KR920010426U - 반도체용 코팅장치 - Google Patents

반도체용 코팅장치

Info

Publication number
KR920010426U
KR920010426U KR2019900018128U KR900018128U KR920010426U KR 920010426 U KR920010426 U KR 920010426U KR 2019900018128 U KR2019900018128 U KR 2019900018128U KR 900018128 U KR900018128 U KR 900018128U KR 920010426 U KR920010426 U KR 920010426U
Authority
KR
South Korea
Prior art keywords
coating device
semiconductor coating
semiconductor
coating
Prior art date
Application number
KR2019900018128U
Other languages
English (en)
Other versions
KR930007923Y1 (ko
Inventor
김강산
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019900018128U priority Critical patent/KR930007923Y1/ko
Publication of KR920010426U publication Critical patent/KR920010426U/ko
Application granted granted Critical
Publication of KR930007923Y1 publication Critical patent/KR930007923Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Coating Apparatus (AREA)
KR2019900018128U 1990-11-23 1990-11-23 반도체용 코팅장치 KR930007923Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900018128U KR930007923Y1 (ko) 1990-11-23 1990-11-23 반도체용 코팅장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900018128U KR930007923Y1 (ko) 1990-11-23 1990-11-23 반도체용 코팅장치

Publications (2)

Publication Number Publication Date
KR920010426U true KR920010426U (ko) 1992-06-17
KR930007923Y1 KR930007923Y1 (ko) 1993-11-24

Family

ID=19305811

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900018128U KR930007923Y1 (ko) 1990-11-23 1990-11-23 반도체용 코팅장치

Country Status (1)

Country Link
KR (1) KR930007923Y1 (ko)

Also Published As

Publication number Publication date
KR930007923Y1 (ko) 1993-11-24

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
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Payment date: 20041018

Year of fee payment: 12

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