KR930022480A

KR930022480A - How to remove small particles from the surface

Info

Publication number: KR930022480A
Application number: KR1019930007167A
Authority: KR
Inventors: 에이. 더글라스 몬트
Original assignee: 윌리엄 이.힐러; 텍사스 인스트루먼츠 인코포레이티드
Priority date: 1992-04-29
Filing date: 1993-04-28
Publication date: 1993-11-24

Abstract

본 발명은 표면으로부터 입자들을 제거하는 방법에 관한 것인데, 상부에 입자들을 갖는 표면(5)를 제공하는 단계, 흐르는 극성 용액(3) 내에 표면을 배치시키는 단계, 및 약 170내지 2,000nm의 파장을 갖는 광선을 입자들상에 충돌시키는 단계를 포함한다. 극성 용액의 표면 및 광선은 내부 환경에 있게 된다. 극성 용액 내의 표면 및 입자들은 교반될 수 있다. 전극(7)이 극성 용액 외부에 제공되어 극성 용액 내의 입자들 상에 양전하를 제공할 수 있다. 또한, 표면으로부터 입자들을 제거하는 방법이 제공되는데, 내부에 흐흐는 그 성 성분(3)을 갖는 용기(1)을 제공하는 단계, 흐르는 극성 성분 내에 상부에 입자들을 갖는 표면(5)를 배치시키는 단계, 표면과 절연된 전극(7)을 제공하는 단계, 및 전극 상에 양전하를 제공하는 단계를 포함한다. 전극(7)은 용기(1) 외부에 배치될 수 있다. 극성 성분(3)은 양호하게 깨끗한 물이다.The present invention relates to a method of removing particles from a surface, comprising providing a surface 5 having particles thereon, placing the surface in a flowing polar solution 3, and a wavelength of about 170 to 2,000 nm. Impinging a light ray having particles on the particles. The surface of the polar solution and the light rays are in the internal environment. The surface and particles in the polar solution can be stirred. An electrode 7 can be provided outside the polar solution to provide positive charge on the particles in the polar solution. Also provided is a method of removing particles from a surface, the method comprising providing a container 1 having its active component 3 flowing therein, placing a surface 5 having particles thereon in the flowing polar component. Providing an electrode 7 insulated from the surface, and providing a positive charge on the electrode. The electrode 7 may be arranged outside the container 1. The polar component 3 is preferably clean water.

Description

How to remove small particles from the surface

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 제1실시예와 관련하여 사용되는 장치의 개략도.1 is a schematic diagram of an apparatus used in connection with a first embodiment of the present invention.

제2도는 본 발명의 제2실시예와 관련하여 사용되는 장치의 개략도.2 is a schematic diagram of an apparatus used in connection with a second embodiment of the present invention.

Claims

CLAIMS 1. A method of removing particles from a surface, comprising: providing a surface with particles on top; Placing said surface in a liquid; And impinging a light beam having a wavelength of about 170 to 2000 nm over the particles.

The method of claim 1 wherein the liquid is a polar solution.

The method of claim 2, wherein the polar solution flows over the surface.

The method of claim 2, wherein the polar solution is clean water.

4. The method of claim 3, wherein the polar solution is clean water.

3. The method of claim 2, further comprising placing the surface of the polar solution and the light beam in an internal environment.

4. The method of claim 3, further comprising placing the surface of the polar solution and the light beam in an internal environment.

5. The method of claim 4, further comprising placing the surface of the polar solution and the light beam in an internal environment.

6. The method of claim 5, further comprising placing the surface of the polar solution and the light beam in an internal environment.

3. The method of claim 2, further comprising stirring the surface and the particles in the polar solution.

4. The method of claim 3, further comprising stirring the surface and the particles in the polar solution.

5. The method of claim 4, further comprising stirring the surface and the particles in the polar solution.

6. The method of claim 5, further comprising stirring the surface and the particles in the polar solution.

7. The method of claim 6, further comprising stirring the surface and the particles in the polar solution.

8. The method of claim 7, further comprising stirring the surface and the particles in the polar solution.

9. The method of claim 8, further comprising stirring the surface and the particles in the polar solution.

10. The method of claim 9, further comprising stirring the surface and the particles in the polar solution.

3. The method of claim 2, further comprising providing an electrode outside of the polar solution to provide positive charge on the particles in the polar solution.

4. The method of claim 3, further comprising providing an electrode outside of the polar solution to provide a positive charge on the particles in the polar solution.

10. The method of claim 9, further comprising providing an electrode outside the polar solution to provide positive charge on the particles in the polar solution.

18. The method of claim 17, further comprising providing an electrode outside of the polar solution to provide a positive charge on the particles in the polar solution.

CLAIMS 1. A method of removing particles from a surface, comprising: providing a container having a liquid component flowing therein; Disposing a surface with particles on top in the liquid component; Providing an electrode insulated from the surface; And providing a positive charge on the electrode.

23. The method of claim 22, wherein said liquid component is a polar component.

24. The method of claim 23, wherein the electrode is disposed outside the vessel.

24. The method of claim 23, wherein said polar component is clean water.

※ Note: Disclosure is based on the initial application.