KR940017857U - 스퍼터링 장치 - Google Patents

스퍼터링 장치

Info

Publication number
KR940017857U
KR940017857U KR2019920027751U KR920027751U KR940017857U KR 940017857 U KR940017857 U KR 940017857U KR 2019920027751 U KR2019920027751 U KR 2019920027751U KR 920027751 U KR920027751 U KR 920027751U KR 940017857 U KR940017857 U KR 940017857U
Authority
KR
South Korea
Prior art keywords
sputtering device
sputtering
Prior art date
Application number
KR2019920027751U
Other languages
English (en)
Other versions
KR0131335Y1 (ko
Inventor
윤광원
이범국
Original Assignee
삼성코닝주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성코닝주식회사 filed Critical 삼성코닝주식회사
Priority to KR2019920027751U priority Critical patent/KR0131335Y1/ko
Publication of KR940017857U publication Critical patent/KR940017857U/ko
Application granted granted Critical
Publication of KR0131335Y1 publication Critical patent/KR0131335Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019920027751U 1992-12-30 1992-12-30 스퍼터링 장치 KR0131335Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019920027751U KR0131335Y1 (ko) 1992-12-30 1992-12-30 스퍼터링 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019920027751U KR0131335Y1 (ko) 1992-12-30 1992-12-30 스퍼터링 장치

Publications (2)

Publication Number Publication Date
KR940017857U true KR940017857U (ko) 1994-07-28
KR0131335Y1 KR0131335Y1 (ko) 1999-02-01

Family

ID=19348883

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019920027751U KR0131335Y1 (ko) 1992-12-30 1992-12-30 스퍼터링 장치

Country Status (1)

Country Link
KR (1) KR0131335Y1 (ko)

Also Published As

Publication number Publication date
KR0131335Y1 (ko) 1999-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20070809

Year of fee payment: 10

EXPY Expiration of term