KR950003777U - 고안의 명칭 박막 생장장치의 복사 차폐관 - Google Patents

고안의 명칭 박막 생장장치의 복사 차폐관

Info

Publication number
KR950003777U
KR950003777U KR2019930014733U KR930014733U KR950003777U KR 950003777 U KR950003777 U KR 950003777U KR 2019930014733 U KR2019930014733 U KR 2019930014733U KR 930014733 U KR930014733 U KR 930014733U KR 950003777 U KR950003777 U KR 950003777U
Authority
KR
South Korea
Prior art keywords
name
thin film
radiation shield
film growth
growth device
Prior art date
Application number
KR2019930014733U
Other languages
English (en)
Other versions
KR960003467Y1 (ko
Inventor
정중현
Original Assignee
정중현
황종승
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 정중현, 황종승 filed Critical 정중현
Priority to KR2019930014733U priority Critical patent/KR960003467Y1/ko
Publication of KR950003777U publication Critical patent/KR950003777U/ko
Application granted granted Critical
Publication of KR960003467Y1 publication Critical patent/KR960003467Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR2019930014733U 1993-07-29 1993-07-29 고안의 명칭 박막 생장장치의 복사 차폐관 KR960003467Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930014733U KR960003467Y1 (ko) 1993-07-29 1993-07-29 고안의 명칭 박막 생장장치의 복사 차폐관

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930014733U KR960003467Y1 (ko) 1993-07-29 1993-07-29 고안의 명칭 박막 생장장치의 복사 차폐관

Publications (2)

Publication Number Publication Date
KR950003777U true KR950003777U (ko) 1995-02-17
KR960003467Y1 KR960003467Y1 (ko) 1996-04-24

Family

ID=19360476

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930014733U KR960003467Y1 (ko) 1993-07-29 1993-07-29 고안의 명칭 박막 생장장치의 복사 차폐관

Country Status (1)

Country Link
KR (1) KR960003467Y1 (ko)

Also Published As

Publication number Publication date
KR960003467Y1 (ko) 1996-04-24

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee