KR920701531A - 단결정 제조장치 - Google Patents
단결정 제조장치Info
- Publication number
- KR920701531A KR920701531A KR1019910701501A KR910701501A KR920701531A KR 920701531 A KR920701531 A KR 920701531A KR 1019910701501 A KR1019910701501 A KR 1019910701501A KR 910701501 A KR910701501 A KR 910701501A KR 920701531 A KR920701531 A KR 920701531A
- Authority
- KR
- South Korea
- Prior art keywords
- single crystal
- raw material
- crucible
- storage container
- melt
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP90-51326 | 1990-03-02 | ||
JP2051326A JPH03252386A (ja) | 1990-03-02 | 1990-03-02 | 単結晶製造装置 |
PCT/JP1991/000273 WO1991013192A1 (en) | 1990-03-02 | 1991-03-01 | Single crystal production apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR920701531A true KR920701531A (ko) | 1992-08-12 |
Family
ID=12883798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910701501A KR920701531A (ko) | 1990-03-02 | 1991-03-01 | 단결정 제조장치 |
Country Status (4)
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2754104B2 (ja) * | 1991-10-15 | 1998-05-20 | 信越半導体株式会社 | 半導体単結晶引上用粒状原料供給装置 |
US5997234A (en) * | 1997-04-29 | 1999-12-07 | Ebara Solar, Inc. | Silicon feed system |
JP5145014B2 (ja) * | 2007-03-29 | 2013-02-13 | シャープ株式会社 | 固体材料処理装置 |
US10202704B2 (en) | 2011-04-20 | 2019-02-12 | Gtat Ip Holding Llc | Side feed system for Czochralski growth of silicon ingots |
EP2699716B1 (en) * | 2011-04-20 | 2019-12-18 | GTAT IP Holding LLC | Side feed system for czochralski growth of silicon ingots |
CN104264229B (zh) * | 2014-10-09 | 2016-08-24 | 河北晶龙阳光设备有限公司 | 一种单晶炉在线掺杂装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0523580Y2 (US07923587-20110412-C00001.png) * | 1987-02-27 | 1993-06-16 | ||
JPH01282194A (ja) * | 1988-01-19 | 1989-11-14 | Osaka Titanium Co Ltd | 単結晶製造方法 |
-
1990
- 1990-03-02 JP JP2051326A patent/JPH03252386A/ja active Pending
-
1991
- 1991-03-01 WO PCT/JP1991/000273 patent/WO1991013192A1/ja active Application Filing
- 1991-03-01 DE DE19914190411 patent/DE4190411T1/de not_active Withdrawn
- 1991-03-01 KR KR1019910701501A patent/KR920701531A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE4190411T1 (US07923587-20110412-C00001.png) | 1992-05-14 |
JPH03252386A (ja) | 1991-11-11 |
WO1991013192A1 (en) | 1991-09-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE4106589C2 (de) | Kontinuierliches Nachchargierverfahren mit flüssigem Silicium beim Tiegelziehen nach Czochralski | |
DE69205253T2 (de) | Vorrichtung für die Zuführung von granuliertem Schüttgut für einen Halbleitendeinkristallziehungsapparat. | |
DE69201292T2 (de) | Vorrichtung zur Einkristallziehung. | |
KR920701531A (ko) | 단결정 제조장치 | |
DE2937452A1 (de) | Verfahren zum herstellen einer schalenform fuer die erzeugung eines einkristalls und nach dem verfahren hergestellte form | |
GB1251538A (US07923587-20110412-C00001.png) | ||
KR900004972A (ko) | 실리콘 단결정의 제조방법 및 제조장치 | |
US2156316A (en) | Apparatus for making fibrous materials | |
US3582287A (en) | Seed pulling apparatus having diagonal feed and gas doping | |
US3241925A (en) | Apparatus for growing solid homogeneous compositions | |
DE50307712D1 (de) | Anordnung zur herstellung von kristallstäben mit definiertem querschnitt und kolumnarer polykristalliner struktur mittels tiegelfreier kontinuierlicher kristallisation | |
SU436514A3 (US07923587-20110412-C00001.png) | ||
GB809991A (en) | Apparatus for filling sheathed electrical resistance elements with granular insulating material | |
US7828004B2 (en) | Method and device for storing chemical products in a container | |
JPH03290392A (ja) | 単結晶製造装置 | |
US2697854A (en) | Process and apparatus for making elongated bars, blocks, and the like | |
JPS56109893A (en) | Single crystal manufacturing apparatus | |
CN208514864U (zh) | 一种注塑机进料装置 | |
US1078917A (en) | Bolting, sifting, and grading machine. | |
KR920701530A (ko) | 실리콘 단결정의 제조장치 | |
GB861888A (en) | Improvements in or relating to the production of shaped products by melt spinning | |
US3388887A (en) | Device for molding solid thermoplastic bodies | |
CN207614459U (zh) | 一种实验室用二次过滤装置 | |
JPS6395195A (ja) | 結晶引上げ方法及び装置 | |
KR940007231A (ko) | 단결정 원료공급방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |