KR940016341A - 정전렌즈 및 그 제조방법 - Google Patents

정전렌즈 및 그 제조방법 Download PDF

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Publication number
KR940016341A
KR940016341A KR1019930027955A KR930027955A KR940016341A KR 940016341 A KR940016341 A KR 940016341A KR 1019930027955 A KR1019930027955 A KR 1019930027955A KR 930027955 A KR930027955 A KR 930027955A KR 940016341 A KR940016341 A KR 940016341A
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KR
South Korea
Prior art keywords
metal film
high resistance
film
case
manufacturing
Prior art date
Application number
KR1019930027955A
Other languages
English (en)
Other versions
KR970005756B1 (ko
Inventor
다까미쯔 나가이
유이찌로 야마자끼
모또스께 미요시
Original Assignee
사또 후미오
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 사또 후미오, 가부시끼가이샤 도시바 filed Critical 사또 후미오
Publication of KR940016341A publication Critical patent/KR940016341A/ko
Application granted granted Critical
Publication of KR970005756B1 publication Critical patent/KR970005756B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/14—Arrangements for focusing or reflecting ray or beam
    • H01J3/18—Electrostatic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/12—Lenses electrostatic
    • H01J2237/1207—Einzel lenses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Elimination Of Static Electricity (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

케이스의 중심축 상에 완만한 전위 분포를 발생시킬 수 있고, 또한 렌즈 직경 및 전체 형상의 소형화를 도모하는 것을 목적으로 한다.
절연성 케이스(11)의 내면의 소정 위치에 금속막(13)이 피복되고, 금속막(13) 이외의 분포에 고저항막(12)가 피복되어 있다. 금속막(13)에는 외부 전원(19)로부터 부전위가 인가되고, 고저항막(12)는 접지되어 있다.

Description

정전렌즈 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명에 따른 정전 렌즈의 한 실시예를 도시한 측단면도. 제 2 도는 본 발명에 따른 정전 렌즈의 중심축 상의 전위 분포를 도시한 도면.

Claims (2)

  1. 절연성선 케이스의 내면의 소정 위치에 외부 전원에 의해 전압이 인가되는 금속막을 피복하고, 상기 케이스 내면의 금속막 이외의 부분에 접지된 고저항막을 피목한 것을 특징으로 하는 정전 렌즈.
  2. 절연성 케이스의 내면에 고저항막을 도포하고, 상기 절연성 케이스의 소정 위치에 금속막을 도포하며, 그 후 상기 금속막과 외부 전원을 전기적으로 접속함과 동시에, 상기 고저항막을 접지한 것을 특징으로 하는 정전 렌즈의 제조 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930027955A 1992-12-17 1993-12-16 정전 렌즈 및 그 제조 방법 KR970005756B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP92-337408 1992-12-17
JP04337408A JP3090802B2 (ja) 1992-12-17 1992-12-17 静電レンズおよびその製造方法

Publications (2)

Publication Number Publication Date
KR940016341A true KR940016341A (ko) 1994-07-23
KR970005756B1 KR970005756B1 (ko) 1997-04-19

Family

ID=18308357

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930027955A KR970005756B1 (ko) 1992-12-17 1993-12-16 정전 렌즈 및 그 제조 방법

Country Status (3)

Country Link
US (2) US5444256A (ko)
JP (1) JP3090802B2 (ko)
KR (1) KR970005756B1 (ko)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5731586A (en) * 1995-05-25 1998-03-24 Jeol Ltd. Magnetic-electrostatic compound objective lens
JPH09293472A (ja) * 1996-04-26 1997-11-11 Fujitsu Ltd 荷電粒子ビーム露光装置、その露光方法及びその製造方法
US5869838A (en) * 1996-09-11 1999-02-09 Advanced Lithography Group Field composable electrostatic lens system
EP0843335B1 (en) * 1996-11-19 2004-09-08 Advantest Corporation Electrostatic arrangement for influencing a particle beam
JP3993094B2 (ja) * 2000-07-27 2007-10-17 株式会社荏原製作所 シートビーム式検査装置
US6630677B1 (en) * 2001-08-29 2003-10-07 Advanced Micro Devices, Inc. Electrostatic lens having glassy graphite electrodes
GB2389225B (en) * 2002-05-31 2004-07-28 Leica Microsys Lithography Ltd Device for influencing an electron beam
WO2003107383A1 (ja) * 2002-06-13 2003-12-24 Okumura Katsuya 電子光学鏡筒およびその製造方法
KR100496643B1 (ko) * 2003-10-25 2005-06-20 한국전자통신연구원 마이크로칼럼 전자빔 장치의 자체정렬 적층 금속 박막전자빔 렌즈 및 그 제작방법
US7385197B2 (en) * 2004-07-08 2008-06-10 Ebara Corporation Electron beam apparatus and a device manufacturing method using the same apparatus
EP1760762B1 (en) * 2005-09-06 2012-02-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Device and method for selecting an emission area of an emission pattern
JP5105775B2 (ja) * 2006-06-05 2012-12-26 キヤノン株式会社 絶縁配管、プラズマ処理装置及び方法
JP4881661B2 (ja) * 2006-06-20 2012-02-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5794990B2 (ja) * 2009-09-18 2015-10-14 エフ・イ−・アイ・カンパニー 分散イオン源加速カラム
JP5500500B2 (ja) * 2010-03-11 2014-05-21 日新イオン機器株式会社 非対称なアインツェルレンズを有するビーム偏向器を備えたイオン注入装置
US9384937B2 (en) * 2013-09-27 2016-07-05 Varian Semiconductor Equipment Associates, Inc. SiC coating in an ion implanter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB632834A (en) * 1947-08-06 1949-12-05 United Insulator Company Ltd Improvements in or relating to articles made by coating dielectrics by metallising
JPS60236443A (ja) * 1984-05-10 1985-11-25 Shimadzu Corp 荷電粒子用静電レンズ
JPH05190129A (ja) * 1992-01-13 1993-07-30 Toshiba Corp 静電型レンズ

Also Published As

Publication number Publication date
KR970005756B1 (ko) 1997-04-19
JP3090802B2 (ja) 2000-09-25
US5444256A (en) 1995-08-22
US5535508A (en) 1996-07-16
JPH06187901A (ja) 1994-07-08

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