KR920007766B1 - Piezoelectrically operating valve for fluid control - Google Patents

Piezoelectrically operating valve for fluid control Download PDF

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KR920007766B1
KR920007766B1 KR1019870002138A KR870002138A KR920007766B1 KR 920007766 B1 KR920007766 B1 KR 920007766B1 KR 1019870002138 A KR1019870002138 A KR 1019870002138A KR 870002138 A KR870002138 A KR 870002138A KR 920007766 B1 KR920007766 B1 KR 920007766B1
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South Korea
Prior art keywords
valve
piezoelectric
fluid control
piezocrystal
duct
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KR1019870002138A
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Korean (ko)
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KR870009167A (en
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슈톨 쿠르트
케트너 지그프리트
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페스토 카게
로타르 뮐러
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/04—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
    • F16K11/044—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves with movable valve members positioned between valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/04—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F16K31/006—Piezoelectric benders having a free end

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

내용 없음.No content.

Description

유체제어용 압전작동 밸브Piezo-actuated Valves for Fluid Control

제1도와 제2도는 두 개의 피에조크리탈요소를 이용한 본 발명의 제1작동실시예의 도시도.1 and 2 show a first operating embodiment of the present invention using two piezocrystal elements.

제3도와 제4도는 단일피에조크리스탈요소를 이용한 본 발명의 제2작동실시예의 도시도.3 and 4 illustrate a second operating embodiment of the present invention using a single piezocrystal element.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

10 : 하우징 11 : 상부부분10 housing 11 upper part

12 : 하부부분 13 : 공동12: lower part 13: cavity

14 : 공급덕트 15 : 배출덕트14: supply duct 15: discharge duct

16 : 작동덕트 19, 20 : 덕트단16: operating duct 19, 20: duct end

17, 16 : 밸브시이트 21, 22 : 씨에조크리스탈(piezocrystal)요소17, 16: valve seat 21, 22: piezocrystal element

24, 25 : 자유단(free end) 26, 27 : 밸브부재24, 25: free end 26, 27: valve member

28 : 전기터미날 30 : 단일 씨에조크리스탈요소28: electric terminal 30: single CSE crystal element

31 : 자유단 32, 33 : 밸브부재31: free end 32, 33: valve member

34 : 스프링 35 : 소울더(shoulder)34: Spring 35: Soulder

본 발명은 유체제어용 압전 작동밸브에 관한 것으로서, 밸브 하이징내에 길이방향의 피에조크리스탈배열로 되어 있으며, 그 배열의 한단부에 고착되어 있어서 전기터미날은 전류공급이 되도록 이용할 수 있고, 한편으로 그 피에조크리스탈의 다른 단은 하우징에 열려있는 밸브덕트를 개폐하기 위해 밸브부재를 지지한다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuating valve for fluid control, and has a longitudinal piezocrystal arrangement in a valve riser, and is fixed to one end of the arrangement so that the electric terminal can be used to supply current, while the piezo The other end of the crystal supports the valve member to open and close the valve duct open in the housing.

피에조크리스탈배열은 상업상 이용가능한 연성요소 즉 바이오르프(bimorph)판 형태로 되어 있으며, 즉 연성중간층을 갖춘 두 개의 대향분극 압전층으로 구성된다. 이 요소는 양 또는 음극의 직류를 사용해서 압전층의 단락이나 연신(延伸)이 될 수 있어서 전기로 유도된 굽힘효과는 밸브를 작동하는데 이용될 수 있다.The piezocrystal array is in the form of a commercially available flexible element, or bimorph plate, ie consists of two opposing polarizing piezoelectric layers with a flexible intermediate layer. This element can be a short or stretch of the piezoelectric layer using positive or negative direct current so that an electrically induced bending effect can be used to operate the valve.

미합중국 특허번호 제 4,340,083호에는 인슐린 공급속도나 그밖의 유사한 수단을 제어하기 위해 본체에 삽입되도록 설계된 밸브가 기재되어 있는데, 그 이유는 이 밸브가 3방향밸브로는 사용할 수 없는 단일 밸브덕트만을 개폐할 수밖에 없기 때문이다.U.S. Patent No. 4,340,083 describes a valve designed to be inserted into the body to control insulin feed rate or other similar means, because it only opens and closes a single valve duct that cannot be used as a three-way valve. Because there is no choice but to.

독일연방공화국에 계류중인 특허 출원 제 2,511,752호에는 단일 변환단계에서 대해 설명되었는데 열거를 하면, 피에조크리스탈요소는 두 유동제어 오리피스사이에 조절가능하게 배열되어 있으나 그 오리피스를 잠그거나 완전히 닫는데 적합하지 않고, 어떠한 밀봉밸브부재도 구비하지 못한다. 그 요소는 장치를 떠나는 유체의 유동으로 저항을 변화시키려고만 하는 경향이 있어서 대개 그 장치를 3방향 밸브로써 이용될 수 없다.Patent Application No. 2,511,752 pending in the Federal Republic of Germany, described in a single conversion step, the enumeration shows that the piezocrystal elements are adjustablely arranged between the two flow control orifices but are not suitable for locking or completely closing the orifices. It does not have any sealing valve member. The element tends to only change the resistance with the flow of fluid leaving the device and usually the device cannot be used as a three-way valve.

본 발명의 목적은 첫째 구조가 압전밸브, 둘째 생산비용이 저렴한 밸브, 셋째 3방향 밸브를 만드는 것이다.It is an object of the present invention to make a first piezoelectric valve, a second low-cost valve, and a third three-way valve.

본 발명의 명세서와 특히 청구범위에 있는 목적과 상기한 목적을 달성하기 위해서는, 하우징 내부에 적어도 3개의 오리피스개구를 구비하고 공급덕트와 연결된 한 개의 오리피스 시이트와 배출덕트와 연결된 한 개의 오리피스사이트사이에 적어도 1개 이상의 밸브부재를 구비하여서 작동덕트(즉 밸브제어공급용덕트)는 상호 위치에서 다른 밸브덕트중 하나에 각각 연결되도록 해야 한다.In order to achieve the object of the present specification and in particular the claims and the above object, there is provided between at least three orifice openings inside the housing and between one orifice sheet connected to the supply duct and one orifice site connected to the discharge duct. At least one valve member is to be provided so that the actuation ducts (ie valve control supply ducts) are each connected to one of the other valve ducts in mutual position.

비록 밸브가 적은수의 요소만을 구비하고 있지만 3방향 밸브 같이 복잡하고 어려운 작동을 한다.Although the valve has only a small number of elements, it is as complex and difficult to operate as a three-way valve.

또한 특허청구의 범위에는 본 발명의 장점을 기술하고 있다. 밸브시이트는 서로 향하고 밸브하우징의 내부공간으로 향한 동축의 환형덕트단에 양호하게 배열되어 있어서 재료 사용이 경제적이며 밸브부재가 이동하는데 아주 적합하다. 이렇게 볼 때 그 밸브시이트는 구의 절단체에 가까운 표면, 즉 원추형의 기울어진 표면을 구비하고 있다.The scope of the claims also describes the advantages of the invention. The valve seats are well arranged at the coaxial annular duct ends facing each other and towards the inner space of the valve housing, so that the material use is economical and it is very suitable for the movement of the valve member. In this way, the valve seat has a surface close to the spherical body, that is, a conical inclined surface.

본 발명에 따라 밸브의 형태에 있어서, 피에조크리스탈배열은 두개의 평행피에조크리스탈요소로 구성되며 요소반대쪽에 있는 면은 각각의 밸브 또는 밀봉부재를 구비한다. 중립 상태에서 한 요소의 밸브부재는 구조상 밸브시이트와 바이어스되고 전기적으로 여자된 상태에서 다른 요소의 밸브부재는 전기여자로 인해 다른 밸브시이트를 가입할 것이다. 따라서 각각의 밸브시이트는 연관된 피에조크리스탈요소를 구비한다. 여자된 상태에서 밸브시이트를 담는 요소는 중립상태중에는 작동하지 않기 때문에 아주 정확한 닫힘효과가 있다.In the form of a valve according to the invention, the piezocrystal arrangement consists of two parallel piezocrystal elements with the face opposite the elements having respective valves or seals. In the neutral state, the valve member of one element is structurally biased with the valve seat and in the electrically excited state the valve member of the other element will join the other valve seat due to the electric excitation. Each valve seat thus has an associated piezocrystal element. The element that contains the valve seat in the excited state does not operate in the neutral state, so it has a very accurate closing effect.

본 발명의 또다른 실시예에 있어서 피에조크리스탈배열을 단일 피에조크리스탈요소를 구성하여, 그 단일요소에는 양면에 밸브부재가 설치되어 있으며, 비작동상태에서는 기계적인 바이어싱작용에 의해 하나의 밸브시이트를 지지하도록 하고 여자된 상태에서는 다른 편의 밸브시이트를 지지한다. 이 형태는 단일 피에조크리스탈요소가 3방향밸브기능을 수행하기 위하여 필요한 모든 장점을 갖고 있다.In another embodiment of the present invention, the piezocrystal array constitutes a single piezocrystal element, and the single element is provided with valve members on both sides, and in a non-operating state, one valve sheet is formed by mechanical biasing. Support and the other side of the valve seat in an excited state. This form has all the advantages necessary for a single piezocrystal element to perform a three-way valve function.

비작동 상태에서 밸브시이트를 정확히 닫도록 하기 위하여 사용된 각각의 피에조크리스탈 요소는 기계적으로 바이어스되고 스프링력으로 밸브시이트를 가압하는데 이 스피링형태는 밸브부재를 누르는 스프링의 한단부를 가진 헬리컬압축 스프링형이며 그 안이 적당하게 우묵부가 설치되고 다른 단에는 밸브시이트를 구비하는 덕트의 한부분이 설치된다.Each piezo-crystal element used to close the valve seat correctly in a non-operating state is mechanically biased and pressurizes the valve seat with a spring force, which is a helical compression spring type with one end of the spring pressing the valve member. In the inside, a recess is appropriately installed, and at one end, a part of the duct including the valve seat is installed.

생산비를 절감하기 위해 하우징은 저렴한 합성수지로 사각프리즘형태로 만든다. 조립과 수리 및 서비스를 쉽게 하기 위해 하우징을 두부분으로 만든다면 질을 상당히 높을 수 있을 것이며, 그 두부분은 피에조크리스탈배열이 고정되있는 위치에서 함께 설치된다.To reduce production costs, the housing is made of square prism with low cost synthetic resin. Two parts of the housing would be of very high quality for ease of assembly, repair and service, and the two parts would be installed together where the piezocrystal array was fixed.

본 발명의 두 작동의 실시예가 도면에 도시된 예로써 서술될 것이다. 제1도와 제2도에서 나타난 바와같이 수지로 만든 직사각형의 프리즘하우징(10)은 상부부분(11)과 하부부분(12)으로 되어 있는데 그들 사이에는 직사각형이고 각주(角柱)로 형성된 내부공동을 형성한다. 공급덕트(14)(P), 배출덕트(R) 및 작동덕트(16)(A)는 이공동에 열려있다. 공급덕트(14)와 배출덕트(15)는 밸브시이트(seat)(17)(18)를 각각 구비하고 있으며 내부단(19)(20)은 하우징(10)내의 공동(13)으로 돌출되어 있다. 밸브사이트(17)(18)가 구의 절단형태이거나 밸브부재사이의 접속상에 경사각이 있음에도 불구하고 완전한 밀봉작용을 제공하는 외부형태로 되었지만은, 덕트단(19)(20)의 밸브시이트 즉, 돌출부는 외견이 원주형으로 홈이 파져있다.Embodiments of two operations of the present invention will be described by way of example shown in the drawings. As shown in FIG. 1 and FIG. 2, the rectangular prism housing 10 made of resin has an upper portion 11 and a lower portion 12, which form a rectangular, foot-shaped inner cavity therebetween. do. The supply duct 14 (P), the discharge duct R and the operation duct 16 (A) are open in the cavity. The supply duct 14 and the discharge duct 15 have valve seats 17 and 18, respectively, and the inner ends 19 and 20 protrude into the cavities 13 in the housing 10. . Although the valve sights 17 and 18 have been cut out of the sphere or of an external shape that provides a complete sealing action despite the inclination angle on the connection between the valve members, the valve seat of the duct ends 19 and 20, i.e. The protrusion is grooved in a cylindrical shape.

두 개의 길다란 평판모양의 피에조크리스탈요소(21)과 (22)는 하우징(10)의 좌측에 있는 상부부분(11)과 하부부분(12)사이에 용접밀봉작용으로 죄여있다. 그 피에조크리스탈요소(21)과 (22)는 그 사이의 공간(23)에 의해 서로 평행하여 떨어져 있고, 요소의 자유단(24)와 (25)를 구비하고 있는데 그 자유단은 각각 상기동축으로 뻗은 상하돌출부(20)(19)즉 덕트단상의 밸브시이트(17)(18)사이에 위치하고 있는 한은 공동(13)으로 뻗어있다.Two elongated flat piezoelectric crystal elements 21 and 22 are clamped by a weld seal between the upper part 11 and the lower part 12 on the left side of the housing 10. The piezocrystal elements 21 and 22 are spaced in parallel to each other by a space 23 therebetween and have free ends 24 and 25 of the elements, the free ends of which are respectively coaxial. As long as it is located between the extended top and bottom protrusions 20 and 19, that is, the valve seats 17 and 18 on the duct end, it extends into the cavity 13.

원판모양의 휨밸브부재(26)는 하부밸브시이트(17)와 마주보며 하부 피에조크리스탈요소(21)에 배열되어 있으며, 맞은편에는 상부 피에조크리스탈(22)위에 밸브부재(27)가 있다. 그 시스템은 처음기계적 바이어스(bias)로 설계되어 있어 전기여자가 없고 즉 비작동상태에서 그 하부 밸브부재(26)는 맞은편 밸브시이트(17)을 공급덕트(14)가 있는 돌출부로 가깝게 하여 그 돌출부를 덮고, 반면에 상부 피에조크리스탈요소(22)는 대응하는 상부 밸브시이트(18)와 떨어지게 될 것이다. 기계적 바이어싱작용으로 설계자에 의해 적합한 피에조크리스탈요소(21) 또는 덕트돌출(19)길이가 제공될 수 있다.The disc-shaped flexure valve member 26 is arranged on the lower piezocrystal element 21 facing the lower valve seat 17, on the opposite side of which there is a valve member 27 on the upper piezocrystal 22. The system is initially designed with a mechanical bias so that there is no electric excitation, ie in its inactive state, the lower valve member 26 brings the opposite valve seat 17 close to the projection with the supply duct 14. The upper piezocrystal element 22 will be away from the corresponding upper valve seat 18 while covering the protrusion. The mechanical biasing action can provide a suitable piezocrystal element 21 or duct protrusion 19 length by the designer.

피에조크리스탈요소 반대분극층의 양측에는 상세히 도시되어 있지는 않으나 피에조-산화바이모포(bimorph)판(PXE판)형태로 한 실시예가 있고, 직류가 공급되는 전기터미날(28)있으나 도시되어 있지 않다. 제1도는 비전기여자 즉 중립 상태를 도시한 반면 제2도는 전기적으로 여자된 상태를 도시하고, 그 상하부의 피에조크리스탈요소(22)(21)에는 각각 직류가 공급되어 피에조크리스탈요소(21)(22)는 휘게되고 그 결과 하부 밸브부재(26)는 밸브시이트(17)와 떨어지고 하부 밸브부재(27)는 상부 밸브시이트(18)과 밀봉가능하게 가압된다. 제1도에 도시한 바와 같이 중립상태에서 방법을 보면 작동덕트(16)(유체를 밸브로 제어하도록 하는 덕트 또는 그와 유사한 장치)는 압축공기를 스위칭한 경우에는 그 공기가 배출덕트(15)를 경유해서 대기로 방출되게 하고, 수력작동의 경우에는 액체가 탱크로 다시 배수되도록 하기 위해 배출덕트(15)와 연결된다. 제2도에 도시한 바와 같이 여자된 상태에서 공급덕트(14)는 밸브에 의해 작동된 장치가 압력을 받으면 유체로 채어지게 되고, 배출덕트(15)는 닫혀지도록 하기 위해 작동덕트(16)와 연결된다.Although not shown in detail on both sides of the piezo-crystal element opposite polarization layer, there is an embodiment in the form of a piezo-bimorph oxide (PXE plate), and an electric terminal 28 supplied with direct current is not shown. FIG. 1 shows a non-exciter, that is, a neutral state, while FIG. 2 shows an electrically excited state, in which upper and lower piezocrystal elements 22 and 21 are supplied with direct current, respectively, so that piezocrystal elements 21 and 22 are provided. ) Is bent so that the lower valve member 26 is separated from the valve seat 17 and the lower valve member 27 is sealably pressurized with the upper valve seat 18. As shown in FIG. 1, in the neutral state, the operation duct 16 (a duct or similar device for controlling the fluid with a valve) has a discharge duct 15 when the compressed air is switched. It is connected to the discharge duct 15 in order to be discharged to the atmosphere via the air, and in the case of hydraulic operation, the liquid is drained back to the tank. As shown in FIG. 2, in the excited state, the supply duct 14 is filled with fluid when the device actuated by the valve is pressurized, and the discharge duct 15 is closed with the operation duct 16 so as to be closed. Connected.

상기한 바처럼 압력을 받으면 그 유체는 유체력과 제어시스템의 작동용으로 편리하게 사용될 것이다. 하우징(10)은 금속 같은 물질으로 제조되었으며 또한, 그 하우징은 실린더나 구와 같이 여러 형태로 설계가 가능하다. 이 밸브의 장점은 얇거나 두꺼운 벽으로된 하우징으로도 운용될 수 있다는 것이다.Under pressure, as described above, the fluid will be conveniently used for the operation of fluid forces and control systems. The housing 10 is made of a material such as metal, and the housing can be designed in various forms such as a cylinder or a sphere. The advantage of this valve is that it can also be operated with thin or thick walled housings.

제3도와 제4도에 도시된 본 발명의 첫 번째 작동실시예의 하우징(10)은 제1도와 제2도에 도시된 작동실시예와 같기 때문에 상세히 도시되진 않을 것이다. 하우징(10)의 상부와 하부부분(11)(12)사이에 단일 피에조크리스탈요소(30)가 죄여있다. 우측에 도시된 그 자유단(31)에서 피에조크리스탈요소(30)는 상하부면에 고착된 밸브부재(33)(32)를 각각 지지하고 있으며 그 상부 밸브부재(33)는 그 맞은편에 상부 밸브시이트(18)와 일렬로 되어 있고 하부 밸브부재(32)는 그 맞은편에 하부 밸브시이트(17)와 일렬로 되어 있다. 헬리컬압축스프링(34)의 하단이 상부 밸브부재(33)상의 소울더(shoulder)(35)와 접촉하도록 놓여있고, 반면에 스프링(34)의 상단부는 공동(13)을 형성하는 하방으로 접한표면을 지지한다. 헬리컬스프링(34)은 그 스프링(34)이 견고하게 위치하도록 덕트단 돌출부(20)주위에 배열된 상부단을 구비한다.The housing 10 of the first working embodiment of the invention shown in FIGS. 3 and 4 will not be shown in detail because it is the same as the working embodiment shown in FIGS. A single piezocrystal element 30 is clamped between the upper and lower parts 11, 12 of the housing 10. At the free end 31 shown on the right side, the piezo crystal element 30 supports the valve members 33 and 32 fixed to the upper and lower surfaces, respectively, and the upper valve member 33 is the upper valve on the opposite side. It is in line with the seat 18, and the lower valve member 32 is in line with the lower valve seat 17 on the opposite side. The lower end of the helical compression spring 34 is placed in contact with a shoulder 35 on the upper valve member 33, while the upper end of the spring 34 is abutted downwards forming a cavity 13. Support. The helical spring 34 has an upper end arranged around the duct end protrusion 20 so that the spring 34 is firmly positioned.

제3도에 도시한 바와 같이 비작동상태에서, 그 헬리컬스프링(34)은 작동덕트(16)가 배출덕트(15)와 연결되도록 저부 밸브부재(32)를 저부 밸브시이트(17)로 가압한다. 그러나 만일 피에조크리스탈요소(30)에 전기터미날(28)을 통해 직류가 공급되면 그 요소는 헬리컬스프링(34)의 과중한 힘으로 인해 상방으로 휘게 될 것이며 그 결과 밸브부재(33)는 상부 밸브시이트(18)와 접촉하여 닫혀질 것이다. 따라서 공급덕트(14)는 작동덕트(16)와 연결된다. 만일 그 피에조크리스탈요소(30)가 첫 번째 작동실시예에서처럼 밀봉 접촉하도록 밸브시이트(17)상의 중립상태로 기계적 바이어스가 되어 있다면 제3도와 제4도에 도시한 바와 같은 두 번째 작동실시예에서는 헬리컬스프링(34)없이도 만들어 질수 있으며 또는 기계적 바이어싱작용과 스피링력의 혼합이 가능하다. 따라서 제1도와 제2도에 도시된 바와같이 첫 번째 작동실시예의 경우에 피에조크리스탈요소(21)를 위해 기계적인 바이어싱작용으로 부가 또는 교대로 하는 판스프링이나 헬리컬스프링을 구비하는 것이 가능하다. 덕트(14)(15)(16)의 배열은 작동여하에 따라 변할 수 있다.In the non-operating state as shown in FIG. 3, the helical spring 34 presses the bottom valve member 32 to the bottom valve seat 17 such that the actuation duct 16 is connected to the discharge duct 15. . However, if a direct current is supplied to the piezo crystal element 30 through the electric terminal 28, the element will be bent upward due to the excessive force of the helical spring 34, and as a result, the valve member 33 is connected to the upper valve seat ( 18) will be closed in contact with it. The supply duct 14 is thus connected to the actuation duct 16. If the piezocrystal element 30 is mechanically biased in a neutral state on the valve seat 17 such that it is in sealing contact as in the first operating embodiment, the helical in the second operating embodiment as shown in FIGS. It can be made without the spring 34 or a combination of mechanical biasing and spring force is possible. It is thus possible to have leaf springs or helical springs added or alternating by mechanical biasing action for the piezocrystal element 21 in the case of the first operating embodiment, as shown in FIGS. 1 and 2. The arrangement of the ducts 14, 15 and 16 may vary depending on the operation.

상부 밸브부재(33)와 하부 밸브부재(32)는 피에조크리스탈요소(30)의 양면에 있는 밸브부재의 밀봉면에 의해 그들의 위치가 변하여 방향을 바꾼다.The upper valve member 33 and the lower valve member 32 change their positions by changing their positions by the sealing surfaces of the valve members on both sides of the piezo crystal element 30.

Claims (14)

유체제어용 압전작동 밸브에 있어서, 내부에 공동을 형성한 하우징과, 상기 하우징의 공동으로 돌출되도록 상기 하우징의 한단에 고착된 길이 방향의 피에조크리스탈 배열과, 상기 피에조크리스탈배열에 의해 생긴 밀봉 밸브부재와, 전기작동을 위한 피에조크리스탈 요소상의 터미널을 구성하고, 상기 밸브하우징은 공동으로 열려있는 공급과 배출 및 작동덕트를 구비하여서 공급 및 배출덕트가 서로 마주보며 밸브시이트단에 배열되어 있고, 상기 밸브부재는 상기 대향 밸브사이에 배열되어 있으며 교대로 상기 대향 밸브시이트를 밀봉가능하게 접촉시키기 위해 무부하덕트와 이송덕트의 역할로써 공급덕트 및 배출덕트를 경유해 각각 연결되고, 공동으로 열려있는 상기 작동덕트는 상기 피에조크리스탈 배열에 의해 유도된 밸브부재의 움직임에 따라서 공급덕트나 배출덕트나 연결하여 구성하는 것을 특징으로 하는 유체제어용 압전작동밸브.A piezoelectric valve for fluid control, comprising: a housing having a cavity formed therein, a longitudinal piezocrystal arrangement fixed to one end of the housing so as to protrude into the cavity of the housing, and a sealing valve member formed by the piezocrystal array; And a terminal on the piezo crystal element for electrical operation, wherein the valve housing has a supply and discharge and an operation duct which are open jointly so that the supply and discharge ducts face each other and are arranged at the valve seat end. Are arranged between the opposing valves and connected via the supply duct and the exhaust duct, respectively, in the role of a no-load duct and a transfer duct to sealably contact the opposing valve seats alternately. Depending on the movement of the valve member induced by the piezocrystal arrangement Document feed duct or a fluid control valve, characterized in that the piezoelectric operating constituting the exhaust duct or connection. 제2항에 있어서, 밸브시이트는 관처럼 서로 향하여 공동으로 뻗어있는 돌출부형태로 공급 및 배출덕트의 내부단부에 설치되는 것을 특징으로 하는 유체제어용 압전작동밸브.3. The piezoelectric valve for fluid control according to claim 2, wherein the valve seat is installed at the inner end of the supply and discharge ducts in the form of protrusions extending jointly toward each other like a pipe. 제2항에 있어서, 밸브시이트는 돌출부의 원추형외부면 형태로 이루어진 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 2, wherein the valve seat is formed in the form of a conical outer surface of the protrusion. 제2항에 있어서, 밸브시이트는 부분구형형태로 이루어진 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 2, wherein the valve seat has a partial spherical shape. 제1항에 있어서, 피에조크리스탈배열은 두 개의 압전요소를 구성되며 각 요소는 밸브부재를 구비하고 있어서 비작동상태에서 한 요소상의 밸브부재는 밸브시이트의 한단에 기계적 바이어스로 가압되고 반면에 작동상태에서 다른 요소의 밸브부재는 다른 밸브시이트를 지지하는 것을 특징으로 하는 유체제어용 압전작동밸브.2. The piezocrystal arrangement of claim 1, wherein the piezocrystal array comprises two piezoelectric elements, each element having a valve member such that in a non-operational state, the valve member on one element is pressurized with mechanical bias at one end of the valve seat while in an operating state. The valve member of the other element in the piezoelectric valve for fluid control, characterized in that for supporting the other valve seat. 제1항에 있어서, 피에조크리스탈배열은 각면에 한 밸브부재를 지지하는 단일 피에조크리스탈요소 형태이어서 비작동상태에서는 한 밸브부재가 기계의 바이어싱작용에 의해 한 밸브시이트에 지지되고 작동상태는 그 요소가 상대적으로 다른 밸브시이트로 다른 밸브부재를 가압하는 작용을 특징으로 하는 유체제어용 압전작동밸브.2. The piezocrystal arrangement according to claim 1, wherein the piezocrystal arrangement is in the form of a single piezocrystal element supporting one valve member on each side such that in a non-operating state, one valve member is supported on one valve sheet by a biasing action of the machine and the operating state thereof A piezoelectric actuating valve for fluid control, characterized in that the pressure acts on another valve member with a relatively different valve seat. 제6항에 있어서, 피에조크리스탈요소자체가 기계적 바이어스가 되는 것을 특징으로 하는 유체제어용 압전작동밸브.The fluid control piezoelectric valve according to claim 6, wherein the piezo crystal element itself is a mechanical bias. 제7항에 있어서, 비작동상태에서는 한 밸브부재가 밸브시이트와 접촉하는 위치로 피에조크리스탈요소를 지지하기 위하여 스프링을 구비하는 것을 특징으로 하는 유체제어용 압전작동밸브.8. A piezoelectric valve for fluid control as claimed in claim 7, wherein a spring is provided to support the piezocrystal element in a position in which the valve member is in contact with the valve seat in the inoperative state. 제8항에 있어서, 상기 스프링이 헬리컬스프링인 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 8, wherein the spring is a helical spring. 제9항에 있어서, 스프링은 밸브부재위의 소울더를 지지하는 한단을 구비한 것을 특징으로 하는 유체제어용 압전작동밸브.10. A piezoelectric valve for fluid control according to claim 9, wherein the spring has one end for supporting the sole on the valve member. 제1항에 있어서, 상기 하우징은 합성수지로 이루어진 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 1, wherein the housing is made of synthetic resin. 제1항에 있어서, 하우징은 직사각형의 프리즘(prism)형으로 되어 있는 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric actuating valve for fluid control according to claim 1, wherein the housing has a rectangular prism shape. 제1항에 있어서, 하우징은 피에조크리스탈배열의 한단을 조이는 두부분으로 구성된 것을 특징으로 하는 유체제어용 압전작동밸브.The fluid control piezoelectric valve according to claim 1, wherein the housing is composed of two parts which tighten one end of the piezo crystal array. 제1항에 있어서, 상기 피에조크리스탈배열은 적어도 1개 이상의 산화피에조바이모포판으로 된 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric actuating valve for fluid control according to claim 1, wherein the piezocrystal array is made of at least one piezoelectric bipo plate.
KR1019870002138A 1986-03-14 1987-03-11 Piezoelectrically operating valve for fluid control KR920007766B1 (en)

Applications Claiming Priority (3)

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DEP3608550.2 1986-03-14
DE19863608550 DE3608550A1 (en) 1986-03-14 1986-03-14 Piezoelectrically actuated valve
DE3608550.2 1986-03-14

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KR870009167A KR870009167A (en) 1987-10-23
KR920007766B1 true KR920007766B1 (en) 1992-09-17

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KR870009167A (en) 1987-10-23
DE3608550A1 (en) 1987-09-17

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