KR920010855A - Package formation method using plasma - Google Patents

Package formation method using plasma Download PDF

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Publication number
KR920010855A
KR920010855A KR1019900019644A KR900019644A KR920010855A KR 920010855 A KR920010855 A KR 920010855A KR 1019900019644 A KR1019900019644 A KR 1019900019644A KR 900019644 A KR900019644 A KR 900019644A KR 920010855 A KR920010855 A KR 920010855A
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KR
South Korea
Prior art keywords
plasma
package
formation method
package formation
filled
Prior art date
Application number
KR1019900019644A
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Korean (ko)
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KR930011118B1 (en
Inventor
변광유
Original Assignee
정몽헌
현대전자산업 주식회사
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Application filed by 정몽헌, 현대전자산업 주식회사 filed Critical 정몽헌
Priority to KR1019900019644A priority Critical patent/KR930011118B1/en
Publication of KR920010855A publication Critical patent/KR920010855A/en
Application granted granted Critical
Publication of KR930011118B1 publication Critical patent/KR930011118B1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection

Abstract

내용 없음No content

Description

플라즈마를 이용한 패캐이지 형성방법Package formation method using plasma

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 의해 플라즈마를 이용하여 패캐이지를 성형하는 장치의 개략도.1 is a schematic view of an apparatus for shaping a package using plasma according to the present invention.

Claims (1)

패캐이지 형상방법에 있어서, 플레이트가 접속된 상, 금형이 수용된 진공챔버 내부에서, 상, 하 금형 내부에 패캐이지 재료를 채운다음, 플라즈마 발생장치와 연결된 상, 하 플레이트 사이에 플라즈마를 발생시켜 패캐이지 재료를 소결시켜 패캐이지를 형성하는 것을 특징으로 하는 플라즈마를 이용한 패캐이지 형성방법.In the package shape method, in a vacuum chamber in which a plate is connected and a mold is filled, a package material is filled in the upper and lower molds, and then a plasma is generated between the upper and lower plates connected to the plasma generator. A package forming method using plasma, characterized by sintering an easy material to form a package. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900019644A 1990-11-30 1990-11-30 Manufacturing method of package using plasma KR930011118B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900019644A KR930011118B1 (en) 1990-11-30 1990-11-30 Manufacturing method of package using plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900019644A KR930011118B1 (en) 1990-11-30 1990-11-30 Manufacturing method of package using plasma

Publications (2)

Publication Number Publication Date
KR920010855A true KR920010855A (en) 1992-06-27
KR930011118B1 KR930011118B1 (en) 1993-11-24

Family

ID=19306877

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900019644A KR930011118B1 (en) 1990-11-30 1990-11-30 Manufacturing method of package using plasma

Country Status (1)

Country Link
KR (1) KR930011118B1 (en)

Also Published As

Publication number Publication date
KR930011118B1 (en) 1993-11-24

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