KR940002937A - Contact manufacturing method of semiconductor device - Google Patents
Contact manufacturing method of semiconductor device Download PDFInfo
- Publication number
- KR940002937A KR940002937A KR1019920011700A KR920011700A KR940002937A KR 940002937 A KR940002937 A KR 940002937A KR 1019920011700 A KR1019920011700 A KR 1019920011700A KR 920011700 A KR920011700 A KR 920011700A KR 940002937 A KR940002937 A KR 940002937A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- semiconductor device
- insulating film
- manufacturing
- contact
- Prior art date
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
본 발명은 실리콘 질화막 (Si3N4)을 식각장애물(barrier)로 이용한 반도체 소자의 콘택 제조방법에 관한 것이다.The present invention relates to a method for manufacturing a semiconductor device contact using a silicon nitride film (Si 3 N 4 ) as an etch barrier (barrier).
그리고 상기 본 발명은 실리콘 질화막을 식각 장애물로 사용함과 동시에 평탄화용 절연막을 비트선과 워드선의 단락시키는 종래의 측벽 스페이셔(spacer)로 사용할수 있는것으로, 특별히 워드선부의 스페이서를 형성하는 공정이 필요가 없기 때문에 공정의 단순화를 이룰수 있을 뿐만 아니라 포토마스크 공정상의 여유도를 확보할수 있는 장점을 갖는 반도체 소자의 콘택 제조방법에 관한 것이다.In addition, the present invention can use the silicon nitride film as an etch barrier and at the same time can use the planarization insulating film as a conventional sidewall spacer to short-circuit the bit line and the word line. The present invention relates to a method for manufacturing a contact for a semiconductor device having an advantage of not only simplifying a process but also securing a margin in a photomask process.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명에 따른 콘택 제조방법1 is a contact manufacturing method according to the present invention
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019920011700A KR940002937A (en) | 1992-07-01 | 1992-07-01 | Contact manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019920011700A KR940002937A (en) | 1992-07-01 | 1992-07-01 | Contact manufacturing method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR940002937A true KR940002937A (en) | 1994-02-19 |
Family
ID=67296760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920011700A KR940002937A (en) | 1992-07-01 | 1992-07-01 | Contact manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR940002937A (en) |
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1992
- 1992-07-01 KR KR1019920011700A patent/KR940002937A/en not_active IP Right Cessation
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SUBM | Submission of document of abandonment before or after decision of registration |