KR920020626A - 유리기판 세정장치 - Google Patents

유리기판 세정장치 Download PDF

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Publication number
KR920020626A
KR920020626A KR1019910005386A KR910005386A KR920020626A KR 920020626 A KR920020626 A KR 920020626A KR 1019910005386 A KR1019910005386 A KR 1019910005386A KR 910005386 A KR910005386 A KR 910005386A KR 920020626 A KR920020626 A KR 920020626A
Authority
KR
South Korea
Prior art keywords
glass substrate
substrate cleaning
guide rail
cleaning apparatus
cleaning device
Prior art date
Application number
KR1019910005386A
Other languages
English (en)
Other versions
KR930011902B1 (ko
Inventor
김양선
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19312882&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR920020626(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019910005386A priority Critical patent/KR930011902B1/ko
Priority to US07/940,325 priority patent/US5263332A/en
Publication of KR920020626A publication Critical patent/KR920020626A/ko
Application granted granted Critical
Publication of KR930011902B1 publication Critical patent/KR930011902B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D29/00—Arrangement or mounting of control or safety devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1917—Control of temperature characterised by the use of electric means using digital means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/11—Fan speed control
    • F25B2600/112—Fan speed control of evaporator fans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2700/00—Means for sensing or measuring; Sensors therefor
    • F25D2700/02—Sensors detecting door opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2700/00—Means for sensing or measuring; Sensors therefor
    • F25D2700/12—Sensors measuring the inside temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

내용 없음

Description

유리기판 세정장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명 장치의 개략사시도.

Claims (4)

  1. 수조(1) 내부 공간에 배열된 유리기판(9)을 세정시키도록 노즐부재(4)가 갖취진 유리기판 세정장치에 있어서, 상기 수조(1)의 상단 측벽(1a)에 안내레일부재(2)가 갖춰지고, 이 안내레일부재(2)에 끼워져 안내되도록된 상기 노즐부재(4)가 왕복운동할 수 있도록 왕복운동기구(8)에 연결된 것을 특징으로 하는 유리기판 세정장치.
  2. 제1항에 있어서, 상기 안내레일부재(2)가 중앙부가 볼록한 아아치 형상으로 형성된 것을 특징으로 하는 유리기판 세정장치.
  3. 제1항에 있어서, 상기 노즐부재(4)의 선단에는 상기 안내레일부재(2)에 장착되어 자유로이 구를 수 있도록된 안내로울러(3)가 갖춰진 것을 특징으로 하는 유리기판 세정장치.
  4. 제1항에 있어서, 상기 노즐부재(4)를 왕복운동시키도록된 왕복운동기구(8)가 캠(6)과 커넥팅로드(7)로 이루어진 것을 특징으로 하는 유리기판 세정장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910005386A 1991-04-03 1991-04-03 유리기판 세정장치 KR930011902B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019910005386A KR930011902B1 (ko) 1991-04-03 1991-04-03 유리기판 세정장치
US07/940,325 US5263332A (en) 1991-04-03 1992-09-03 Temperature control method for refrigerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910005386A KR930011902B1 (ko) 1991-04-03 1991-04-03 유리기판 세정장치

Publications (2)

Publication Number Publication Date
KR920020626A true KR920020626A (ko) 1992-11-21
KR930011902B1 KR930011902B1 (ko) 1993-12-22

Family

ID=19312882

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910005386A KR930011902B1 (ko) 1991-04-03 1991-04-03 유리기판 세정장치

Country Status (2)

Country Link
US (1) US5263332A (ko)
KR (1) KR930011902B1 (ko)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0138049B1 (ko) * 1994-03-31 1998-07-01 김광호 냉장고의 압축기의 운전속도 제어방법
CA2160338C (en) 1994-10-13 2003-09-23 Kenneth W. Oden Electronic refrigeration control system
BR9403709A (pt) * 1994-10-13 1997-02-25 Multibras Eletrodomesticos Sa Sistema para controle operacional de refrigeradores e freezers
KR100191499B1 (ko) * 1994-11-17 1999-06-15 윤종용 냉장고의 운전제어장치 및 그 방법
KR0165303B1 (ko) * 1994-11-30 1999-01-15 김광호 냉장고 마이크로프로세서의 온도 제어방법
US6223817B1 (en) 1996-04-25 2001-05-01 Royal Vendors, Inc. Electronic refrigeration control system
JPH10132437A (ja) * 1996-10-21 1998-05-22 Daewoo Electron Co Ltd 冷蔵庫のクックドフードチリングチャンバの温度を制御する方法及びその装置
KR19980030890A (ko) * 1996-10-30 1998-07-25 배순훈 냉장고 쿡칠(Cook-chill) 시스템
KR19980054656A (ko) * 1996-12-27 1998-09-25 배순훈 에어커튼팬의 작동방법
GB2359126B (en) * 1998-10-30 2003-07-09 Daewoo Electronics Co Ltd Air curtain fan driving device and method for a refrigerator
WO2000075586A1 (en) * 1999-06-04 2000-12-14 Arçelik A.Ş. Refrigerator operating in economy mode
US6405548B1 (en) 2000-08-11 2002-06-18 General Electric Company Method and apparatus for adjusting temperature using air flow
US6311509B1 (en) * 2000-12-22 2001-11-06 Premark Feg L.L.C. Chiller with automatic probe detection and filtered temperature display
EP1524484A1 (en) * 2003-10-16 2005-04-20 Whirlpool Corporation Refrigerator
CN1657853A (zh) * 2004-02-16 2005-08-24 三星电子株式会社 泡菜电冰箱及其控制方法
US7152415B2 (en) * 2004-03-18 2006-12-26 Carrier Commercial Refrigeration, Inc. Refrigerated compartment with controller to place refrigeration system in sleep-mode
BRPI0402012A (pt) * 2004-05-04 2005-12-20 Multibras Eletrodomesticos Sa Sistema de controle de temperatura em um aparelho de refrigeração
BRPI0403128A (pt) * 2004-08-02 2006-03-14 Multibras Eletrodomesticos Sa sistema para ajustar a temperatura em um aparelho de refrigeração
US7765819B2 (en) * 2006-01-09 2010-08-03 Maytag Corporation Control for a refrigerator
KR101663835B1 (ko) * 2010-08-06 2016-10-14 엘지전자 주식회사 냉장고의 운전 제어 방법
DE102012206805A1 (de) * 2012-04-25 2013-10-31 BSH Bosch und Siemens Hausgeräte GmbH Einkreis-Kältegerät
WO2014102375A1 (en) * 2012-12-31 2014-07-03 Arcelik Anonim Sirketi A cooling device
CN103411381B (zh) * 2013-08-29 2016-03-30 合肥美的电冰箱有限公司 冰箱的控制方法及冰箱
US10501972B2 (en) * 2015-03-31 2019-12-10 Follett Corporation Refrigeration system and control system therefor
IN2015CH02730A (ko) * 2015-05-30 2015-07-10 Wipro Ltd
KR102395456B1 (ko) * 2016-06-09 2022-05-06 엘지전자 주식회사 온도 상황 인식적 냉장고 및 이를 제어하는 방법
TWI636225B (zh) * 2016-07-26 2018-09-21 聲寶股份有限公司 電冰箱的智能溫度控制方法
KR102304277B1 (ko) 2017-03-21 2021-09-23 엘지전자 주식회사 냉장고
KR102281711B1 (ko) * 2017-03-21 2021-07-27 엘지전자 주식회사 냉장고
CN113587528B (zh) * 2021-07-19 2022-12-27 珠海格力电器股份有限公司 用于制冷设备的风机控制电路、方法及冷藏密闭柜

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297852A (en) * 1980-07-17 1981-11-03 General Electric Company Refrigerator defrost control with control of time interval between defrost cycles
US4481785A (en) * 1982-07-28 1984-11-13 Whirlpool Corporation Adaptive defrost control system for a refrigerator
DE3843898A1 (de) * 1988-12-24 1990-06-28 Porsche Ag Klimatisierungssystem fuer ein fahrzeug

Also Published As

Publication number Publication date
KR930011902B1 (ko) 1993-12-22
US5263332A (en) 1993-11-23

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