KR940010261A - 다중튜브 직접회로 이송장치 - Google Patents

다중튜브 직접회로 이송장치 Download PDF

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Publication number
KR940010261A
KR940010261A KR1019920019337A KR920019337A KR940010261A KR 940010261 A KR940010261 A KR 940010261A KR 1019920019337 A KR1019920019337 A KR 1019920019337A KR 920019337 A KR920019337 A KR 920019337A KR 940010261 A KR940010261 A KR 940010261A
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KR
South Korea
Prior art keywords
integrated circuit
tube
magazine
lifter
outer end
Prior art date
Application number
KR1019920019337A
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English (en)
Other versions
KR960002491B1 (ko
Inventor
박창순
Original Assignee
김주용
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019920019337A priority Critical patent/KR960002491B1/ko
Publication of KR940010261A publication Critical patent/KR940010261A/ko
Application granted granted Critical
Publication of KR960002491B1 publication Critical patent/KR960002491B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Specific Conveyance Elements (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

본 발명은 제조된 집적회로의 검사공정에 있어서 검사하려는 다중튜브내의 집적회로를 한 줄의 레일로 이송시켜 주기 위한 다중튜브 집적회로 이송장치에 관한 것으로서, 다중튜브(14) 삽입용 홈(1a)을 종방향으로 층층이 형성한 다중튜브 매거진(1)을 수직형 안내봉(10)에 설치하여 모터(7)로 부터 전해지는 구동력으로 회전하는 리드 스크류(7)에 의해 승강될 수 있게 하고, 상기 다중튜브 매거진(1)의 직전방에는 승강 실린더(5)에 의하여 승강되는 리프터(2)를 설치하고 또한 리프터(2)의 판면에는 전후방향으로 평행하게 한쌍상의 슬릿(2a)을 틔우고 여기에 전후방향으로 작동하는 로드레스 실린더(4)를 설치함과 동시에 여기에 클램프(3)를 장착하고, 리프터(2)의 일측에는 외측단이 하향경사지고 또한 서보모터(6)에 의하여 전후방향으로 이동가능한 집적회로 매거진(9)을 설치하고 이 집적회로 매거진(5)의 외측단에 인접한 작업위치에 집적회로 안내용 레일(8)을 설치한 것이다.

Description

다중튜브 직접회로 이송장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 전체 사시도,
제2도는 동 정면도,
제3도는 동 우측면도,
제4도는 동 평면도.

Claims (1)

  1. 다중튜브(14) 삽입용 홈(1a)을 종방향으로 층층이 형성한 다중튜브 매거진(1)을 수직형 안내봉(10)에 설치하여 모터(7)로 부터 전해지는 구동력으로 회전 하는 리드 스크류(7)에 의해 승강될 수 있게 하고, 상기 다중튜브 매거진(1)의 직전방에는 승강 실린더(5)에 의하여 승강되는 리프터(2)를 설치하고 또한 리프터(2)의 판면에는 전후방향으로 평행하게 한쌍상의 슬럿(2a)을 틔우고 여기에 전후방향으로 작동하는 로드레스 실린더(4)를 설치함과 동시에 여기에 클램프(3)를 장착하고, 리프터(2)의 일측에는 외측단이 하향경사지고 또한 서보모터(6)에 의하여 전후방향으로 이동가능한 집적회로 매거진(9)을 설치하고 이 집적회로 매거진(9)의 외측단에 인접한 작업위치에 집적회로 안내용 레일(8)을 설치한 것을 특징으로 하는 다증튜브 집적회로 이송장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920019337A 1992-10-21 1992-10-21 다중튜브직접회로이송장치 KR960002491B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920019337A KR960002491B1 (ko) 1992-10-21 1992-10-21 다중튜브직접회로이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920019337A KR960002491B1 (ko) 1992-10-21 1992-10-21 다중튜브직접회로이송장치

Publications (2)

Publication Number Publication Date
KR940010261A true KR940010261A (ko) 1994-05-24
KR960002491B1 KR960002491B1 (ko) 1996-02-17

Family

ID=19341487

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920019337A KR960002491B1 (ko) 1992-10-21 1992-10-21 다중튜브직접회로이송장치

Country Status (1)

Country Link
KR (1) KR960002491B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100476665B1 (ko) * 1997-10-31 2005-07-07 삼성전자주식회사 수직핸들러
KR20210045213A (ko) * 2019-10-16 2021-04-26 임정욱 산초를 이용한 멍게 젓갈 및 그 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100476665B1 (ko) * 1997-10-31 2005-07-07 삼성전자주식회사 수직핸들러
KR20210045213A (ko) * 2019-10-16 2021-04-26 임정욱 산초를 이용한 멍게 젓갈 및 그 제조 방법

Also Published As

Publication number Publication date
KR960002491B1 (ko) 1996-02-17

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