U publication Critical patent/KR970046596U/en
Application granted granted Critical
Publication of KR200233842Y1 publication Critical patent/KR200233842Y1/en

Links

KR2019950038375U 1995-12-05 1995-12-05 Wafer carrier KR200233842Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038375U KR200233842Y1 (en) 1995-12-05 1995-12-05 Wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038375U KR200233842Y1 (en) 1995-12-05 1995-12-05 Wafer carrier

Publications (2)

Publication Number Publication Date
KR970046596U true KR970046596U (en) 1997-07-31
KR200233842Y1 KR200233842Y1 (en) 2001-10-25

Family

ID=60877296

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038375U KR200233842Y1 (en) 1995-12-05 1995-12-05 Wafer carrier

Country Status (1)

Country Link
KR (1) KR200233842Y1 (en)

Also Published As

Publication number Publication date
KR200233842Y1 (en) 2001-10-25

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20070419

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee