KR930003384A - Manufacturing method of semiconductor device - Google Patents
Manufacturing method of semiconductor device Download PDFInfo
- Publication number
- KR930003384A KR930003384A KR1019910011720A KR910011720A KR930003384A KR 930003384 A KR930003384 A KR 930003384A KR 1019910011720 A KR1019910011720 A KR 1019910011720A KR 910011720 A KR910011720 A KR 910011720A KR 930003384 A KR930003384 A KR 930003384A
- Authority
- KR
- South Korea
- Prior art keywords
- insulator
- manufacturing
- semiconductor device
- depositing
- exposed
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims 2
- 239000004065 semiconductor Substances 0.000 title description 2
- 239000012212 insulator Substances 0.000 claims 5
- 238000000151 deposition Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
내용 없음.No content.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명 반도체 소자의 공정 단면도.2 is a process cross-sectional view of the semiconductor device of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910011720A KR930003384A (en) | 1991-07-10 | 1991-07-10 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910011720A KR930003384A (en) | 1991-07-10 | 1991-07-10 | Manufacturing method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930003384A true KR930003384A (en) | 1993-02-24 |
Family
ID=67440882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910011720A KR930003384A (en) | 1991-07-10 | 1991-07-10 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR930003384A (en) |
-
1991
- 1991-07-10 KR KR1019910011720A patent/KR930003384A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |