KR940001989U - 디바이스 핸들러의 튜브 정렬장치 - Google Patents

디바이스 핸들러의 튜브 정렬장치

Info

Publication number
KR940001989U
KR940001989U KR2019920010641U KR920010641U KR940001989U KR 940001989 U KR940001989 U KR 940001989U KR 2019920010641 U KR2019920010641 U KR 2019920010641U KR 920010641 U KR920010641 U KR 920010641U KR 940001989 U KR940001989 U KR 940001989U
Authority
KR
South Korea
Prior art keywords
tube alignment
handler tube
alignment device
handler
device handler
Prior art date
Application number
KR2019920010641U
Other languages
English (en)
Other versions
KR950009877Y1 (ko
Inventor
· 김철 · 김원남 성용규
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR92010641U priority Critical patent/KR950009877Y1/ko
Publication of KR940001989U publication Critical patent/KR940001989U/ko
Application granted granted Critical
Publication of KR950009877Y1 publication Critical patent/KR950009877Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Special Conveying (AREA)
KR92010641U 1992-06-15 1992-06-15 디바이스 핸들러의 튜브 정렬장치 KR950009877Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92010641U KR950009877Y1 (ko) 1992-06-15 1992-06-15 디바이스 핸들러의 튜브 정렬장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92010641U KR950009877Y1 (ko) 1992-06-15 1992-06-15 디바이스 핸들러의 튜브 정렬장치

Publications (2)

Publication Number Publication Date
KR940001989U true KR940001989U (ko) 1994-01-03
KR950009877Y1 KR950009877Y1 (ko) 1995-11-23

Family

ID=19334908

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92010641U KR950009877Y1 (ko) 1992-06-15 1992-06-15 디바이스 핸들러의 튜브 정렬장치

Country Status (1)

Country Link
KR (1) KR950009877Y1 (ko)

Also Published As

Publication number Publication date
KR950009877Y1 (ko) 1995-11-23

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