KR940010627B1 - Conveying method of various kind of workpieces and device therefor - Google Patents

Abstract

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Description

Multi-variate conveying method and device

1 is an overall configuration diagram showing an embodiment of a multi-variate conveying apparatus according to the present invention.

2 is a configuration diagram of the wafer handing unit in FIG. 1;

3 is a perspective view of arrow A of FIG.

4 is a cross-sectional view taken along the line B-B in FIG.

5 is a cross-sectional view taken along the line C-C in FIG.

6 is a schematic diagram of a wafer.

7 is a block diagram of a storage shelf.

8 is a detailed view of a wafer holding part of the storage shelf.

9 is a front view showing the configuration of a transport vehicle.

10 is a side view showing the configuration of a transport vehicle.

11 is a block diagram of an input drawing device.

12 is a cross-sectional view taken along the line D-D of FIG.

13 is a block diagram of a controller.

14 shows flow data of a process.

FIG. 15 is a diagram showing flow data of processes of a variety group. FIG.

FIG. 16 is a diagram showing catalog data for each group of varieties. FIG.

17 is a diagram showing standard catalog data.

18 is a diagram showing list data for each device.

19 shows data of a carrier vehicle.

20 is a view showing data of a storage shelf.

Fig. 21 is a diagram showing data of a carrier shelf.

22 is a diagram showing processing condition data.

23 is a flowchart of data processing of the identification apparatus.

24A and 24B are flow charts showing the communication procedure between the transport shelf and the controller at the time of moving the wafer in the storage shelf.

Fig. 25 is a flowchart showing the communication procedure between the storage shelf and the controller when the wafer is moved between the processing apparatus.

Fig. 26 is a flowchart showing the communication sequence between the processing apparatus, the identification apparatus, and the controller when the wafer is moved between the storage shelves.

27 is a flowchart of an input plan.

28 shows a leveled load graph.

Fig. 29 is a diagram showing a definition table of terms for input order determination.

30 is a diagram showing a standard constant requirement of an example.

31 shows a standardized load graph of an example.

32 is a diagram showing a standardization requirement of an example.

33 is a diagram showing an input sequence for each group of examples.

34 shows the requirements before standardization of an example.

35 is a diagram showing a demand after leveling of the examples.

36 is a view showing the input sequence by type of examples.

37 shows the concept of a progress control scheme.

38 is a schematic diagram illustrating the flow of wafers.

39 is a flow chart showing the flow of wafers.

40a, 40b and 40c the operation flowchart of the apparatus.

41 is an overall configuration diagram of an alternate embodiment 1. FIG.

42 is an overall configuration of alternative embodiment 3. FIG.

43 is a conceptual diagram of a management scheme of an alternative embodiment 3;

44 is a configuration diagram of a wafer handing unit of alternative embodiment 4. FIG.

FIG. 45 is a cross sectional view taken along line E-E of FIG. 44 as an alternative embodiment;

46 is a schematic diagram of a wafer handing unit of alternative embodiment 7. FIG.

Fig. 47 is a schematic diagram of a cassette handing unit of alternative embodiment 14.

48 is a block diagram of a gripper of alternative embodiment 17;

49 shows a switching mechanism of the conduit of alternative embodiment 17;

50 and 51 are explanatory diagrams of the operation of the mobile robot according to the seventeenth embodiment.

52 is an overall configuration diagram of an alternate embodiment 18.

53 is a schematic diagram of a wafer handing unit of alternative embodiment 18;

54 to 56 are views showing the entire concentrated type of carriage.

Fig. 57 is a diagram showing a synchronous conveyance mechanism by a robot.

Fig. 58 is a view showing a synchronous transfer mechanism by a transfer jig and a robot.

Fig. 59 is a view showing a synchronized conveyance mechanism by the integrated conveying jig.

60 is a diagram illustrating a synchronized conveyance system with branch guides.

61 shows a synchronized conveyance mechanism using liquid.

Fig. 62 is a diagram showing a stacked synchronous transfer mechanism.

63 is a diagram showing an interactive synchronization conveying mechanism.

64 illustrates a wafer attach / detachment mechanism.

* Explanation of symbols for main parts of the drawings

1: return rail 2: return vehicle

5,101: Carrier Lathe 20: Handing Unit

21: mobile robot 30: shelf

31: holding unit 40: toilet bowl

42: illumination light source 43: data processing unit

50, 83: clean box 60: processing device

61 loader portion 62 unloader portion

70: wafer 80: feed in and out device 80

90: installation module 100: driving car

110: host controller 112: Robert controller

113: Sewage unit controller 117: communication cable

121: process flow data 122: inventory data

123: standard list data 124: list data by device

125: carrier data

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing system such as a semiconductor, and more particularly, to a multi-type conveying method of controlling a flow of a workpiece by a conveying facility configuration, a processing apparatus configuration, and control thereof to realize a conveying system suitable for a flexible multi-product production line Relates to a device.

Conventionally, a manufacturing line of a semiconductor manufacturing plant is a work area requiring a clean atmosphere in which a processing apparatus for processing, conveying, and storing a wafer is installed, as described in Japanese Patent Laid-Open No. 56-19635. It is divided into a maintenance area that does not require high cleanliness, which is equipped with additional facilities and utilities. For this reason, in order to arrange them efficiently, a structure called a bay system, in which work areas and maintenance areas are alternately provided to the left and right of the central passage, has been taken. The arrangement of the processing apparatuses was a so-called work unit-specific system in which the same kind of processing apparatus was arranged in one bay in this bay system.

In addition, as described in, for example, Japanese Patent Laid-Open No. 63-29923, the wafer was transported into a cassette (also called a carrier), and the cassette was stored in a cassette case.

In the bay system, wafer transfer between processing apparatuses is carried out by transfer between bays and transfer between bays, and a stocker for storing a cassette is provided at an entrance and exit of the bay which is the connection point. That is, in-bay conveyance conveys a cassette from the stocker of the cassette provided in the inlet of a bay to a processing apparatus, and conveyance between bays conveys a cassette from the stocker of each bay to the stocker of another bay. Therefore, in general, the transfer of wafers from the processing apparatus to the processing apparatus has been carried out by the same path as the transport vehicle in the bay, the stocker, the transport vehicle between the bays, the stocker, and the transport vehicle in the bay.

As a non-orbital conveyance vehicle, there was a conveyance vehicle called AGV (Automatic Guided Vehicle), and several cassettes were mixed and conveyed at a low speed. Moreover, as a track-type conveyance vehicle, there existed a thing which carried and collected a cassette as described, for example in Unexamined-Japanese-Patent No. 62-185336.

In addition, the self-propelled robot handles one cassette as described in Japanese Patent Laid-Open No. 62-48038. In other words, when the wafer was processed, the self-propelled robot removed the cassette from the stocker, traveled to the front of the processing apparatus, set the cassette in the loader section of the processing apparatus, and loaded the wafer. When finished, the self-propelled robot traveled to the front of the processing apparatus, took out the cassette from the unloader section, and ran to the stocker to store the cassette in the stocker.

In general, the cleaning area is alternately provided with the maintenance area in which auxiliary facilities and utility relations are installed, and the work area in which processing devices are installed, on the left and right of the central passage, respectively. Another example is the installation of auxiliary equipment and utilities on the first floor and the processing device on the second floor so that the processing device can be arranged freely. As another trend, there has been proposed a method of partially cleaning the room as disclosed in Japanese Patent Laid-Open No. 60-143623. This is performed by setting a box in which a cassette is inserted in an interface provided in the processing apparatus in advance when the wafer is put into the processing apparatus in order to minimize the clean area. By doing in this way, a wafer is taken in in the state in which the atmosphere was interrupted | blocked from the outside and it is clean. However, in the conventional production method, there are many problems as follows.

First, since a semiconductor process has many processes and many repetitions of the same process, the conveyance path between bays becomes complicated in the conventional bay method, and it becomes easy to waste time in conveyance. Moreover, since the state of the apparatus of the previous process and the apparatus of the later process is unknown, it becomes difficult to synchronize between apparatuses. For this reason, the inventory amount increases in each bay, and as a result, the process completion is long. For example, even if the production line is a flow unit method, the process flows are different for each variety, and thus it is not possible to cope with the production of multiple varieties. In addition, since a semiconductor processor changes a lot of processes and a variety also changes frequently, it is considered that a batch must be changed frequently.

In addition, injecting the wafer into the processing apparatus, the wafer must be fed into the same self-propelled robot to the processing apparatus arranged in one bay. By the way, in the semiconductor manufacturing apparatus of the present state, since the height, depth, and the direction of the cassette are different for each processing apparatus, the self-propelled robot running in the bay can carry the cassette in one bay. Since it can only be installed, the selection and placement of processing equipment is greatly limited. In addition, when a new processing device is introduced, there is a possibility that the self-propelled robot can not be used due to restrictions.

In addition, since the stocker for storing the cassette and the processing apparatus is separated from each other, it takes some time to insert the cassette into the processing apparatus. In addition, since there is only one self-propelled robot for several treatment apparatuses, cassettes cannot be put into several treatment apparatuses at the same time. Therefore, the operation rate of a processing apparatus is suppressed low by these factors.

In addition, when it comes to cleaning, in the way of maintaining the whole floor such as bay method with high cleanliness, space that needs to be cleaned is large, so large investment is necessary to maintain high cleanliness, and operation cost is very high, too do. In addition, since the wafer and the worker are not spatially separated, it is very difficult to maintain the clean room in a high cleanliness.

On the other hand, in the method of setting a cassette box in the interface, the wafers are accommodated in the cassette and sealed, which makes it difficult to handle one by one. In addition, since the atmosphere surrounding the wafer is stopped, once the dust is generated, there is a possibility that the wafer is adhered to the wafer without being removed.

In addition, as the semiconductors are represented by ASICs, small quantities of products of various types are required. In addition, the trend of small-quantity production of this variety is expected to be strengthened in the future. Therefore, it is considered that the lot size becomes small so that only a dozen wafers can be stored in a cassette for storing 25 sheets. The lot size also varies depending on the variety. As a result, the number of cassettes which must be conveyed despite the same production quantity as in the past increases, and a higher conveyance capacity is required than before.

In addition, semiconductor wafers are conventionally large-sized in diameter from 4 inches to 5 inches and 6 inches. Also, there is a tendency to move to 8 inches in the future. Therefore, it becomes difficult to convey a wafer by a cassette unit.

As for the processing apparatus, the number processing apparatus for processing wafers one by one has become mainstream.

As such, it is expected that the trend of small quantity batch production, large diameter hardening of wafers, and the number of sheet processing equipment will gradually increase, and in such a situation, collecting 25 wafers and managing them in cassette units is an optimal lot for small quantity batch production. Even in view of the size and weight of the cassette, it becomes very difficult.

SUMMARY OF THE INVENTION An object of the present invention is to provide a multi-variate conveying method and apparatus which can convey various kinds of workpieces at the same time and execute the processing according to each kind of workpieces.

Another object of the present invention is to provide a multi-variate conveying method and apparatus that can manage one by one.

Another object of the present invention is to provide a multi-variate conveying method and apparatus capable of partial cleaning.

Another object of the present invention is to provide a multi-variate conveying method and apparatus which can cope with various processing changes by making the interface between the conveying unit and the processing unit common.

It is still another object of the present invention to provide a multi-variate conveyance method and apparatus capable of controlling the flow of a work and also improving the operation rate of the processing section.

In order to realize the above object, the present invention is made up of various processing means for processing various kinds of work, conveying means for conveying various kinds of work, and mobile mounting means for receiving a work between the conveying means and the processing means, And the conveying means simultaneously conveys several kinds of workpieces between the plurality of processing means, stops at a predetermined position of the movable mounting means, and recognizes the kinds of workpieces desired by the movable mounting means with the conveying means. It is to realize a multi-variate conveying method to be received.

In addition, the present invention is carried between the carrying means and the conveying means for mounting at the same time and running between the various processing means and stopping at a predetermined position of the moving mounting means of the work prepared in correspondence with the processing means. It is to realize a multi-variate conveying apparatus composed of mobile mounting means for recognizing and receiving a kind of work desired by.

The advantages are described in more detail as follows.

First, a wafer is processed by a first processing device in a second processing device between processing devices for a processing device of a process (for example, resist coating → exposure → development → cleaning / diffusion) which is frequently processed in a semiconductor process. A mobile-mounted device (for example, a mobile-mounted robot) is installed in the device, and the processing device is collectively converted (hereinafter referred to as a batch processing device) and converted into a flow unit. And this batch processing apparatus is arrange | positioned around the conveyance path of track shape (for example, film forming → photo → etching → film forming →…) according to the big flow of a semiconductor manufacturing process. Moreover, when several batch processing apparatuses of the same kind are needed in line balance, in order to efficiently operate the processing apparatus, the same batch processing apparatus is gathered and arrange | positioned in one place. And a device having a function of storing a wafer in each batch processing device and a function of exchanging wafers between a transport vehicle and a processing device. That is, each batch processing apparatus is provided with the apparatus equipped with the mobile mounting robot corresponding to the wafer loading method, and the storage shelf which manages and stores the wafer which the conveyance vehicle conveyed one by one.

And transfer between batch processing apparatuses is limited only to a wafer. In other words, the wafer is placed in a cassette, and the wafer is transported only by attaching a mechanism for holding the same wafer as the cassette to a part of the transport vehicle, rather than storing the wafer in a cassette case. A sensor for checking the presence or absence of a wafer is provided for each shelf, and the variety and processing history are stored for each shelf. In addition, when the conveying vehicle traverses all the batch processing apparatuses and arrives in front of the batch processing apparatus, the conveyance vehicle mounts the wafers which have finished the processing and lowers the wafers processed by the processing apparatus.

In addition, the wafers are managed one by one. For that purpose, a wafer number consisting of a variety and a serial number of each variety is described on the wafer and managed as the wafer number. The processing history of the wafer is managed by a computer and used for overall progress control. At the time of automation, the wafer number of the wafer is identified after the processing in order to confirm that the processing apparatus is not processing the wafer by mistake or that there is no defect of the wafer.

Then, for cleaning, the wafer is completely sealed in the state where the wafer is stored. In addition, when the wafer is put into the processing apparatus in the transport vehicle, only the moving robot, the storage shelf, and a part of the processing apparatus are cleaned to block the surroundings and the atmosphere in order to maintain only the atmosphere with high cleanliness. For the cleaning, a dust removing filter such as a HEPA filter and a fan for blowing air are provided on the upper surface, and the bottom surface is a lattice structure so as to be in a vertical laminar flow state.

The line structure is grouped by grouping the same varieties and process sequences, and a storage shelf is provided to store wafers to be processed into a processing group or processing device or wafers to be processed into each processing group before processing equipment. By connecting the wafers between the processing apparatuses to a conveying facility for loading and transporting the wafers, the wafers of which kind of process are put into the processing apparatus from the storage shelf and which wafers of the processed wafers are transferred. There is an action to control the flow. As a result, the order of flows between the processing apparatuses can be controlled, and arbitrary wafers are conveyed each time so as to maintain the order and quantity of wafers according to the plan, so that the wafers are as if they were dedicated lines for each variety. Can be sent.

By attaching a wafer number, which is a type of wafer and a serial number of each kind, to a wafer itself before processing the wafer, it is possible to carry out management for each sheet of the wafer and to identify a wafer by an identification device. The application can be confirmed on the wafer itself. As a result, it is possible to know precisely in which wafers the wafers which have been introduced advance to each process.

In the processing apparatus, by connecting several devices corresponding to the process paths which repeat the same process all the time, when the wafer is put in, several processing is performed for several steps, thereby reducing the number of processes to be managed. The total conveyance distance and the number of conveyances are reduced.

When the wafer is exchanged between the transfer equipment and the processing equipment, the mobile-mounted robot moving the wafer between the transfer equipment and the processing equipment and the wafer loaded or processed in the processing equipment are temporarily stored in order to mount the wafer on the transport vehicle. A storage shelf for each management and an identification device for identifying which wafers are processed in the processing apparatus are provided, and the wafer-mounting unit surrounding them in a clean box is cleaned with moving wafers between the transportation vehicle and the processing apparatus. It can be executed to accurately grasp the progress of each wafer and to faithfully grasp the flow of the wafer.

In the clean configuration, when the wafers are stored in the transport shelf one by one and sealed temporarily transported and temporarily stored for processing or transport, the clean area can be reduced by placing them in a clean box that is kept in a clean atmosphere.

Since the conveyance unit of a wafer is conveyed and managed by 1 sheet unit, management based on 1 sheet can be performed easily.

In a conveying facility, a conveying vehicle that traverses a track-shaped track can carry a wafer in units of sheets at a predetermined station, and the conveying facilities can be effectively utilized by storing them in units of sheets even during conveyance. have.

In the flow of wafers, by grouping the varieties with the same process sequence, the control amount is reduced, the order of loading from the storage shelf and the order of conveying the wafers to the transport vehicle are controlled, and the flow rate between the varieties of wafers is put in and taken out. By flowing the wafer so as to be constant until, it is possible to produce a wafer in accordance with the required order and quantity.

The above and other objects and novel features of the present invention will become apparent from the description and the accompanying drawings.

EMBODIMENT OF THE INVENTION Hereinafter, the structure of this invention is demonstrated with an Example.

[1.1 Overall Configuration]

An embodiment of the present invention will be described with reference to FIGS.

Figure 1 shows the overall configuration of the present invention, will be described accordingly. A track-shaped conveying rail 1 is provided on the ceiling of the center portion, a conveying vehicle 2 running along the conveying rail 1 is provided, and the apparatus is connected to perform a process of several wafer processes around the center. And a wafer transfer unit 20 for carrying the wafer transfer in a clean atmosphere between the transfer vehicle 2 carrying the wafer in front of the processing unit 60. Several equipment modules 90 in which the processing apparatus 60 and the wafer receiving unit 20 are combined are configured as basic units. When a wafer is processed by a certain processing device 60, the carrier 2 mounts the wafer, transfers the wafer to the processing device 60 of the next step, and sequentially processes the series of wafers. Ends. In these device configurations, an input take-out apparatus 80 for carrying in the wafer to be processed from now on and carrying out of the wafer where a series of processing is completed is provided in the vicinity of the conveying rail 1. The host controller 110 is connected to the input and output device 80, the transport vehicle 2, the wafer delivery unit 20, the processing device 60, and the communication cable 117, and managed and controlled.

In this configuration, the wafer is initially loaded from the feeding in and out device 80. That is, any of the conveyance cars 2 moves to the input taking-out apparatus 80 and stops. Then, the wafer is moved on the transport vehicle 2 in the input and output device 80. At this time, when there is a wafer in which the predetermined processing has been completed, the vehicle 2 is moved to the feeding in / out device 80.

When the wafer is mounted on the conveying vehicle 2, the conveying vehicle 2 moves along the conveying rail 1 to the place of the target process, and the wafer is received by the wafer transfer unit 20 and temporarily stored. At this time, when the processing is completed and there are wafers to be transferred to the next step, the wafer transfer unit 20 is moved to the transport vehicle 2. The wafer handing unit 20 has a function of managing wafers in a breeding group (grouping varieties with the same processing steps) and for each process, so that any wafer can be arbitrarily introduced into the processing apparatus 80. Then, the wafer designated by the wafer transfer unit 20 is put into the processing apparatus 60 according to the command of the host controller 110, and when the processing is completed, the wafer number (serial number for each kind and variety) is identified. It is temporarily stored for return to the next process. Then, when the transport vehicle 2 comes, the wafer transfer unit 20 moves the wafer to move to the next step. In this way, this operation is repeated until the series of processing ends. When a series of processes is complete | finished, it is conveyed by the conveyance vehicle 2 to the place where the input taking-out apparatus 80 exists, and is moved to the input taking-out apparatus 80.

1.2 Description of each device

The wafer receiving unit 20 shown in FIG. 1 is shown in FIG. 3 is a perspective view of arrow A of FIG. 2, FIG. 4 is a cross-sectional view of the line BB of FIG. 2, FIG. 5 is a cross-sectional view of the CC line, FIG. 6 is a wafer, FIG. 7 is a block diagram of the storage shelf of FIG. It is a detail view of the wafer holding part of the storage shelf of FIG.

The wafer transfer unit 20 takes a wafer of a predetermined variety and a process from the transport vehicle 2 traveling along the track-shaped conveyance rail 1 and processes it (e.g., a photolithography apparatus) ( 60), and has a function of moving the wafer after the processing is completed to the transfer path 2 again.

As shown in FIG. 2, the wafer transfer unit 20 shows a storage shelf 30 for storing wafers, a mobile-mounted robot 21 for handling wafers, a variety described on the wafer, and a serial number for each variety. The identification device 40 which reads a wafer number, and the clean box 50 for holding the loader part 61 and the unloader part 62 of these apparatuses and the processing apparatus 60 in a clean atmosphere is comprised. As shown in FIG. 8, the holding shelf 30 is provided with the holding part 31 for holding the wafers 70 one by one, and each holding part 31 confirms the presence or absence of the wafer 70. FIG. A sensor (for example, an idle switch, etc.) is provided, and the wafer transfer unit controller which manages and controls the wafer transfer unit 20 confirms the presence or absence of a wafer.

As shown in FIG. 3, the mobile-mounted robot 21 is disposed in the center of the wafer transfer unit 20, and is between the transport shelf 5 and the storage shelf 30, and the storage shelf 30 to the loader portion 61. ), Moving the wafer between the unloader 62 and the identification device 40 and between the identification device 40 and the storage shelf 30. The structure of the mobile mounting robot 21 is demonstrated according to FIG.

The mobile mounting robot 21 is comprised so that the gripper 22 which vacuum-sucks a single wafer, the front arm 23, and the upper arm 24 may move up and down by the up-and-down shaft 25. As shown in FIG. The controller of the mobile-mounted robot 21 controls the mobile-mounted robot 21 by moving the wafer by receiving the instruction of the mobile-mounted instruction from the wafer transfer unit controller, and notifies the wafer transfer unit controller that the moving of the wafer has been completed.

The structure of the identification apparatus 40 is demonstrated using FIG.

The identification device 40 is composed of an illumination light source 42, a television camera 41, and a data processor 43. The wafer set on the stage 44 of the identification device 40 by the mobile-mounted robot 21 is irradiated with light by an illumination light source 42, and the wafer number specified on the wafer is slid by a television camera 41 to display an image. Enter as data. The video data is analyzed by the data processor 43 to read the wafer number.

As shown in FIG. 6, a wafer number 73 composed of a breed name 71 representing the breed of the wafer and a serial number 72 assigned to the breed is written. Then, the reading of the wafer number 73 is executed by the identification device 40. Thereby, the wafers can be managed one by one.

The clean box 50 keeps the atmosphere clean so as not to contaminate the wafer when the wafer is exchanged between the transfer shelf 5 and the processing apparatus 60. As shown in FIG. 3, the storage shelf 30 ), The mobile mounting robot 21, the identification device 40, and the loader 61 and unloader 62 of the processing device are housed therein.

As shown in FIG. 4 and FIG. 5, the configuration of the clean box 50 includes a blower fan 52 and a HEPA filter 53 for removing dust from the blower so that the flow of air therein becomes laminar on the upper surface. The lower surface has a lattice structure so that ventilation is not blocked. In addition, a clean box door 51 that opens and closes so that the wafer can be exchanged with the transfer shelf 5 is attached to the side surface. The clean box door 51 is normally closed and is opened when the conveying shelf 5 of the conveying vehicle 2 is set.

The front view of the conveyance vehicle 2 is shown in FIG. 9, and a side view is shown in FIG. For example, a similar embodiment is disclosed in the fourth "International Conference on Assembly Automation Proceeding" p.303-313.

The guide wheel 6 and the drive device 7 (for example, a linear motor) are attached to the conveyance vehicle 2, and it has a structure which moves along the conveyance rail 1. As shown in FIG. Moreover, the elevating apparatus 3 and the elevating head 4 for setting the conveyance shelf 5 to the clean box 50 are provided. The lifting head 4 has a structure in which the lifting head 4 moves up and down by the Shanghai-dong driving device 8 (for example, a motor, a ball screw, etc.) along the Shanghai-dong guide 9. Moreover, the conveyance shelf 5 is structured to move back and forth by the front-back movement drive apparatus 10 (for example, a motor, a ball screw, etc.) along the front-back movement guide 11. As shown in FIG. The operation will be described using FIG. When the transport vehicle 2 hangs on the track-shaped transport rail 1 installed in advance and stops in front of the wafer receiving unit 20, the lift head 4 is lowered to the position of the clean box door 51, and then The conveying shelf 5 enters the clean box 50, and after the clean box door 51 is opened, the conveying shelf 12 is opened. Then, when the wafer-mounted wafer is finished by the gripper 22 of the mobile-mounted robot 21, the transport shelf door 12 is closed, and the clean box door 51 is closed, and the transport shelf 11 is moved by the front and rear movement guide 11. 5) is returned and the lifting head 4 is returned to its original height.

FIG. 11 shows a configuration of the input take-out apparatus 80. As shown in FIG. 12 shows a cross-sectional view of the D-D line of FIG.

In FIG. 11, the input take-out apparatus 80 is comprised from the mobile mounting robot 81 which handles a wafer, the storage shelf 82 which stores a wafer, and the clean box which keeps these apparatuses in a clean atmosphere.

In FIG. 12, the clean box is provided with a blower fan 85 and a HEPA filter 86 for removing dust from the blower, as described in the description of the wafer transfer unit. It is structured. In addition, the door (same as the clean box door 51 of FIG. 4) and the wafer to be processed are put in or out so that the wafer can be exchanged with the transfer shelf 5 mounted on the transport vehicle 2 or the processing is finished. In order to take out a rapper, the carrier line door 104 which opens and closes is attached to the side surface. Since the conveyance shelf 101 inputs and extracts wafers from the traveling vehicle 100 to the input taking out device 80, the traveling vehicle 100 drives the arm 103 holding the conveyance shelf 101 straight to the traveling vehicle 100. A slide guide 102 (e.g., motor and ball screw) is provided. When the traveling vehicle 100 comes to the predetermined position of the input take-out apparatus 80, the vehicle stops, the arm 103 is moved straight, and the conveyance shelf 101 is put into the clean box 83 to be set.

The clean box door 84 and the carrier shelf door 104 are opened, respectively, and the wafer of the carrier shelf 101 is taken out by the moving-mounted robot 81 and set in the storage shelf 82. At this time, when there is a wafer that has been processed, the operation of moving the wafer from the storage shelf 82 to the transfer shelf 101 is also continuously performed. In this mobile deployment, as shown in FIG. 11, when the conveyance vehicle 2 comes out and the conveyance shelf 5 is set in the input-out drawer 80, between the storage shelf 82 and the conveyance shelf 5 It also runs mobile. When the moving loading of the conveyance shelf 101 is complete | finished, the conveyance shelf 104 and the clean box door 84 are closed, and the arm 103 is returned and conveyed by the traveling vehicle 100 to the next process.

[1.3 Controller Configuration]

FIG. 13 shows the control system diagram of FIG. The host controller 110 uses the equipment module 90 including the wafer transfer unit 20 and the processing unit 60 shown in FIG. 2 as a lower unit of the control unit of the wafer transfer unit 20. The controller wafer controller unit 113, the identification device controller 111 that is the controller of the identification device 40, the robot controller 112 that is the controller of the mobile-mounted robot 21, and the large controller of the processing device 60. The phosphorus processor controller 114 is provided. In addition, in addition to this, the input / output device controller 116, which is a controller of the wafer input / output device 80, and the robot controller 112, which is a controller of the mobile-mounted robot that carries the wafer moving equipment, and the controller, which is the controller of the transport vehicle 2, are conveyed. The car controller 115 is provided.

The host controller 110 maintains data for managing the wafers for each breed group and process, and executes instructions and confirmations in association with each controller to control the wafers to flow smoothly.

The wafer handing unit controller 113 manages the types of wafers stored in the storage shelf 30 and communicates with the robot controller 112 to control the wafer handing unit 20.

The identification device controller 111 transmits the wafer number of the wafer identified by the identification device 40 to the wafer handing unit controller 113. The robot controller 112 controls the start, stop, and operation of the mobile mounted robot 21.

The processing unit controller 114 manages the processing state and processing conditions of the processing unit 60 and executes the control of the processing unit 60. The vehicle controller 115 controls the start, stop, and running of the vehicle 2, and manages which wafers of which group in which variety group are held in relation to the shelf number of the carrier shelf 5.

The input and output device controller 116 manages the storage shelf 82 of the input and output device 80 in which shelf the wafer of which process of which breed group is stored, and communicates with the robot controller 112 for input and output. The control of the device 80 is executed.

These controllers are connected by optical LAN of token ring configuration, and each device controller is connected by two communication cables 117, and the connection part of each device controller is prevented by switching by switching according to system failure. It is designed to prevent communication obstacles caused by controller down of each device.

This structure enables high-speed communication, and the transmission / reception time can be calculated in a point-to-point method. Therefore, the transmission of data in real time consumes less communication time between the controllers and the priority of the signal. Easy to assign, easy to control

[1.4 Data Configuration]

14 to 22 show data configurations required in accordance with the controller configuration shown in FIG.

The host controller 110 includes varieties a ₁ , b ₁ , a ₂ ,... Varieties a ₁ , a ₂ ,... Which have the same process order and processing conditions as shown in FIG. 15 in each process flow data 120. Variety group A, B,… The varietal group process flow data 121 is determined to determine the varietal group process flow data 121. As shown in FIG. (122), as shown in FIG. 17, the standard inventory data 123 for recording the standard inventory amount to be listed in each process is managed for each variety group.

In addition, as shown in FIG. 18, the list data 124 for each device indicating the list quantity listed for each processing device, and the type of wafers conveyed by each transport vehicle as shown in FIG. 19 (type group) ) And carrier data 125 indicating the processing history and the number of sheets are also managed.

The wafer handing unit controller 113 manages the information of the stored wafers as the storage data 126, as shown in FIG. 20, in order to manage the wafers stored in each storage shelf.

The carrier controller 115 manages the wafer information of the carrier shelf as the carrier shelf data 127, as shown in FIG. 21, in order to manage each wafer stored in each carrier shelf.

As shown in FIG. 22, the processing apparatus controller 114 has, as the processing condition data 128, information indicating the processing conditions of the processing apparatus corresponding to the processing condition No. coded processing conditions.

Hereinafter, each data will be described in detail.

The process flow data 120 shown in FIG. 14 has processing conditions NO. Which indicate the process order and processing conditions according to the processing order for each variety.

The variety group process flow data 121 shown in FIG. 15 is generated from the process flow data 120, and the varieties a ₁ , a ₂ ,... Variety group A, B,… Each process flows.

The list data 122 for each variety group shown in FIG. 16 has the number of all wafers as data for each variety group and processing history of the wafer.

The standard inventory data 123 shown in FIG. 17 represents the standard inventory amount to be listed in each process for each variety group.

The host controller 110 selects a breed group to be processed by the breed group process flow data 121, the breed group list data 122, and the standard list data 123.

The apparatus-specific catalog data 124 shown in FIG. 18 has as a data the group of varieties of wafers stored in the storage shelf and processing history and the number of sheets for each processing apparatus. The host controller 110 then issues a start instruction to the processing apparatus in accordance with the data.

Carrier data 125 shown in FIG. 19 has data on the wafer variety group, processing history, and number of sheets stored in the transport vehicle. Then, the host controller 110 instructs the vehicle to be moved to the storage shelf according to the data.

The storage shelf data 126 shown in FIG. 20 shows arrival numbers indicating the wafer number, processing history, and the sequence number stored in the storage shelf with respect to the storage shelf number attached to each holding unit of each storage shelf. I corresponded. The wafer handing unit controller 113 specifies a wafer to be processed from among wafers of the same variety group and processing history in accordance with this data.

The carrier shelf data 127 shown in FIG. 21 shows the wafer number of the wafer being conveyed, the processing history, and the sequence number mounted on the carrier with respect to the carrier shelf number attached to each holding unit of the carrier shelf of each carrier. The arrival number is attached. Carrier controller 115 specifies the wafer to be mounted on the storage shelf among wafers of the same variety group and processing history in accordance with this data.

[2. Controller operation]

2.1 Data processing of identification device

The data processing flow chart of the identification device controller 111 is shown in FIG. 23, and the processing flow will be described.

The identification device controller 111 inputs the wafer number of the wafer set in the identification device 40 as image data (step A2) and executes data processing (step A3) to determine whether the wafer number can be read. (Step A4) Then, if a lead is possible, the wafer number is read (step A5). Then, the wafer number is sent to the wafer handing unit controller 113 as a read result (step A6). If the wafer number cannot be read, however, it is determined whether character lead error correction is possible, i.e., even if the wafer number cannot be read completely, how much can be read, and whether the wafer number can be determined with high probability (step A7). If the character lead error correction is possible, the character lead error correction is executed (step A8). Then, the wafer number is read (step A9). The wafer handing unit controller 113 transmits that the wafer number and its remarking are necessary as a read result (step A10). If the character lead error correction is impossible, the process is performed again with the wafer set in the identification device 40. If the wafer number cannot be determined even after repeating three times, the wafer handing unit controller 113 is informed that the reading is impossible as the identification result as the determination result (step A12).

(2.2 Communication Sequence between Controllers)

The operations of each device and the communication procedure between the controllers will be described below with reference to FIGS. 2, 13, 18-21 and 24-26.

The wafer moving operation of the mobile-mounted robot 21 includes (a) the transfer shelf 5 → the storage shelf 30, (b) the storage shelf 30 → the loader 61 of the processing apparatus 60, ( c) The unloader part 62 of the processing apparatus 60, the identification apparatus 40, the storage shelf 30, (d) the storage shelf 30, and the conveyance shelf 5 are four types. However, in order to move the mobile mounting robot 21 efficiently, the wafer moving mounting operation | movement of the conveyance shelf 5-the storage shelf 30, the storage shelf 30-the conveyance shelf 5 is repeatedly performed continuously.

The processing procedure of each controller and the communication procedure between the large controllers when moving the wafer between the transfer shelf 5 and the storage shelf 30 are shown in FIG. 24, and the flow will be described.

The carrier controller 115 transmits the arrival of the carrier 2 to the host controller 110 when the carrier 2 arrives in front of the wafer delivery unit 20 (step B1) (step B2). Then, the host controller 110 receives (step B3). Then, the host controllers 110 and 110 transmit the varieties, processing history, and number of wafers to be transported from the transport shelf 5 to the storage shelf 30 to the transport vehicle controller 115, but the storage shelf 30 ), When there is no wafer mounted on the transfer shelf 5, an instruction (when conveying instruction) is transmitted to the conveyance controller 115 as it is (steps B4 and B5).

In addition, the host controller 110 determines the variety group, processing history, and number of wafers to be moved from the storage shelf 30 to the transfer shelf 5 and transmits them to the wafer handing unit controller 113 (steps B7 and B8). ). Then, the transport vehicle 2 lowers the shanghaidong guide 9 from the hoisting device 3, advances the forward and backward travel guide 11, and sets the transport shelf 5 containing the wafer to the clean box door 51. do. Thus, the clean box door 51 is opened, and then the conveying rack door 12 is opened. In this way, the wafer of the conveyance shelf 5 is in the state which can be moved in and out freely by the mobile mounting robot 21 in the clean box 50 (step B6). Thus, the wafer handing unit controller 113 determines the wafer to be moved on the basis of the storage shelf data 126 shown in FIG. 20 (step B9). In addition, the carrier controller 115 determines the wafer on which the mobile vehicle is to be mounted on the basis of the carrier shelf data 127 shown in FIG. 21, and the wafer number, processing history, carrier shelf number and wafer of the wafer are not included. The transfer shelf number of the wafer is transmitted to the wafer handing unit controller 113 (steps B10 and B11). Then, the wafer transfer unit controller 113 is moved from the storage shelf 30 to the transfer shelf 5, the position of the transfer shelf, which is a moving loading place of the wafer, and the transfer shelf 5 moves from the transfer shelf 5 to the storage shelf 30. The position of the storage shelf, which is the mobile mounting place of the wafer, and the position of the moving carbonation place of the wafer moving from the conveying shelf 5 to the storage shelf 30 are determined for all the wafers on which the mobile mounting is carried out, and the moving order is determined. (Step B12).

In accordance with the determined order, the mobile mounting source and the mobile mounting site are transmitted to the robot controller 112 (steps B14 and B15). The mobile-mounted robot 21 executes a job in accordance with the instruction (step B16), and informs the wafer handing unit controller 113 of the completion at the end point (steps B17, B18). This operation is repeated for all the wafers instructed by the host controller 110 until the end of the moving deployment.

However, if the processor controller 214 requests the wafer to be loaded in the middle of the mobile mounting process, the mobile mounting process is interrupted and the processing unit controller 114 requests the processing thereafter. Upon completion, the wafer handing unit controller 113 transmits the wafer number, the processing history, and the processing shelf number of the wafer mounted on the transfer shelf 5 to the transfer controller 115 (steps B19 and B20). Then, the wafer number, processing history and arrival sequence that are indicated by the shelf number of the storage shelf of the storage shelf data 126 shown in FIG. 20 are updated (step B21). The host controller 110 also transmits the varieties group and processing history of the wafers stored in the storage shelf 30 (steps B22 and B26). The vehicle controller 115 also updates the wafer number, processing history and arrival sequence corresponding to the carrier shelf number of the carrier shelf data 127 shown in FIG. 21 (step B23). The host controller 110 also transmits the varieties group and processing history of the wafers stored in the transfer shelf 5 (steps B24 and B26). And the conveyance vehicle 2 starts the next conveyance (step B25). In addition, the host controller 110 is stored in the varieties group of wafers, processing history, and the transfer shelf 5 stored in the storage shelf 30 transmitted from the wafer transfer unit controller 113 and the transfer controller 115. The varieties group of the wafers being processed, the processing history, and the varieties group of the wafers stored in the transfer shelf 5 and the processing history are received (step B26). The host controller 110 then updates the list data 124 for each device, the list data 122 for each variety group, and the carrier data 125 (step B27).

Next, the processing procedure of each controller and the communication procedure between the controllers when the wafer is moved from the storage shelf 30 to the loader unit 61 of the processing apparatus are shown in FIG. 25, and the flow will be described.

The host controller 110 is a breeding group to be processed as a start instruction for the processing unit controller 114, processing history, processing conditions No. And the number of sheets (steps C1, C2). Then, the processor controller 114 sets a possible condition in accordance with this instruction (step C3). When the processing apparatus 60 is in a state capable of processing the wafer, the processing apparatus controller 114 transmits the varieties group and processing history of the wafer to be processed by the handing and receiving unit controller 113 of the wafer (step C4). , C5). The receiving unit controller 113 of the received wafer searches the storage shelf data 126 for the wafer stored in the storage shelf 30 as the earliest among the wafers of the corresponding breed group and processing history, and selects the wafer (step C6). ). Then, the wafer number is transmitted to the processing apparatus controller 114 (steps C7 and C8), and the position of the storage shelf where the wafer is stored is transmitted to the robot controller 112, and the storage shelf 30 is used to transfer the processing apparatus. The loader unit 61 is instructed to move the wafer (steps C9 and C10). In accordance with this instruction, the mobile-mounted robot 21 takes the wafer out of the storage shelf 30 and sets it in the loader portion 61 of the processing apparatus 60 (step C11). When the robot controller 112 is finished, the robot controller 112 informs the wafer transfer unit controller 110 of the completion of the work (steps C12 and C13). The wafer handing unit controller 113 erases the storage shelf data 126 of the corresponding wafer (step C14). On the other hand, the processing apparatus 60 starts processing of a wafer (step C13).

Next, the processing by the processing device 60 ends and the processing order of each controller when the wafer is stored in the storage shelf by moving the wafer from the unloader portion 62 of the processing device to the identification device 40 is large. The communication sequence between the controllers is shown in FIG. Explain the flow.

The processing apparatus 60 transfers the wafer which the process completed to the unloader part 62 (step D1). The processing unit controller 114 transmits the wafer number of the wafer of the unloader unit 62 to the wafer transfer unit controller 113 and requests the extraction (steps D2 and D3). Then, the wafer handing unit controller 113 instructs the robot controller 112 to move the wafer from the unloader 62 to the identification device 40 (steps D4 and D5). In accordance with this instruction, the mobile-mounted robot 21 takes the wafer out of the unloader section 62 and sets it in the identification device 40 (step D6). When finished, the robot controller 112 informs the wafer handing unit controller 113 that the work has been completed (steps D7 and D8). The identification device controller 111 then performs identification and processing as shown in FIG. 23, and transmits the identification result to the wafer handing over unit controller 113 (steps D9 and D10). The wafer handing unit controller 113 receives the identification result from the identification device controller 111 (step D10). The position of the storage shelf 30 for storing the wafer is determined (step D11), and the robot controller 112 is notified of the position to instruct the moving load (steps D12 and D13). Then, the mobile-mounted robot 21 takes over the wafer from the identification device 40 and stores it in the storage shelf 30 (step D14). Upon completion (steps D15 and D16), the wafer handing unit controller 113 stores the wafer number and processing history corresponding to the storage shelf number in which the wafer is stored as the storage shelf data 126 (step D17). The wafer number and processing history of the wafer where the processing is completed are transmitted to the host controller 110 (step D18). The host controller 110 receives the wafer number and processing history (step D19), and updates the list data 122 for each variety group and the list data 124 for each device (step D20).

[3 Production method]

[3.1 Method of input order determination]

FIG. 27 shows an input plan flow for determining in which order wafers are input to the production system shown in FIG. For each factory, process, or unit of work performed daily, obtain a feasible standard schedule requirement, which is the amount obtained by accelerating the manufacturing period required for parts procurement or machining (step E1). After satisfying the requirements and delivery date for each day by arranging the number of people for each breed by breed and delivery date, the work load is leveled so that work occurs on an average basis in units of processes and equipment. E2). In this way, the varieties corresponding to the required outputs, which have been equalized and arranged, are classified into groups (things of the same kind), that is, varieties (step E3). Next, the demand order of the required production amount which maintains the required ratio for each group of varieties in which work occurs on an average basis in process and apparatus units is determined (step E4), and the order of maintaining the ratio in the group of varieties is determined ( Step E5). By applying the order of the varieties to the order of each breed group in this order, the order of order of each wafer, i.e., one wafer, is determined. It determines as (step E6). Hereinafter, each processing procedure is explained in full detail.

Fig. 28 shows a method for obtaining a standard schedule requirement, adjusting the work amount for leveling the work according to changes in the processing conditions of the apparatus in consideration of the process and the capability of the apparatus, and achieving the required leveling method. In the figure, the cumulative amount of work for the output must be kept at the latest possible period, which is calculated from the end point E with the work load E, the total demand of the origin 0 and the scheduled period, and the delivery time of the daily demand. A pin is attached to each part of the cumulative maximum delay load (III), and the minimum output (shown in O table) that meets the cumulative limit load (I), which is the amount of work for the earliest possible production of rubber straps. Between the cumulative peak delay loads, which are also the workloads, and when both ends O and E are paralleled, the rubber bands produced by this rubber band are averaged to average the workloads for a certain period of time in the target process and equipment so that the required line and delivery time are satisfied. It becomes the load IV. The daily demand is calculated from this load curve. In this case, when the fraction occurs so that only one working unit is required for the daily requirement, the total level of the target process and the cumulative requirement for each device and the leveling requirement, which is the leveling requirement, which are leveled by the unit and the unit of the unit, are matched. Adjust In addition, when the workload of one day becomes very small, the amount of work suitable for the workload is advanced until the minimum workload per day can be obtained. By doing in this way, it is possible to realize the leveling of the working amount without delaying the delivery date, and the leveling of the required amount can be achieved.

Next, the input order calculation method is shown. The term is defined as shown in FIG. On day K, the number of breed groups to be targeted is M, the number of breeds in the breed group is N (j) [N (j) is a function of breed group No. (j)], and when the demand is Pji, the total required production amount X is

And distance standard l oj of breed group j is

The distance criterion l oj of breed i of breed group J is

The distance criteria for each variety group and each variety are obtained.

The normalized distance Zoj is obtained from this distance reference loj and distance lj. Next, the normalization distance Zoj is assigned to each variety group in order from the largest, and similarly, the normalization distance Zoji for each variety is obtained for each variety group, and the order for each variety is given. By doing in this way, it is possible to know the order of demand for each sheet of the breeding unit, and the ratio of each breeding group and the breeding ratio to the required quantity is always maintained by inputting according to this order. I can run it.

The input order determination method shown in FIG. 27 to FIG. 29 is concretely demonstrated using FIGS. 30 to 35 using an example.

In Fig. 30, the required period is set to 6 days. 31 shows a graph of cumulative loads in accordance with this required amount. FIG. 32 shows the demand for each level averaged at the leveling load of the graph. In Fig. 30, A, B, and C denote varieties, a _{1 to} a ₄ , b _{1 to} b ₄ , and c _{1 to} c ₃ represent varieties.

Next, a description will be given of a method for calculating a request order in accordance with the required amount. If we calculate the first, which is the order for each variety group, the distance-based loj is

Breed Group A l _OA = 12/5 = 2.4

Breed Group B l _OB = 12/5 = 2.4

Breed Group C l _OC , = 12/2 = 6

Since the initial values of the distances lj are all 1 in the definition of FIG. 29, the normalized distance Zoj is

Breed Group AZ _OA = 1 / 2.4 = 0.41

Breed Group BZ _OB = 1 / 2.4 = 0.41

Breed Group CZ _OC = 1/6 = 0.16

Becomes If the varieties are put in rapid order when the normalization distances are the same, the varieties group A is calculated as the required sequence 1.

Next, the request order Z is obtained. Street lj

Breed Group A l _A = 1

Breed Group B l _B = 2

Breed Group C l _c = 2

It becomes Normalized

Breed Group AZ _OA = 1 / 2.4 = 0.41

Breed Group BZ _OB = 2 / 2.4 = 0.83

Breed Group CZ _OC = 2/6 = 0.33

Becomes Thus, the breed group B is output as the request sequence 2.

Obtain request sequence 3. Street lj

Breed Group A l _A = 2

Breed Group B l _B = 1

Breed Group C l _C = 3

Becomes Normalized

Breed Group AZ _OA = 2 / 2.4 = 0.83

Breed Group BZ _OB = 1 / 2.4 = 0.41

Breed Group CZ _OC = 3/6 = 0.5

It becomes Thus, the cultivar group A is output as the request sequence 3. In the same manner, the order of inputting 12 sheets is A, B, A, B, A, C, B, A, B, A, B, C.

Obtain the first of the second day.

The distance loj is

Breed Group A l _OA = 7/2 = 3.5

Breed Group B l _OB = 7/2 = 3.5

Breed Group C l _OC = 7/2 = 3.5

Becomes Since distance lj continues to measure distances from the previous day,

Breed Group A l _A = 3

Breed Group B l _B = 2

Breed Group C l _C = 1

It becomes Normalized

Breed Group AZ _OA = 3 / 3.5 = 0.85

Breed Group BZ _OB = 2 / 3.5 = 0.57

Breed Group CZ _OC = 1 / 2.3 = 0.43

Becomes Thus, the varieties group A is outputted as the request sequence 1. Thus, the result of calculating the required orders between the varieties groups is shown in FIG.

Fig. 34 shows the demand before leveling, and Fig. 35 shows the demand after leveling. As can be seen here, it can be seen that the whole load is leveled and even among the varieties.

Next, a description will be given of a method for determining the order of requirements for each variety in the variety group.

The distance-based loji in the group of breed group A is

Breed a ₁ l _OA a ₁ = 5/2 = 2.5

Breed a ₂ l _OA a ₂ = 5/1 = 5

Breed a ₃ l _OA a ₃ = 5/1 = 5

Breed a ₄ l _OA a ₄ = 5/1 = 5

Since the distance lji is all 1, the normalized distance Zoji is

Breed a ₁ Z _OA a ₁ = 1 / 2.5 = 0.4

Breed a ₂ Z _OA a ₂ = 1/5 = 0.2

Breed a ₃ Z _OA a ₃ = 1/5 = 0.2

Breed a ₄ Z _OA a ₄ = 1/5 = 0.2

The variety a ₁ is calculated as the required order 1. In the following manner, the demand order for each variety is determined in the same manner as the above method for determining the order order of the breed group. 36 shows the results of determining the input order by applying the request order for each variety to the request order for each variety group. The wafer can be made to flow smoothly by inject | pouring according to this request order.

[3.2 Loop Line Method]

FIG. 37 shows how the wafer flows in the apparatus configuration shown in FIG. By constructing several facility modules 90 and managing the varieties with the same processing order among all varieties and processes in a certain process flow, a smooth flow of wafers is achieved to ensure production motive and improve the operation rate of the apparatus.

In front of the storage shelf 30, wafers of various processing steps of various varieties are prepared, and the flow can be controlled by which wafers are put. Therefore, the standard inventory amount, which is the optimal inventory amount, is set for each variety group process, and the increase and decrease is checked to flow the wafers in order.

Next, as shown in FIG. 37, a method of smoothly advancing the wafer as if it were a dedicated line for each breed group was shown. 14 to 17 show data necessary for controlling the progress of the wafers of various types and processes, and explain the progress control method.

Varieties a ₁ , b ₁ ,... In each process flow data 120, varieties a ₁ , a ₂ ,... Which have the same process and processing conditions as shown in FIG. 15. Variety group A, B,… Determine the variety group process flow data (121) by making a. FIG. 16 shows the list data 122 for each breed group that memorizes the amounts actually listed. FIG. 17 shows the standard inventory data 123 for which the standard inventory amount listed for each process is calculated for each variety group. 18 shows the device-specific inventory data 124 storing the actual inventory amount for each device.

Next, how to execute the progress control will be described. For each sampling time, the wafer of the variety group and process order having the smallest inventory amount of the inventory data for each variety group 122 is extracted for the standard inventory amount for each process shown in the standard inventory data 123. At this time, if there are several wafers corresponding to the smallest varieties of group processes, the varieties are extracted quickly and the processes are in the correct order, and the entire process is selected from the varieties group process flow data 121, and the Instruct the wafer to be grounded. For example, if the process order 3 of the cultivar group B in the standard inventory data 123 is the smallest, the actual inventory amount is 2 as the standard inventory amount, the shortage 3 is required for the previous process. Therefore, the processing apparatus 2 extracts the process sequence 2, which is the previous step of the process sequence 3 of the variety group B from the variety group process flow data 121, and lists the wafers of the variety group and the process by the device list data 124. Is retrieved and the processing device 60 starts to commence.

The deficiency is extracted for each sampling in this manner, and the progress control of the wafer is executed.

[4. Wafer Flow and Operation of Each Device]

38 shows a wafer flow in the configuration shown in FIG. The flow of the wafer will be described according to the flowchart shown in FIG. When the wafer is inserted (step G1), it is conveyed to the place of the processing apparatus corresponding to the first process by the transport vehicle (step G2), and temporarily stored in the storage shelf (step G3), so that the demand for input from the processing apparatus of the wafer is met. When the process is completed, the processing unit (Step G4), the wafer number having data such as varieties after the end of the processing are identified by the identification device (Step G5), and after confirming that the process is completed, it is temporarily stored in the storage shelf again. (Step G6), it is conveyed by a carrier (step G7), it is checked whether a series of processes is complete (step G8), and when it does not complete, it returns to the next process and until a series of processes is complete | finished This loop is repeated, and when it ends, it is carried out (step G9).

FIG. 40 is a flowchart showing in detail the operation of a series of devices from the input to the discharge of the wafer in the configuration of the device shown in FIG.

When the wafer is put into the production system shown in FIG. 1, a wafer to be put into the conveyance shelf 101 of the traveling vehicle 100 is set as shown in FIG. 11 (step H1). It judges whether or not it came (step H2), and when it does not come, it progresses to step H1, and when it comes, the traveling vehicle 100 runs the floor surface to the predetermined place of the input-taking apparatus 80 (step H3). ). The arm 103 on which the conveying shelf 101 is mounted advances by stopping at a predetermined position, and the clean box door 84 and the conveying shelf door 104 are brought into close contact (step H4). The clean box door 84 is opened (step H5), and the carrier line door 104 is opened (step H6). It is judged whether there is a wafer to be set in the storage shelf 82 of the feeding-out device 80 (step H7), and if so, the wafer is transferred from the transport shelf 101 to the storage shelf 82 by the mobile-mounted robot 81. (Step H8). If no, the process proceeds to step H9. Next, it is judged whether there is a wafer to be set in the transfer shelf 101 (step H9), and if so, the moving-mounted robot 81 sets the transfer shelf 101 in the storage shelf 82 (step H10). If no, the flow proceeds to step H11. Next, it is determined whether the transport vehicle 2 has arrived (step H11). If not, the flow advances to step H20. If the transport vehicle 2 arrives, it is determined whether there is a wafer falling from the transport vehicle 2 to the feeding-out device 80. (Step H12), if there is no wafer to be unloaded, the process proceeds to Step H18, and if there is a wafer to be unloaded, the Shanghai East guide 9 is lowered (Step H13), and the front and rear movement guide 11 is advanced (Step H14), and the carrier door is opened. (12) is set in close contact with the clean box door (51).

Then, the clean box door 51 is opened (step H15), and the carrier line door 12 is opened (step H16). The moving-mounted robot 81 sets the storage shelf 82 in the transport shelf 5 (step H17). In addition, it is determined whether there is a wafer to be mounted on the transport vehicle 2 (step H 18), and if no, the process proceeds to step H20, and when there is a wafer to be loaded, it is transported from the storage shelf 82 by the mobile-mounted robot 81. It is set to the shelf 5 (step H19). It is determined whether or not the wafer is loaded in the input / output device 80 (step H20), and if there is, the process returns to step H2 again and repeats step H2 to step H20. It is judged whether or not the wafer has been set in step 101 (step H21), and if it is not set, the process proceeds to step H27, and in the case where the wafer is set, the door of the transport shelf 101 of the traveling car 100 on the traveling vehicle 100 side. Is closed (step H22), the clean box door 84 is closed (step H23), and when the arm 103 of the driving vehicle 100 is retracted (step H24), the driving vehicle 100 starts to move (step H24). H25), it transfers to the next process (step H26). On the side of the transport vehicle 2, the door of the transport shelf 5 is closed (step H27), the door 84 of the clean box is closed (step H28), and the front and rear movement guide 11 retreats (step H29). The guide rises (step H30) and returns to the conveyance state. Next, the process waits until the next transfer request is made (step H31). When the request arrives, the process moves to the next process as shown in FIG. 2 (step H32), and the transport vehicle 2 arrives (step H33). ). When the transport vehicle 2 arrives, it is determined whether or not it is the place of the take-in take-out apparatus 80 (step H34), and if so, the flow returns to step H2. ), The front and rear movement guides 11 are advanced (step H36), and are brought into close contact with the carrier line door 12 and the clean box door 84 for setting. The clean box door is opened (step H37), and the carrier ship door 12 is opened (step H38). It is determined whether there is a wafer to be unloaded from the transport shelf 5 (step H39). If no, the process proceeds to step 41, the transport-mounted robot 21 sets the transport shelf 5 in the storage shelf 30. (Step 40).

Next, it is determined whether or not there is a wafer to be put into the processing apparatus 60 (step 41). If there is no wafer, the flow proceeds to step H43, and when there is, the mobile loading robot 21 processes the storage shelf 30. It puts into the loader part 61 of the apparatus 60 (step H42). Next, the unloader 62 of the processing device 60 determines whether there is a wafer to be conveyed to the identification device 40 (step H43). If no, the process proceeds to step H45. It returns to the identification apparatus 40 from the loader part 62 (step H44). Next, it is judged whether there is a wafer returned from the identification device 40 to the storage shelf 30 (step H45). If there is no wafer, the process proceeds to step H47. It sets to the storage shelf 30 in 5) (step H46). Within the wafer transfer unit 20, between the transport vehicle 2 and the storage shelf 30, between the storage shelf 30 and the processing device 60, between the processing device 60 and the identification device 40, and an identification device ( 40) It is judged whether there is a wafer moving load between the storage shelf 30, and if there is, returning to step H39 and repeating steps H39 to H47, if not, the carrier shelf 12 is closed (step H27), and The box door 51 is closed (step H28), the front and rear movement guide 11 retreats (step H29), the shanghai east guide 9 rises (step H30), and returns to the conveyance state. And the conveyance vehicle 2 is advanced to a next process. In this manner, the wafer is processed by the carrier vehicle 2 while the wafer is processed.

Alternative Example 1

FIG. 41 shows an embodiment in which a central rail is provided at its side with respect to the configuration of the apparatus shown in FIG. In the ceiling of the center part, the center part conveyance apparatus 200 which consists of a track-shaped conveyance rail 1 and the conveyance vehicle 2 which runs on the conveyance rail 1 as a track | orbit is provided. And the side conveyance facility 201 is carried out by the station 202 in order to perform the exchange of a wafer between the conveyance 2 of the center conveyance facility 200 and the conveyance 2 of the side conveyance facility 201 in a clean atmosphere. ) In response to In the periphery of the side conveying equipment 201, the equipment module 90 which consists of the wafer conveyance unit 20 and the processing apparatus 60 which are apparatuses which perform exchange with the conveyance vehicle 2 in a clean atmosphere is made into a basic unit. Get some. Moreover, the conveyance vehicle 2 provides the conveyance shelf which stores and hold | maintains a wafer in a clean atmosphere similarly to the said Example.

At the end of the central conveying facility 200, a wafer is introduced into the production system from the outside, and when a series of processing is completed, an input taking out device 80 for taking out the wafer is provided. When a wafer is thrown in by the input taking-out apparatus 80, it is conveyed to the position of the station 202 of the side conveyance apparatus 201 in which the arbitrary processing apparatus is provided by the conveyance vehicle 2 of the center conveyance apparatus 200. The mobile robot of the station 202 is mounted on the storage shelf of the station 202 in the transport shelf of the transport vehicle 2. Next, when the conveyance vehicle 2 of the side conveyance facility 201 comes to the place of the station 202, the conveyance vehicle 2 of the side conveyance facility 201 is carried out by the moving mounting robot of the station 202 in a storage shelf. It is moved on the conveyance shelf. When the mobile loading ends, the wafer transfer unit 20 of any facility module 90 is transferred to the storage shelf by the mobile loading robot of the wafer transfer unit 20 from the transfer shelf of the transfer vehicle 2 to the storage shelf. . And when the process by the processing apparatus 60 of this side conveyance facility 201 is complete | finished, it is conveyed by the conveyance vehicle 2 to the place of the original station 202 again, and it transfers to a mobile loading robot from a conveyance shelf to a storage shelf. Moved by. When the transport vehicle 2 of the center conveyance equipment 200 arrives, it is carried by the mobile loading robot from the storage shelf to the conveyance shelf, and the side conveyance equipment 201 of the conveyance vehicle 2 responded to the following process. It is conveyed to the station 202 and processed. In this way, this operation is repeated until a series of processes are complete | finished, and when a process is complete | finished, it is conveyed by the conveyance vehicle 2 of the central conveyance equipment 200 to the place of the feed-out apparatus 80, and it is stored in a conveyance shelf. The mobile is mounted on the shelf and moved out by the robot.

Alternative Example 2

In the conveying equipment of the production system shown in FIG. 1, although the track-shaped conveyance rail was provided in the ceiling of the center part, the Example which provided this conveyance rail in the grid | lattice form in the ceiling is shown.

A facility module is provided along the conveyance rail provided in the grid | lattice form. When an instruction for moving a wafer from one equipment module to another equipment module is issued, the transport vehicle with a short waiting period correspondingly extracts the shortest distance, and the transport vehicle moves in the path. At this time, when another carriage stops or moves along the route, it moves to the shortest route in the route without the carriage. By doing in this way, the movement distance between processing apparatuses becomes short and a production period can be shortened.

Alternative Example 3

Another effective embodiment of the present invention will be described with reference to FIG.

The production line (hereinafter referred to as production module 210) shown in FIG. 1 is arranged in three straight lines, and the input and output of each production module 210 is transferred to convey the wafer between the production modules 210. The device 80 is configured to communicate with a traveling vehicle as shown in FIG.

Further, the progress control divides the process flow into three in order to facilitate the control, and associates one production module 210 with each divided process flow. That is, a process corresponding to the process flow divided into each production module 210 is performed. Then, when the processing of the wafer is finished in a certain production module 210, the traveling vehicle 100 conveys the wafer to the next production module 210, and in turn performs the processing in the production module 210. For example, in the case of the process flow as shown in FIG. 43, the whole is divided into three as shown in the figure, the process flow of steps a to f is processed by the production module 210a, and the processing is completed. One wafer is moved to the traveling vehicle 100 from the input taking out device 80a, and is conveyed to the next production module 210b. Then, the input taking out device 80b receives the wafer from the traveling vehicle 100 and inserts the wafer into the production module 210b. The production module 210b then executes the processing of steps g to l. Similarly, the process of process m-process r is performed by production module 210C. In this way, the whole process is shared by three production modules 210a to 210c and processed.

In this way, since the process flow is divided to form a varietal group for each process flow, only a part of the whole process flow has the same process flow, so that the varieties are reduced to the same variety group in each production module. Becomes easy. In addition, the number of processing units of each production module is reduced, so that the production module is made small and the conveyance distance of the wafer is shortened.

Alternative Example 4

In the embodiment in which the conveying vehicle traveling through the track-shaped rail is a belt conveyor in the conveying equipment having the configuration shown in FIG. 1, the wafer receiving and receiving unit is shown in FIG. 44, and a cross-sectional view of the EE line is shown in FIG. Explain.

A conveyor 220 rotating in one direction is provided in the center portion, and the cassette box 221 storing the wafer is mounted on the conveyor 220 and conveyed. The wafers in the cassette box 221 are held on a shelf one by one, and the cassette box door 227 is provided at the front of the cassette box 221. The wafer is closed and sealed during conveyance, and the cassette box door ( 227) is configured to open. In addition, on the upper surface of the cassette box 221, the serial number of the cassette box 221 is symbolized and marked. In front of the wafer delivery unit, a code reader 223 for identifying the number of the cassette box 221 is provided. In the cassette box 221, one or several wafers at the same time contain the same destination. The wafer is conveyed in a clean state. When the cassette box 221 mounted on the conveyor 220 is conveyed to the place of the wafer receiving unit, the code reader 223 reads the number of the cassette box 221. At this time, if the cassette box 221 to be received, the cassette box 221 is removed from the conveyor 220 by the robot 224 and set in the clean box door 226 of the clean box 225. In this set state, moving wafers are mounted. As shown in FIG. 3 and FIG. 4, this movable loading is carried out with the clean box door 226 of the clean box 225 and the cassette box ( The cassette box door 227 of 221 is opened, and the wafer is set in the storage shelf by the mobile mounting robot 21.

Next, a wafer having the same destination is set in the cassette box 221 among the wafers on which the processing is completed. When the exchange movement of the wafer in the cassette box 221 is completed in this manner, the cassette box door 227 and the clean box door 226 are closed, and the robot 224 is returned to the conveyor 220 again to proceed to the next step. Is returned. Thus, a series of wafer processes are complete | finished by advancing a process process one by one.

Alternative Example 5

Although the method of using the station 220 as an interface part of the center conveyance facility 200 and the side conveyance facility 201 was demonstrated in the structure of the conveyance installation of FIG. 41, the interface part is connected with a conveyance rail, and a branch apparatus is connected to the connection part. Embodiments to prepare are described.

When the transport vehicle driving the center conveyance facility 200 moves to the branch device (not shown), when the transport vehicle 2 moves to the side transport facility 201 side, when the branch device changes the point, the transport vehicle ( 2) moves to the side conveying equipment 201 side. And when the necessary movement and conveyance operation | movement is complete | finished by the side conveyance installation 201 side, a branch is changed again and it moves to the center conveyance facility 200 side. In the same manner, the process is repeated until the process ends.

Alternative Example 6

In the above embodiment, the transfer of wafers between the facility modules has shown an example using a guided railcar as a wheel, but the embodiment using the trolleybus is described next.

In this embodiment, in the configuration as shown in Fig. 1, a trolley-free carrier is provided instead of the transport rail and the transport. In this case, the transport vehicle can carry the wafer at the shortest distance from any facility module to any facility module. For this reason, the conveying vehicle normally carries the wafer by moving the equipment module in a sequential manner in the same manner as in the above embodiment, but the following correspondence is possible.

That is, if the wafer stored in the storage shelf in the wafer transfer unit of a certain equipment module is smaller than a certain inventory amount, the wafer transfer unit is a wafer of the processing apparatus corresponding to the previous process of the varieties and wafers of the transfer vehicle. Instruct the return unit to return. Then, the conveyance vehicle moves away from the conveyance path on which the vehicle normally runs, to the place of the processing apparatus, and conveys the wafer corresponding to the processing apparatus requested by the processing apparatus. In this manner, the wafer can be freely transferred from the processing apparatus to the processing apparatus as necessary. In addition, by using a trolleybus, it is possible to flexibly cope with the change of arrangement caused by the expansion of equipment and the change of process.

Alternative Example 7

46 shows an embodiment of the present invention in which wafers can be exchanged between processing apparatuses without passing through a transport vehicle when continuously processed in another processing apparatus.

In order to exchange wafers between two processing apparatuses, a storage shelf 230 for allowing wafers to enter and exit between the two processing apparatuses, and an identification device 40 for reading the wafer numbers described on the wafers are provided. . In addition, a mobile mounting robot 21 for handing a wafer is provided for each processing apparatus 60. In addition, these devices are housed in the clean box 231 together with the loader and unloader of the processing apparatus in order to keep the atmosphere surrounding the wafer clean.

The clean box 231 has a structure in which the conveying shelf 5 can be set in order to receive a wafer between the conveying vehicle 2 and the second degree.

In the case where the wafers are continuously processed by two apparatuses, the wafers are transferred to the transfer shelf 5 → storage shelf 230 → processing device 60a → identification device 40 → storage shelf 230 in the same manner as in the above embodiment. Move to). Then, in order to be processed by the processing apparatus 60b, the wafer after the processing is completed by the processing apparatus 60b is moved from the storage shelf 230 to the processing apparatus 60b by the mobile mounting robot 21b. When the processing is completed, the wafer is moved to the processing apparatus 60b → identification device 40 → storage shelf 230. After the predetermined processing is completed, the wafer is moved by a moving vehicle by the moving-mounted robot 21a and transferred to the next step. In this case, when the continuous processing is performed by the two processing apparatuses 60a and 60b, the transport vehicle is provided by providing the storage shelf 230 and the clean box 231 common to the two processing apparatuses 60. The wafer can be exchanged between the processing devices 60 without passing through, so that the transfer time is short and the handing frequency is reduced.

Alternative Example 8

As shown in FIG. 2 of the above embodiment, the storage shelf 30 for storing wafers is provided and dispersed for each wafer transfer unit 20, but the storage shelf 30 for centrally storing the wafer is provided. An Example is described.

A conveyance facility is provided around each storage shelf placed in the center to each processing apparatus, and the wafer processed by the processing apparatus is returned to the storage shelf again.

By concentrating and storing the wafers in this way, the inventory amount of the shelves corresponding to the arbitrary varieties and processes can also be checked, and the progress of the wafers, for example, among the processes, is the ratio between the varieties. It is easy to manage whether it is flowing while maintaining this, and management becomes easy.

Alternative Example 9

As shown in FIG. 41, the station 202 is provided in the interface portion of the center conveyance facility 200 and the side conveyance facility 201, and the wafer conveyance unit 20 and a process are processed around the side conveyance facility 201. As shown in FIG. In the configuration in which the facility module 90 in which the apparatus 60 is combined is disposed, the wafer is stored only in the storage shelf of the station 202 and processed without providing the storage shelf 30 in the wafer receiving unit 20. An embodiment of proceeding is described.

The wafer is moved to the station 202 from the transport vehicle 2 of the central transport facility 200 and temporarily stored in the storage shelf. Then, the station 202 is mounted on the transport vehicle 2 of the side transport facility 201 and transported to the wafer delivery unit 20. Therefore, when the mobile-mounted robot takes out the required wafer from the conveyance vehicle 2 and processed it in the processing apparatus 60, the mobile mounting robot mounts the wafer in the conveyance vehicle 2. At this time, the transport vehicle 2 is controlled in accordance with the timing at which the wafer is ejected from the processing apparatus 60 or the timing of introducing the wafer into the processing apparatus 60. In this way, the wafer receiving unit 20 does not provide the storage shelf 30 for storing the wafer, but the storage shelf of the station 202 which is an interface portion between the central conveying facility 200 and the side conveying facility 201. Only the storage method can be realized. This is effective when the station 202 is provided for each processing apparatus of the same type, and the wafer is stored and managed.

In this way, wafers can be supplied to a plurality of processing apparatuses in one storage shelf, and the selection of processing apparatuses can be performed flexibly.

Alternative Example 10

Another effective embodiment of the present invention will be described.

This embodiment provides a storage function to the conveying means without providing a storage shelf in the wafer delivery unit.

The operation of this embodiment will be described below.

The processing unit receives the start instruction from the host controller. And when it is ready to process, the wafer is requested | required of the conveyance vehicle. On the other hand, the conveying vehicle travels in front of the wafer handing unit of the processing apparatus according to the request of the processing apparatus, and sets the conveying shelf in the wafer handing unit. Then, the mobile-mounted robot moves the wafer from the transfer shelf to the loader portion of the processing apparatus.

In addition, upon completion of the wafer processing, the transfer of the wafer is requested to the carrier. Then, the conveying vehicle travels to the front of the wafer conveyance unit of the processing apparatus as required, and sets the conveyance shelf in the wafer conveyance unit. On the other hand, the mobile-mounted robot takes out the processed wafer from the unloader and sets it in the identification device. The identification device checks the wafer number of the wafer. Then, the wafer is stored in the transport shelf.

By transporting the wafers in accordance with the timing of the processing apparatus in this manner, it is not necessary to store the wafer for each processing apparatus, so that the wafer can be freely selected during processing. Moreover, even when a processing device fails, it is only necessary to remove the processing device from the production system, and it is unnecessary to wait for the processing until the wafer of the storage shelf is transferred to another processing device or repaired.

Alternative Example 11

Another effective embodiment of the present invention will be described.

In the above representative example, the wafer number is written and managed on the wafer in preparation for the trouble of the controller or the processing apparatus. Then, the wafer number of the wafer was identified after the treatment for the purpose of confirming that the processing was executed correctly and to confirm that the wafer number was reliably read. By the way, if the processing is surely executed by the processing apparatus and the wafer number is surely read without being lost by the processing, it is not necessary to read the wafer number after every processing.

For this reason, if it is possible not to perform wafer identification, it is not necessary to provide a wafer identification device in the wafer delivery unit. In addition, the wafer delivery unit can be simplified, and the moving work of the wafer can be reduced.

Alternative Example 12

Although the embodiments in which the storage function is provided in the transport vehicle without providing the storage shelf in the wafer transfer unit and the embodiments in which the wafer identification is not gradually performed after the processing have been described, the embodiments in which these two elements are combined are also possible. do. In other words, the wafer is directly loaded from the transport shelf of the transport vehicle by the mobile-mounted robot and stored in the transport shelf as it is when the processing is completed.

By simplifying the function of the wafer handing unit in this way, in addition to the effects described above, the processed wafer can be mounted on the transfer shelf directly from the processing apparatus, so that the waiting time of the transportation vehicle can be shortened.

Alternative Example 13

In the configuration shown in FIG. 1, the wafers are enclosed in a carrier tray during transportation and are kept closed in a storage shelf of the wafer delivery unit, or when transported, they are kept in a clean atmosphere by a clean box. Although it was the method which conveyed as a clean atmosphere, the Example which cleans the whole building may be sufficient.

By cleaning the entire building, the wafer is left as it is, even when the wafer is transported or temporarily stored, so that there is no need to seal the wafer. Therefore, there is no entry / exit operation in the sealed state, and the wafer management, conveyance, and moving deployment operation are facilitated.

Alternative Example 14

Another effective embodiment of the present invention is shown in FIG.

The wafer input to the processing apparatus 60 and the withdrawal of the wafer from the processing apparatus 60 are often cassette-cassette type (C-C type). Therefore, as an embodiment of the present invention, an embodiment in which a cassette into which a wafer is placed is put into or taken out of a processing apparatus is described.

In this case, an IC card 242 capable of writing or reading information in the cassette is provided, and the IC card 242 stores the varieties and serial numbers of the wafers in the cassette 241.

The cassette delivery unit 240 has a function of receiving the cassette 241 between the cassette carrier 246 and the processing apparatus 60, and has the following configuration. The cassette receiving unit 240 includes a cassette storage shelf 243 for storing the cassette 241, a cassette moving-mounted robot 244 for handling the cassette 241, and an IC card 242 provided in the cassette 241. Clean box for keeping the data write / read device 245 for reading information and reading as necessary, and the loader section 61 and unloader section 62 of the apparatus and the processing device 60 in a clean atmosphere. (Not shown).

Then, the cassette carrier 246 conveys the cassette 241 between the facility modules. The transfer of the cassette 241 is carried out in approximately the same order as the transfer of the wafer, but only the different parts are described below.

The processing apparatus 60 sequentially processes the wafers in the cassette set in the loader section 61 in the cassette storage shelf 243. Then, when the processing is completed, the wafer is stored in the cassette 241 set in the unloader section 62 in advance. When the processing for one cassette is finished, the cassette 241 of the unloader section 62 is set in the data write / read device 245. Then, the wafer number of the wafer newly stored in the IC card 242 is written. Moreover, the cassette 241 of the loader part 61 which became empty is moved to the unloader part 62, and accommodates the wafer of the next cassette.

By sequentially writing and updating the wafer numbers of the wafers stored in the IC card 242 in this manner, the cassette 241 can manage, transport and insert the wafers. Therefore, it is easy to cope with the cassette-cassette processing apparatus in the present state, and there is an effect that the robot's mobile loading operation for collecting and moving 25 wafers is reduced.

Alternative Example 15

In the overall configuration shown in FIG. 1, if the following whole can be provided, the progress of the wafer can be managed without writing the wafer number (type and type-specific serial number) on the wafer. In other words, if the wafer information can be accurately tracked by the processing apparatus or the like, and the information of the wafer can be reliably managed by means of providing a backup controller so that data is not erased, the wafer number is written on the wafer. There is no need to manage.

Alternative Example 16

In order to have data on the wafer, as shown in FIG. 6, the wafer number (serial number for each variety and variety) is only imprinted on the wafer at the beginning of the process. The signal indicating that the process is completed is written.

By identifying the wafer itself by this method, it is possible to reliably determine which process is finished, and since the processing status can be tracked and managed for each wafer and not managed only on software, the data can be executed by performance. There will be no management miss.

In addition, processing history and processing fault status can be confirmed by encoding and adding data such as processing conditions and results.

Alternative Example 17

In general, the wafer transfer exchange between the transfer shelf and the storage shelf is generally performed continuously for wafers of the same variety and process. In this case, an embodiment of a gripper that can shorten the transfer time by carrying out transfer of a plurality of wafers in a batch will be described with reference to FIGS. 48 to 51.

FIG. 48 shows a gripper 260 provided with five wafer adsorption portions 261. The wafer adsorption unit 261 can be switched between the use position (indicated by I in the figure) and the standby position (indicated by II in the figure), so that one to five arbitrary sheets of wafers can be collectively exchanged. .

When the wafer adsorption portion 261 is in the use position, the projection 262 is fixed to the magnet 263 by fixing the position.

49 shows a switching mechanism of the conduit 267 for vacuum suction of the wafer. The conduit 267 is open on only one side of the shaft 264, and the wafer adsorption portion 261 at the standby position II is blocked from the vacuum path, thereby damaging the suction force of the wafer adsorption portion 261 at the use position I. none.

50 and 51 show the operation of the robot arm for switching. As shown in FIG. 51, the column 265 is fixed near the robot. The wafer adsorption part is provided by placing the wafer adsorption part 261 at the standby position II on the outer side of the column 265 with respect to the axis 264 of the robot and pushing the robot arm 266 in a direction close to the robot axis. (261) can be switched to the use position I. At this time, by changing the height of the robot to match the height of the tip of the column 265 with the height of the wafer adsorption portion to be switched, one to five arbitrary numbers of wafer adsorption portions can be switched. As shown in FIG. 51, the shaft 264 is positioned inside the column 265 with respect to the axis of the robot so that the wafer adsorption portion 261 is pushed onto the lamp 265, and the robot arm 266 is shown in the figure. By moving in the direction indicated by the arrow, the wafer adsorption portion 26l can be switched to the standby position II. At the time of wafer conveyance, the robot arm is raised and rotated so as not to push the wafer adsorption portion 261 into the pillar 265.

Alternative Example 18

In the embodiment shown in FIG. 1, only one track-shaped thing is provided in the center in the conveyance rail 1, but FIG. 52 and 53 show examples in which a plurality of them are provided.

In addition to the conveying rail 1a shown in FIG. 1, another track-shaped conveying rail 1b is provided in parallel with it, and several conveyance cars 2 are each traveling. The wafer to be conveyed is shared according to the urgency of the wafer conveyance. In that case, the number of the conveyance vehicles 2 provided in the conveyance rail 1 installs the width | variety of the conveyance equipment which conveys a wafer with high urgency.

By doing in this way, a wafer with high urgency can be immediately conveyed without affecting another wafer, and the processing apparatus 60 does not wait until a wafer is conveyed.

Moreover, the wafer conveyance unit 20 by which the conveyance vehicle 2 in each rail 1 stops by providing several track-shaped conveyance rails 1 and making each conveyance rail correspond to a breeding group is provided. It can be defined.

Alternative Example 19

An embodiment in which the cassette-cassette system shown in FIG. 47 is conveyed in a cassette unit normally used without using an IC card and produced in a cassette and a sheet processing apparatus is described.

In the configuration in which the data write / read device 245 in this drawing is removed, the cassette of the carrier 246 is transported when the carrier 246 conveys the wafer housed in the cassette to an arbitrary cassette receiver unit 240. The cassette moving-mounted robot removes the cassette from the conveyance shelf and sets it in the cassette storage shelf 243. At this time, when the loader section 61 of the processing apparatus 60 corresponds to a cassette, the cassette moving-mounted robot 244 is set to the loader section 61 for each cassette and the wafers in the cassette are sequentially processed by the processing apparatus 60. Process. When the processing is finished, the wafer is stored in the cassette set in the unloader section 62 in advance, and when the processing for one cassette is finished after reaching the prescribed number of sheets, the cassette-loading robot 244 is unloaded by the unloader section 62. Is set in the cassette storage shelf 243.

In addition, when the loader unit 61 is a processing apparatus 60 corresponding to the number of sheets, the gripper of the cassette moving-mounted robot 244 is automatically moved to draw the wafer from the cassette set in the cassette storage shelf 243. To a gripper for the wafer. Then, when the wafer is set in the loader section 61 and the processing is completed, the unloader section 62 stores the cassette in the cassette storage shelf 243 with the wafer gripper of the cassette moving-mounted robot 244. Until the code is very good. When the conveyance vehicle 246 comes, the cassette moving-mounted robot 244 replaces a gripper with a cassette gripper, is mounted in the conveyance vehicle 246, and conveyed to the next process.

By doing in this way, there exists an effect which can use the cassette of a current state.

As the structure of the line, a transport vehicle carrying wafers and transporting between the processing apparatuses in a track-shaped conveying rail, a mobile-mounted robot carrying the wafers between the transporting vehicle and the processing apparatus, and one wafer per breed group, per process Each wafer can be managed by a wafer transfer unit formed by a storage shelf for temporarily storing a wafer and an identification device for identifying the wafer number of wafers, enabling simultaneous production of multiple types of wafers. The flow of the wafer can be controlled and the operation rate of the processing apparatus can be improved. In addition, it has the effect of reducing the quantity of inventory and producing the product that meets the requirements with a short delivery date.

By describing the wafer number on the wafer itself and identifying the wafer from the processing device by the identification device, the progress of each wafer can be checked, and the progress of the wafer can be easily managed. Can produce in order.

In the configuration of the processing apparatus, since the processing apparatus is hardly connected for several steps, and the batch processing apparatus is used, the amount of management data for input and end of processing is reduced, so that the control amount is reduced. Moreover, since the number of conveyance steps of a processing apparatus is reduced, the conveyance distance and frequency | count are reduced, and the effect of shortening a production period is acquired.

The wafers can be put in accordance with the requirements by the storage shelf that holds the wafers to be put into the processing apparatus for each group of wafers and each process, so that the operation rate of the processing equipment can be improved and managed by one sheet. have. In the identification device, the actual progress of the wafer can be grasped in real time, so that the production can be shortened and the inventory can be reduced.

In the clean configuration, the atmosphere of the worker and the wafer can be isolated by putting it in the conveying shelf and enclosing it during transportation, and putting it inside the clean box when it is temporarily stored for loading into the transport vehicle after being put into the processing device or processing. Therefore, efficiency is improved. Moreover, since the clean part can be minimized, cost is reduced and management becomes easy. In addition, since the work area of the worker can be secured, there is an effect that the maintenance of the processing apparatus becomes easy.

In the conveying unit, it is possible to always know where the wafers are in one unit by storing one unit at the time of conveyance and loading the wafers that have been put or processed by the processing apparatus in the transport vehicle. Is executed. In addition, there is an effect that a small quantity production of a large variety of products can be easily performed.

By circulating the track-shaped trajectory, the wafer is loaded at a predetermined wafer delivery unit when necessary for the transport vehicle and then unloaded from the transport vehicle when necessary, so that the overall transport distance is reduced and the control of the transport vehicle becomes easy.

In addition, since wafers are managed by one sheet and carried out, there is an effect that it is possible to flexibly cope with changes in varieties.

In the wafer flow, group the varieties with the same process order, calculate the standard inventory for each group and process for the wafers to be placed on the storage shelf, and use the storage shelf to match the actual inventory value with the standard inventory. It is possible to easily control the order in which the wafers flow by putting the wafer into the processing apparatus and transferring the target wafer to the next step in the transport vehicle, so that production faithful to the production plan can be performed. In addition, since the flow of each wafer can be controlled, even multiple varieties, and moreover, a process with a large number of repeating processes, can be easily managed, and simultaneous production of multiple varieties is possible. In addition, since the progress between the processes can be controlled in real time, the minimum inventory amount in consideration of the amount of deviation between the processes can be set, and the inventory amount can be reduced.

In addition, the input order can be produced in the required order by determining the input order of one unit according to the required quantity and controlling to keep this order, so that the production plan is not re-established and the planning is easy. It can be executed to satisfy cost, quality and delivery.

Alternative Example 20

An embodiment of the present invention will be described with reference to FIGS. 54 to 60.

54, 55, and 56 are diagrams showing an example of the overall configuration of a multi-variate concentrated transport vehicle. In FIG. 54, the centralized multi-variate conveying system 1201 of the duct conveyor system rotating at a constant constant speed is provided in a loop shape. On the outer circumference of the transfer system 1201 arranged in a loop shape, a processing apparatus group 1200 such as photoresist, film formation, implantation, etching, or the like is disposed. In addition, when an abnormal condition occurs in the variety or facility, a temporary storage warehouse 1208 for temporarily storing the variety and an inspection / analysis chamber 1207 for removing the cause of the abnormality are provided. When the cassette (variety) 1203 for storing a substance (wafer) is fed from the feed-in / out device 1206 of the variety, the wafer 1203 is set in the integrated transport jig 1202 of the transport system 1201 provided with the transport jig. . When the cassette arrives immediately in front of the processing device 1200, the cassette is branched from the conveying system 1201 by a merging and branching device 1204 that can respond to one and several at the same time. The separated cassette 1203 is set in the processing apparatus by the cassette receiver 1205. The speed of the conveying system is determined, for example, according to the average feeding interval of the cassette (kind) number to be processed by date. Since the cassette 1203 is disposed on the empty conveyance jig of the conveying system 1201 by the merging and branching device 1204, the cassette is transferred to the next process by the cassette receiver 1205, and in the next process. It is returned to the processing apparatus.

55 shows an example in which the processing steps of the varieties are classified into several processes, and the processing apparatus is arranged in classification units according to the necessary numbers of the classified processing processes. This is the case when the belt conveyor system intensive multi-type conveyance system 1209 which rotates at a constant speed similarly is used compared with the duct conveyor system intensive multi-product conveyance system 1201 which rotates at a constant speed without being accelerated. This processing apparatus is arranged in the order of the processes, and since the processing of one unit is completed in only a few operations, the cassette (variety) 1203 is prevented from moving to the rear of the classification unit, so that the distance and the repetition time of the transport vehicle Can shorten. FIG. 56 illustrates an example in which the belt conveyor system intensive multi-type conveying system 1209 shown in FIG. 55 is transformed into an automatic warehouse system intensive multi-variate conveying system 1210. Since the shelves 1233 are rotatable and provided vertically, the lists can be joined intensively. This is suitable when the device is a compact and integrated device.

57 is a non-stop multi-variate conveying method (hereinafter referred to as non-stop conveying example) in which a cassette conveying device 1203 is provided on a belt conveyor system concentrated multi-variate conveying system 1209 using a robot except for a device 1200 such as a photoresist. ) Is shown. The cassette (variety) 1203 on the belt conveyor system concentrated multi-variate conveying system 1209 which rotates while maintaining a constant speed and a continuous speed is led by the cassette identification device 1211, and in the case of the equipment for the process, the line The controller 1212 outputs a processing start command to the synchronous cassette handover robot 1213. Upon receiving the command, the robot 1213 grabs the cassette (variety) 1203 and delivers it to the cassette receiver 1214 while maintaining the same speed as that of the multi-variate conveying system 1209. After the processing of the cassette (variety) 1203 is completed, the cassette on the cassette receiver 1214 is transferred to the multi-variety transfer system 1209 by the synchronous cassette transfer robot 1213 while maintaining the speed of the multi-variate transfer system 1209. It is returned to the next process. The cassette (variety) 1203 is moved while adjusting the speed of the multi-variate conveying system 1209, and the position where the cassette can be grasped is adjusted by the lifting unit 1216 of the robot 1213, and the cassette is conveyed in the multi-variate variety. While maintaining the conveying speed of the system 1209, it is held and moved by the hand portion 1215 having a mechanism of two or more axes. The movable part 1217 moves sideways to convey the cassette (variety) 1203 to the cassette receiver 1214 toward the front of the device capable of processing. 58 shows an example in which the transport jig 1218 is used.

In this case, the cassette may be circular, rectangular, polygonal, or the like, which is suitable for the case where a number of wafers corresponding to the number of steps of equipment is prepared. FIG. 59 shows an example of a duct conveyor system multi-carrier truck. In this case, as shown in FIG. 58, there is an advantage that it is not necessary to manage the conveying jig 1218. FIG. 60 shows a branching and confluence mechanism, in which a cassette (variety) 1203 is slidably moved over a multi-variate conveying system 1209 and supplied to a cassette receiver 1205 capable of distributing a cassette (variety) into groups of equipment. An example with 1219 is shown. This branch and confluence mechanism 1219 may be a pusher type in addition to the slide type as shown.

61 shows a synchronous transfer mechanism 1220 using liquid. The cassette (variety) 1203 on the floating transfer jig 1203 floating on water or the like is led by the cassette identification device 1211, and the flow of the cassette (variety) group to be conveyed in the case of the processing equipment is a stopper 1221. Is stopped by). The branch and joining flow blocker 1222 is converted from the direction having the liquid cassette receiver 1231 to the direction of guiding the cassette. The processed cassette is joined to the copper shell conveyance mechanism 1220 by the blocking device 1222 as shown. The synchronous conveying mechanism 1220 moves the floating conveying jig 1230 by flowing a liquid such as water or mercury at a constant speed in a constant direction, and the liquid cassette receiving and receiving device 1231 also flows the cassette in the same direction.

FIG. 62 illustrates an example of a stacked synchronized conveying mechanism including an upper stacked concentrated multi-variate conveying system 1223 and a lower stacked concentrated multi-variate conveying system 1224 provided directly below the upper system 1223. . In this case, a centralized multi-variate conveying system stacked from the second to the nth floor is provided in the emergency, normal, test, and volume varieties, the basic process, the wiring process area, and the accessories of the process area. Dividing 1203 is effective. FIG. 63 shows an example of the interactive intensive multi-type conveying system effective in shortening the conveying time in addition to the usage method shown in FIG. The system shown in FIG. 63 includes a centralized multi-variate conveying system 1225 of a clockwise conveyor system and a conveying system 1226 of a counterclockwise conveyor system. When the cassette (variety) is conveyed, the cassette is gripped by the surfpen-type cassette hand 1227 and supplied to the apparatus. In this mechanism, the movable portion 1228 and the hand portion 1232 are supported by the support pillar 1229 to hold the cassette while its place and position are confirmed.

64 illustrates an example of a mechanism for attaching and detaching a wafer to an apparatus. The cassette supplied by the multi-variate conveying system is conveyed to a processing apparatus. For example, a barcode type IC card 1244 having a lot identifier indicated by a barcode is inserted into a slide cassette 1241 having an open hole and set therein. When the cassette 1241 reaches a predetermined position, it is pushed into the slide guide 1242 by a pusher or the like. The cassette 1241 thus pushed in is automatically opened and locked in the wafer receiving opening 1238 of the clean box 1234. The wafer 1240 in the cassette 1241 is sequentially moved by the wafer input device 1237 and is conveyed to the loader portion 1235 of the device 1200. On the other hand, the empty cassette 1241 is transferred from the clean box 1234 by a pusher or the like and stored in the vicinity of the apparatus 1200. After the processing of the cassette 1241 is completed, the cassette is locked again to the wafer outlet 1239 of the clean box 1234. When the cassette 1241 is locked, the processed wafer is supplied to the unloader portion 1236 of the apparatus 1200, so that the wafer is sequentially inserted into the cassette 1241 locked at the wafer outlet 1239 by the wafer input device 1237. Stored. After all the wafers have been stored, the wafers are moved out of the clean box 1234 and supplied to the next process. Here, the clean air, which is constantly supplied with a constant pressure, is supplied into the clean box 1234 from the insertion hole 1243 to maintain the cleanness of the clean box 1234 in order to keep the surface of the cassette 1240 clean. For lot recording, the actual results can be written on the IC card with a barcode using optical, wireless or wired to record the tracking and actual results for the lot so that they can be moved simultaneously with the following processing.

According to the present invention, in the case of a precisely processed product requiring approximately 500 hours of work in a line having approximately 80 types and 150 units of equipment, the inventory amount in the line can be controlled as a whole. Therefore, the (work) waiting time can be significantly shortened, and the delivery period can be significantly shortened (1/2 to 1/3). Production efficiency can also be improved by significantly shortening the delivery period.

The system can be applied to special workshops for fine treatment and to thin-film varieties.

Claims (6)

Carrier (2, 100) having shelf (5, 101) for moving the various kinds of wafers 70 by the number of sheets, and transporting the wafer-mounted wafer rate insulated from the outside atmosphere, the loop shape that the carrier is traveling The conveying rail 1 and the wafer targeted for the said conveyance vehicle are thrown in, and the conveyance system is comprised by the withdrawal taking-out apparatus 80 which takes out the wafer which finished all the processing processes carried by the said conveyance vehicle. Processing apparatus 60 for processing one or more of the wafer processing steps, varieties of wafers one by one, storage shelves 30 and 82 for temporarily storing each wafer, and at least varieties of wafers 70 written on the wafer Identification device 40 for identifying wafer number 73 consisting of information of 71 and serial number 72, wafer exchange between the transport vehicle, the processing device, the storage shelf and the identification device. It comprises a mobile mounting apparatus 21, 102 and the mobile mounting apparatus, the storage shelf and the identification device for implementing the components, surrounded by clean boxes (50, 83) to clean the inside of the clean and isolated from the outside atmosphere. The equipment module which maintains in an atmosphere, connects to the said processing apparatus, and arranges the installation module 20 by the wafer delivery unit which mediates the wafer transfer between the said conveyance vehicle and the said processing apparatus, and regards it as a basic unit. Are arranged in various types and in number, and connected around the conveyance rail, and the process flow data 121 indicating the process number according to the process sequence for each variety group of the varieties having the same process order and processing conditions is maintained. Variety group list data 122 representing the list quantity listed for each varietal group and process, standard list data 123 representing the standard list quantity to be listed for each varietal group and process, for each processing unit of the equipment module The inventory data 124 and 126 for each device representing the inventory amount listed on the storage shelf, and the transport data 125 including at least the variety group, processing history and the number of wafers conveyed by each of the transport vehicles are managed and managed, respectively. The carrier determines the variety group, processing history, number of sheets and the order of loading of the wafers received by each equipment module, and separately the transfer system and the equipment module group. Diversified transfer device is configured to control each controller (111112113114115116), the host controller 110 to control a whole via a communication network (117) for controlling a. 2. The multi-variate conveying apparatus of claim 1, wherein the wafer transfer unit (20) is configured as a common interface unit united with another processing apparatus. Carrier 246 which has a shelf which carries the cassette 241 which hold | maintained at least 1 wafer 70, and isolates and conveys a moving cassette in an external atmosphere, and the loop-shaped conveyance rail which the said conveyance vehicle runs | running | working. (1) and an input / output device for inserting a cassette 241 holding a wafer 70 as a target to the transport vehicle and taking out a cassette holding a wafer having finished all the processing steps carried on the transport vehicle ( 80 to a processing system 60 for processing a wafer or one or more of the wafer processing steps, a storage group 243 for temporarily storing the cassette for each breeding step, and a wafer 70. Data lead which reads the cassette information 242 added to the identification device 40 or the cassette 241 which identifies the wafer number 73 which consists of at least the information of the kind 71 and the serial number 72 of the written wafer. Device 245, phase And a mobile payload device 244, the mobile payload device, the storage shelf, and the identification device as components, for carrying out a cassette between the transport vehicle, the processing device, the storage shelf, and the identification device. They are surrounded by a clean box 83 and kept therein in a clean atmosphere isolated from the outside atmosphere, and are connected to the processing apparatus and a cassette delivery unit for mediating a cassette or wafer transfer between the transport vehicle and the processing apparatus ( 240 is a variety group which comprises the facility module 90, and which the facility module regarded as a basic unit is arranged by connecting around the conveying rail in various kinds and in number, and collecting varieties having the same process order and processing conditions. The process flow data 121 showing the process number according to the process order for each is maintained, and the list quantity listed for each breed group and process is displayed. List data 122 for each species group, standard list data 123 representing the standard list quantity to be listed for each breed group and process, and list for each device representing the list quantity listed in the storage shelf for each treatment device of each equipment module. Data 124, 126, at least a variety group of wafers conveyed by each of the transport vehicles, and a transport data 125 consisting of processing history and number of sheets, thereby managing a variety of groups of wafers that the provisional vehicle carries with each equipment module; The host controller 110 is configured to determine the processing history, the number of sheets and the order of input, and to control each of the control controllers 111 to 116 for individually controlling the transfer system and the equipment module group through the communication network 117. Multi-variate conveying device. 4. The multi-variate conveying apparatus according to claim 3, wherein the cassette receiving unit (240) is configured as a common interface unit known as a different processing apparatus. As a production method for producing various kinds of products by processing different kinds of workpieces in different kinds of processing processes, the daily required amount of output is equalized according to the total amount of production (E1) required within a predetermined target period. Step (E3), which classifies the varieties of products corresponding to the daily demand demands into one varietal group, and the required ratio for each varietal group is maintained. Step (E4) for determining one input order, step (E5) for determining an input order for a variety of varieties in each breed group, and input for each breed in the breed group Step (E6) for determining the order of input for each variety of products corresponding to the required daily output by the order, the input for each variety Step G2 of simultaneously conveying several types of workpieces between different types of processing means in accordance with the document G1, step G3 of temporarily storing the selected workpieces in the processing means fed in accordance with the order of loading for each species, A step G4 of introducing the stored workpiece into the selected processing means according to the feeding order for each variety, a step G5 of processing the injected workpiece, and a step G6 of temporarily storing the workpiece subjected to the processing ) And step (G7) for conveying the temporarily stored work to the next other processing means according to the order of feeding the varieties. The method according to claim 5, wherein the plurality of processing means are classified into several units of a work unit system.

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