KR940001021Y1 - Controlling apparatus of wasting amount in semiconductor device - Google Patents
Controlling apparatus of wasting amount in semiconductor device Download PDFInfo
- Publication number
- KR940001021Y1 KR940001021Y1 KR2019910000744U KR910000744U KR940001021Y1 KR 940001021 Y1 KR940001021 Y1 KR 940001021Y1 KR 2019910000744 U KR2019910000744 U KR 2019910000744U KR 910000744 U KR910000744 U KR 910000744U KR 940001021 Y1 KR940001021 Y1 KR 940001021Y1
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- South Korea
- Prior art keywords
- microcomputer
- flow amount
- semiconductor device
- present
- controlling apparatus
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Flow Control (AREA)
Abstract
내용 없음.No content.
Description
제1도는 종래 장치의 구성도.1 is a block diagram of a conventional apparatus.
제2도는 본 고안의 구성도.2 is a block diagram of the present invention.
제3도는 본 고안을 적용시킨 장치의 구성도.3 is a block diagram of an apparatus to which the present invention is applied.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 다주파코드 2 : A/D콘버터1: Multi-frequency code 2: A / D converter
3 : 마이컴 4 : 디스플레이부3: microcomputer 4: display unit
5 : 스위치부 6 : 모터드라이브5: switch unit 6: motor drive
7 : 엑츄에이터7: Actuator
본 고안은 반도체 장치의 소비량 조절장치에 관한 것이다.The present invention relates to a consumption control device of a semiconductor device.
종래의 반도체 장치에 있어서는 각 장치의 소비를 위하여 연결된 닥트(duct)의 크기(d)에 의해 소비되는 양이 결정됨으로 플로우(flow)양을 증가시키거나 감소시키고자 할 때는 유입량을 콘트롤하거나 닥트의 크기를 변경하거나 장치(10-12)의 소비압력을 가변시켜야 한다.In the conventional semiconductor device, the amount consumed is determined by the size (d) of the connected duct for the consumption of each device. Therefore, when increasing or decreasing the flow amount, the flow rate is controlled or It is necessary to change the size or vary the pressure consumption of the device 10-12.
따라서, 종래의 기술에 있어서는 각 장치마다의 닥트의 크기가 다름으로 소비량을 변경하기 위한 닥트크기의 변경이 어렵고 유입량도 매번 조절이 쉽지않아 각 장치마다의 원하는 플로우량을 조절하기가 어려워 공정에 영향을 주게 된다.Therefore, in the prior art, the size of the duct for each device is different, so it is difficult to change the size of the duct to change the consumption, and the inflow rate is not easy to adjust each time. Will be given.
본 고안은 이와 같은 종래의 결점을 감안하여 안출한 것으로 각 장치마다의 소비량을 조절하여 각 공정에서 요구하는 플로우량에서 공정을 실시할 수 있도록 하는데 그 목적이 있다.The present invention has been made in view of such a conventional drawback, and its purpose is to control the consumption of each device so that the process can be carried out at the flow rate required by each process.
이하에서 이와 같은 본 고안의 목적을 달성하기 위한 본 고안의 실시예를 첨부된 도면에 의하여 상세하 설명하면 다음과 같다.Hereinafter, described in detail by the accompanying drawings an embodiment of the present invention for achieving the object of the present invention as follows.
본 고안은 제2도와 같이 다주파코드(MFC)(1)로부터 들어온 아날로그 신혼을 디지털신호로 변환시키는 A/D콘버터(2)와, 상기 A/D콘버터(2)의 출력을 받아 각 부를 제어하는 마이컴(3)과, 상기 마이컴(3)의 제어에 의해 현재의 플로우량을 나타내는 디스플레이부(4)와, 상기 마이컴(3)에 적절한 플로우량을 셋팅시키는 스위치부(5)와, 상기 마이컴(3)에 의해 제어되어 엑츄에이터(Actuator)(7)를 제어하는 모터드라이버(6)를 포함하여서 이루어진다.According to the present invention, as shown in FIG. 2, an A / D converter 2 for converting an analog honeymoon from a multi-frequency code (MFC) 1 into a digital signal and the output of the A / D converter 2 are controlled to control each unit. A microcomputer 3, a display unit 4 indicating a current flow amount under the control of the microcomputer 3, a switch unit 5 for setting an appropriate flow amount in the microcomputer 3, and the microcomputer And a motor driver 6 which is controlled by (3) to control the actuator 7.
제3도는 상기와 같은 본 고안이 각 장치(10-12)의 배출구부분에 설치된 실시예를 나타낸 것이다.Figure 3 shows an embodiment in which the present invention as described above is installed in the outlet portion of each device (10-12).
이와 같이 구성된 본 고안은 전원이 인가되면 사용자가 셋팅시킬 수 있는 스위치부(5)를 통하여 들어온 적절한 플로우량을 마이컴(3)에서 읽게 된다.According to the present invention configured as described above, when the power is applied, the microcomputer 3 reads an appropriate flow amount coming through the switch unit 5 that the user can set.
또한, 다주파코드(1)를 통하여 들어온 현재의 플로우량을 디스플레이부(4)를 통하여 표시하여주며 스위치부(5)를 통해 셋팅된 플로우량과 현재의 플로우량을 비교하여 현재의 플로우량이 셋팅된 값에 도달하도록 엑츄에이터(7)를 통해서 각 장치(10-12)의 입구를 공정에 지장이 없는 정도로 열고 닫는다.In addition, the current flow amount entered through the multi-frequency code 1 is displayed on the display unit 4 and the current flow amount is set by comparing the current flow amount with the flow amount set through the switch unit 5. Opening and closing the inlet of each device 10-12 through the actuator 7 to the extent that the process does not interfere with it is reached.
그리고 현재의 플로우량과 셋팅장치가 일치된 후 계속하여 상기 과정을 반복한다.After the current flow amount matches the setting device, the process is repeated.
한편, 본 고안에서는 현재의 플로우량이 셋팅치와의 범위가 일정량이상 벗어나서 이를 조절하여 셋팅치와 일치시키기에 너무 많은 시간이 걸려 웨이퍼에 손상을 줄 우려가 있을 때나 셋팅치에 일치하도록 조정함에 있어 배출구의 입구를 여닫는 엑츄에이터(7)의 에러로 인하여 원하는 동작을 못할 때는 알람으로 알려줄 수 있다.On the other hand, in the present invention, when the current flow amount is out of the range of the set value more than a certain amount, it takes too much time to adjust it to match the setting value, and there is a risk of damaging the wafer or the outlet to adjust the setting value to match the setting value. When the desired operation is not possible due to an error of the actuator 7 which opens and closes the entrance of the door, the alarm can be notified.
이상에서 설명한 바와 같은 본 고안에 의하면 각 장치마다의 소비량을 조절할 수 있어 각 공정에서 요구하는 플로우량하에서 작업을 할 수 있음을 공정의 안정화를 이룰 수 있는 장점이 있다.According to the present invention as described above, it is possible to control the consumption of each device, there is an advantage that can achieve the stabilization of the process that can work under the flow amount required in each process.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019910000744U KR940001021Y1 (en) | 1991-01-18 | 1991-01-18 | Controlling apparatus of wasting amount in semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019910000744U KR940001021Y1 (en) | 1991-01-18 | 1991-01-18 | Controlling apparatus of wasting amount in semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR920015741U KR920015741U (en) | 1992-08-17 |
| KR940001021Y1 true KR940001021Y1 (en) | 1994-02-25 |
Family
ID=19309975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019910000744U KR940001021Y1 (en) | 1991-01-18 | 1991-01-18 | Controlling apparatus of wasting amount in semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR940001021Y1 (en) |
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1991
- 1991-01-18 KR KR2019910000744U patent/KR940001021Y1/en not_active IP Right Cessation
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| Publication number | Publication date |
|---|---|
| KR920015741U (en) | 1992-08-17 |
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