KR940000544Y1 - Ceramic capillary - Google Patents
Ceramic capillary Download PDFInfo
- Publication number
- KR940000544Y1 KR940000544Y1 KR2019900018822U KR900018822U KR940000544Y1 KR 940000544 Y1 KR940000544 Y1 KR 940000544Y1 KR 2019900018822 U KR2019900018822 U KR 2019900018822U KR 900018822 U KR900018822 U KR 900018822U KR 940000544 Y1 KR940000544 Y1 KR 940000544Y1
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- South Korea
- Prior art keywords
- capillary
- ceramic capillary
- ceramic
- conductive material
- resistor
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Abstract
내용 없음.No content.
Description
제1도는 종래의 세라믹 캐필러리를 도시한 사시도.1 is a perspective view showing a conventional ceramic capillary.
제2a도는 본 고안에 의해 세라믹 캐필러리에 도전물질을 형성한 사시도.Figure 2a is a perspective view of the conductive material formed on the ceramic capillary by the present invention.
제2b도는 제2a도의 평면도.FIG. 2B is a plan view of FIG. 2A.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 몸체 2 : 통로1 body 2 passage
3 : 발열저항체 4 : 도전물질3: heat generating resistor 4: conductive material
10 : 세라믹 캐필러리10: ceramic capillary
본 고안은 반도체 소자제조 공정중 리드를 소정영역을 접속시킬 때 사용하는 세라믹 캐필러리(ceramic capillary)에 관한 것으로, 특히 세라믹 캐필러리의 몸체에 가열수단을 장착시킨 캐필러리에 관한 것이다.The present invention relates to a ceramic capillary used to connect a lead to a predetermined region in a semiconductor device manufacturing process, and more particularly, to a capillary having a heating means mounted on a body of the ceramic capillary.
일반적으로 사용되는 세라믹 캐필러리(10)의 몸체(1)의 상부는 원통형 구조로 되고, 하부는 원뿔형태로 되어 그 재료는 예를 들어 산화알루미늄(Al2O3)과 같은 세라믹으로 되어 있으며, 중앙부위에 있는 통로(2)를 통해 리드(금선 또는 구리선)가 통과되도록 구성되어 있다.The upper part of the body (1) of the ceramic capillary (10) generally used has a cylindrical structure, the lower part has a conical shape, and the material is made of a ceramic such as aluminum oxide (Al 2 O 3 ). The lead (gold wire or copper wire) is passed through the passage 2 in the center portion.
그러나 상기 캐필러리 몸체는 반도전체인 세라믹으로 구성되어 전류를 전달할 수 없으므로 캐필러리 몸체하부의 경사진 단부에서 리드를 가열시킬 수 없다.However, since the capillary body is made of a ceramic, which is a semiconductor, it cannot transmit current and thus cannot heat the lead at the inclined end of the capillary body.
따라서, 본 고안은 상기의 캐필러리 몸체의 가장자리 소정부분에 도전물질을 코팅시키고, 캐필러리 몸체 하부의 원뿔모양의 경사진 외주면에 발열저항체를 구성시켜서 리드를 부착하는 공정에서 캐필러리 몸체 하부 단부가 가열되도록 하는 세라믹 캐필러리를 제공하는데 그 목적이 있다.Therefore, the present invention coats a conductive material on a predetermined edge of the capillary body, and the capillary body in the process of attaching a lead by forming a heat generating resistor on the inclined outer peripheral surface of the conical shape below the capillary body. It is an object to provide a ceramic capillary that allows the lower end to be heated.
이하, 첨부된 도면을 참고하여 본 고안을 상세히 설명하기로 한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
제1도는 종래 기술에서 언급하였으므로 반복설명은 피하기로 한다.1 is referred to in the prior art, so repeated descriptions thereof will be omitted.
제2a도는 본 고안에 의해 세라믹 캐필러리(10)의 몸체(1) 가장자리 소정부분과 그 반대측 소정부분에 도전물질(4), 예를 들어 탄소(carbon) 또는 금을 코팅시키고 몸체(1) 하부의 원뿔모양의 경사외주면 전체에 탄소를 포함하는 발열저항체(3)를 코팅시켜 세라믹 캐필러리(10)의 몸체(1)상부에서 한부분에 (+)단자가, 그 반대부분에(-)단자가 연결된 도전물질(4)에 전원공급장치(도시않됨)로부터 전류조절장치(도시않됨)을 거쳐 전류를 공급하면 몸체(1) 하부의 경사진 외주면에 코팅된 발열저항체(3)에서 전기에너지가 열에너지로 바뀌어 열이 발생되도록 구성한 것이다.2a shows a conductive material 4, for example carbon or gold, on a predetermined portion of the body 1 edge of the ceramic capillary 10 and an opposite portion of the ceramic capillary 10 according to the present invention. Coating the heat generating resistor 3 containing carbon on the entire conical inclined outer circumferential surface of the lower portion so that a positive terminal is formed at one part on the upper part of the body 1 of the ceramic capillary 10 and the opposite part is (-). When the current is supplied from the power supply device (not shown) to the conductive material 4 connected to the terminal via a current control device (not shown), the heating element 3 coated on the inclined outer peripheral surface of the lower part of the body 1 The energy is converted into thermal energy to generate heat.
제2b도는 제2a도의 평면도로서, 몸체(1) 가장자리에 도전물질(4)이 형성됨을 도시한다.FIG. 2b is a plan view of FIG. 2a showing the formation of a conductive material 4 at the edge of the body 1.
상기한 본 고안에 의하면, 세라믹 캐필러리를 통해서 금선 또는 구리선을 실리콘 기판 또는 도전층의 소정부분에 접속시킬 때 캐필러리 하부 외주면에 열이 발생되고 그로인하여 캐필러리를 통과하는 리드선이 가열되어 접속을 원할하게 하는 효과가 있다.According to the present invention described above, when the gold wire or the copper wire is connected to a predetermined portion of the silicon substrate or the conductive layer through the ceramic capillary, heat is generated on the outer peripheral surface of the capillary, whereby the lead wire passing through the capillary is heated. It has the effect of smoothing the connection.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019900018822U KR940000544Y1 (en) | 1990-11-30 | 1990-11-30 | Ceramic capillary |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019900018822U KR940000544Y1 (en) | 1990-11-30 | 1990-11-30 | Ceramic capillary |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR920010396U KR920010396U (en) | 1992-06-17 |
| KR940000544Y1 true KR940000544Y1 (en) | 1994-01-29 |
Family
ID=19306276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019900018822U KR940000544Y1 (en) | 1990-11-30 | 1990-11-30 | Ceramic capillary |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR940000544Y1 (en) |
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1990
- 1990-11-30 KR KR2019900018822U patent/KR940000544Y1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR920010396U (en) | 1992-06-17 |
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