KR930015068A - TFT manufacturing method using gate insulating film with step - Google Patents
TFT manufacturing method using gate insulating film with step Download PDFInfo
- Publication number
- KR930015068A KR930015068A KR1019910024983A KR910024983A KR930015068A KR 930015068 A KR930015068 A KR 930015068A KR 1019910024983 A KR1019910024983 A KR 1019910024983A KR 910024983 A KR910024983 A KR 910024983A KR 930015068 A KR930015068 A KR 930015068A
- Authority
- KR
- South Korea
- Prior art keywords
- insulating film
- gate insulating
- tft manufacturing
- portions
- tft
- Prior art date
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Abstract
본 발명은 드레인 전극부분의 저항을 다른 부분에 비하여 다소 높게 하도록 드레인전극 부분의 두께를 다른 부분보다 높게 하여 게이트에 가해지는 전압에 의해 형성되는 전도대(conduction path)를 다른부분과 차이를 갖게 하므로서 저항을 증가시켜 누설전류를 감소시킬 수 있게 한 것이다.According to the present invention, the thickness of the drain electrode portion is made higher than that of the other portions so that the resistance of the drain electrode portion is slightly higher than that of the other portions, thereby making the conduction path formed by the voltage applied to the gate different from the other portions. This increases the leakage current.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명의 다결정 TFT 제조 공정도,2 is a process chart of manufacturing a polycrystalline TFT of the present invention;
제3도는 본 발명의 다른 실시예의 TFT 제조 공정도.3 is a TFT manufacturing process diagram of another embodiment of the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910024983A KR930015068A (en) | 1991-12-30 | 1991-12-30 | TFT manufacturing method using gate insulating film with step |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910024983A KR930015068A (en) | 1991-12-30 | 1991-12-30 | TFT manufacturing method using gate insulating film with step |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930015068A true KR930015068A (en) | 1993-07-23 |
Family
ID=67345930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910024983A KR930015068A (en) | 1991-12-30 | 1991-12-30 | TFT manufacturing method using gate insulating film with step |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR930015068A (en) |
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1991
- 1991-12-30 KR KR1019910024983A patent/KR930015068A/en not_active Application Discontinuation
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