CN111365484A - Gas flow regulating device and mass flow controller - Google Patents
Gas flow regulating device and mass flow controller Download PDFInfo
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- CN111365484A CN111365484A CN201811589355.3A CN201811589355A CN111365484A CN 111365484 A CN111365484 A CN 111365484A CN 201811589355 A CN201811589355 A CN 201811589355A CN 111365484 A CN111365484 A CN 111365484A
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- 238000007789 sealing Methods 0.000 claims abstract description 63
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
Abstract
The invention provides a gas flow regulating device and a mass flow controller, wherein the gas flow regulating device comprises: a valve port member in which a first intake passage is provided; a resilient member comprising a channel sealing surface; and the driving assembly is used for driving the elastic piece to elastically deform or recover to the initial state so as to enable the channel sealing surface to be in contact sealing with or separated from the air outlet end of the first air inlet channel. The gas flow regulating device and the mass flow controller provided by the invention not only can simplify the structure and reduce the number of parts in contact with gas, but also can avoid faults caused by the failure of the reed.
Description
Technical Field
The invention relates to the field of flow control, in particular to a gas flow regulating device and a mass flow controller.
Background
Mass Flow Controllers (MFCs) are used to precisely measure and control the Mass Flow of a gas. They have important applications in scientific research and production in various fields such as semiconductor and integrated circuit processes, special material disciplines, chemical industry, petroleum industry, medicine, environmental protection, vacuum and the like.
The gas mass flow controller generally comprises a flow divider, a flow measuring device, a flow regulating device, a control circuit board and the like. The flow divider is used for dividing the gas into the flow measuring device and the internal channel of the flow divider according to a preset flow proportion; the gas flow regulating device is arranged on the gas channel and used for regulating the gas flow in the gas channel. The control circuit board is used for receiving the flow detection signal sent by the flow measuring device, calculating according to the flow detection signal, and controlling the gas flow regulating device to regulate the gas flow passing through the gas channel according to the calculation result until the gas flow is consistent with the set flow value.
The valve core part and the valve port part of the existing flow regulating device have complex structures, large manufacturing and processing difficulty and high rejection rate, and the number of parts in contact with gas is large, so that the parts are difficult to process and high in manufacturing cost due to special material requirements and surface treatment requirements on the parts in contact with the gas. Further, the conventional flow rate control device utilizes the elastic action of the two reeds to seal or separate the valve body member and the valve port member in contact with each other, but when the valve is opened,
When the flow is closed and regulated, the reed is frequently compressed, reset and deformed, fatigue failure is easy to occur, the failure rate of a valve component is high, and the normal use of the device is influenced.
Disclosure of Invention
The invention aims to solve at least one of the technical problems in the prior art, and provides a gas flow regulating device and a mass flow controller, which not only can simplify the structure and reduce the number of parts in contact with gas, but also can avoid the faults caused by the failure of a reed.
To achieve the object of the present invention, there is provided a gas flow rate regulating device comprising:
a valve port member in which a first intake passage is provided;
a resilient member comprising a channel sealing surface;
and the driving assembly is used for driving the elastic piece to elastically deform or recover to an initial state so as to enable the channel sealing surface to be in contact with and sealed with or separated from the air outlet end of the first air inlet channel.
Optionally, the elastic element comprises an elastic diaphragm, and the elastic diaphragm comprises a first concave part which is concave from a first surface of the elastic diaphragm, which is opposite to the valve port component, in a direction away from the valve port component;
when the elastic piece is elastically deformed, the central area of the bottom surface of the first concave part is used as the channel sealing surface and is in contact sealing with the air outlet end of the first air inlet channel; when the elastic member is in an initial state, a space defined by the first recess communicates with the first intake passage.
Optionally, the elastic diaphragm further includes a second recess recessed from a second surface of the elastic diaphragm facing away from the valve port component in a direction toward the valve port component, and the second recess causes a central region of a bottom surface of the first recess to protrude in a direction toward the valve port component relative to an annular edge region of the first recess.
Optionally, a first air outlet channel is further disposed in the valve port component, and an air inlet end of the first air outlet channel corresponds to the annular edge area of the first recess.
Optionally, the first surface comprises an annular sealing region surrounding the first recess and in sealing contact with a surface of the valve port component opposite the first surface.
Optionally, a first annular groove is arranged on the surface of the valve port component opposite to the elastic diaphragm, the first annular groove surrounds the first air inlet channel and is communicated with the space defined by the first recess; and a plurality of first through holes are arranged on the bottom surface of the first annular groove at intervals along the circumferential direction of the first annular groove, wherein one of the first through holes is used as the first air outlet channel.
Optionally, the gas flow regulating device further comprises a channel member, the channel member is located on one side of the valve port member away from the elastic diaphragm, and is overlapped with the valve port member, and a second inlet channel and a second outlet channel are arranged in the channel member, wherein the outlet end of the second inlet channel is butted with the inlet end of the first inlet channel; and the air inlet end of the second air outlet channel is in butt joint with the air outlet end of the first air outlet channel.
Optionally, a first groove is further provided on a surface of the valve port component opposite to the channel component, and a first annular gasket is provided in the first groove, the first annular gasket being in sealing contact with a bottom surface of the first groove and a surface of the channel component opposite to the valve port component, respectively;
and the space formed by the first annular sealing gasket is respectively communicated with each first through hole and each second air outlet channel.
Optionally, a second groove is further disposed on the bottom surface of the first groove, and a second annular gasket is disposed in the second groove, the second annular gasket being in sealing contact with the bottom surface of the second groove and the surface of the channel member opposite to the valve port member, respectively;
and the space formed by the second annular sealing gasket is communicated with the first air inlet channel and the second air inlet channel respectively.
Optionally, a third groove is provided on a surface of the channel member facing the valve port member, and both the valve port member and the elastic member are disposed in the third groove.
Optionally, the driving assembly includes:
a pusher member located on a side of the resilient member remote from the channel sealing surface;
the fixing pieces are arranged on one side of the push rod part away from the elastic piece at intervals;
a compression spring disposed between the push rod member and the fixing member;
one end of the connecting cavity penetrates through the fixing piece from one side far away from the compression spring and is connected with the push rod part; the connecting cavity and the fixing piece form a closed space, and piezoelectric materials are filled in the closed space; the extension amount of the piezoelectric material is adjusted by adjusting the voltage applied to the piezoelectric material, so that the displacement of the connecting cavity moving along the direction away from the push rod component along with the extension of the piezoelectric material is adjusted.
Optionally, the compression spring is in a compressed state, so that when the piezoelectric material is not electrified, under the elastic action of the compression spring, one end of the push rod part applies pressure to a position, corresponding to the channel sealing surface, of the elastic part, so that the channel sealing surface is in contact sealing with the air outlet end of the first air inlet channel.
Optionally, the drive assembly comprises a linear drive source.
As another technical solution, the present invention further provides a mass flow controller including the gas flow rate adjusting device provided by the present invention, further including:
an inflow interface;
the gas inlet end of the gas channel is connected with the inflow interface; the gas flow regulating device is arranged on the gas channel and used for regulating the gas flow in the gas channel;
and the outflow interface is connected with the air outlet end of the gas channel.
The invention has the following beneficial effects:
the gas flow regulating device provided by the invention can realize the contact sealing or separation of the channel sealing surface of the elastic piece and the gas outlet end of the first gas inlet channel by means of the elastic piece and the driving assembly, and can realize the closing or opening of the first gas inlet channel in the valve port component. The elastic piece can replace the existing valve core and reed, thereby simplifying the structure, reducing the number of parts in contact with gas and further reducing the processing and product cost. Meanwhile, the elastic piece is adopted to replace the reed, so that the fault caused by the failure of the reed can be avoided, and the reliability of the device can be improved.
The mass flow controller provided by the invention has the advantages that by adopting the gas flow regulating device provided by the invention, the structure can be simplified, the number of parts in contact with gas can be reduced, and the processing and product cost can be reduced; and the failure caused by the failure of the reed can be avoided, thereby improving the reliability of the device.
Drawings
FIG. 1 is a partial cross-sectional view of a prior art flow regulating device;
FIG. 2 is a cross-sectional view of a flow regulating device provided in accordance with an embodiment of the present invention;
FIG. 3 is an enlarged view of area I of FIG. 2;
FIG. 4 is a cross-sectional view of a resilient member in sealing contact with a valve port component as utilized in an embodiment of the present invention;
FIG. 5 is a cross-sectional view of a resilient member used in an embodiment of the present invention;
FIG. 6 is a cross-sectional view of a valve port component utilized in an embodiment of the present invention;
FIG. 7 is another cross-sectional view of a resilient member used in an embodiment of the present invention;
fig. 8 is a cross-sectional view of a mass flow controller provided in accordance with an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following describes the gas flow regulating device and the mass flow controller provided by the present invention in detail with reference to the accompanying drawings.
Fig. 1 is a partial sectional view of a conventional flow rate regulating device. Referring to fig. 1, the flow rate measuring device includes a push rod 1, a valve port member 2, a valve core member 4, a reed 5, a valve housing 6, and a passage member 7. Wherein, the valve core component 4 is elastically connected with the valve sleeve 6 through a reed 5; the valve port component 4 is arranged above the valve core component 4; the push rod 1 penetrates through the valve port component 2 and is in contact with the valve core component 4. When the driving device (not shown in the figure) is not electrified, the valve core component 4 is in sealing contact with the valve port component 2 under the action of the elastic force of the reed 5, the gap 3 between the sealing surfaces of the valve core component and the valve port component is 0, and the gas channel is closed. When the push rod 1 is driven by the driving device to descend, the push rod 1 pushes the valve core part 4 to move downwards for a certain distance, the valve core part 4 is separated from the valve port part 2, the gap 3 between the sealing surfaces of the valve core part and the valve port part is kept for a certain size, and at the moment, gas flows along the channel 1a → 2a → 3a → 4a → 5a → 6a in sequence.
In the flow regulating device, the closing or opening of the gas channel and the regulation of the flow are realized by using the push rod 1, the valve port component 2, the valve core component 4, the reed 5, the valve sleeve 6 and the channel component 7, and the flow regulating device has the advantages of complex structure, high manufacturing and processing difficulty and high rejection rate. Moreover, the valve port component 2, the valve core component 4 and the valve sleeve 6 are all in contact with gas, the area of a sealing surface is large, the requirements on the parallelism, the flatness and the surface roughness of the sealing surface are high, and the part processing difficulty and the manufacturing cost are high. In addition, the conventional flow rate regulating device utilizes the elastic action of the two reeds 5 to realize the contact sealing or separation of the valve core component 4 and the valve port component 2, but when the valve is opened, closed and the flow rate is regulated, the reeds 5 are frequently compressed, reset and deformed, and are easy to fatigue and fail, so that the failure rate of the valve component is high, and the normal use of the device is influenced.
In order to solve the above problem, referring to fig. 2 to 6 together, an embodiment of the present invention provides a flow rate regulating device, which includes a driving assembly 1, an elastic element 2, and a valve port component 3, wherein a first air inlet channel 32 is disposed in the valve port component 3. Specifically, the first air intake passage 32 is a through hole that penetrates the valve port member 3 in the vertical direction. In practical application, the aperture of the through hole can be designed according to the actual flow demand.
The resilient element 2 comprises a channel sealing surface 21. The driving assembly 1 is used for driving the elastic element 2 to elastically deform or restore to an initial state so as to enable the channel sealing surface 21 to be in contact sealing with or separated from the air outlet end of the first air inlet channel 32, so that the first air inlet channel 32 can be closed or opened.
The elastic element 2 can replace the existing valve core and reed, thereby simplifying the structure, reducing the number of parts contacting with gas and further reducing the processing and product cost. Meanwhile, the elastic piece 2 is adopted to replace a reed, so that the fault caused by the failure of the reed can be avoided, and the reliability of the device can be improved.
In the present embodiment, as shown in fig. 5, the elastic member 2 includes an elastic diaphragm including a first recess 20 recessed from a first surface 23 of the elastic diaphragm, which is opposite to the valve port member 3, in a direction away from the valve port member 3; and a second recess 22 recessed from a second surface of the elastic diaphragm facing away from the valve port member 3 in a direction toward the valve port member 3, the second recess 22 having a central region 201 of a bottom surface of the first recess 20 (i.e., a central region of the first surface 23) projecting toward the valve port member 3 with respect to an annular edge region 202 of the first recess 20.
The central region 201 of the bottom surface of the first recess 20 serves as the channel sealing surface 21. When the elastic member 2 is elastically deformed (as shown in the state of the elastic member 2 in fig. 4), the channel sealing surface 21 contacts with the second surface 31 of the valve port member 3 opposite to the elastic member 2, so that contact sealing with the air outlet end of the first air inlet channel 32 is realized, and the first air inlet channel 32 is blocked by the elastic member 2. When the elastic member 2 is in the initial state (the state of the elastic member 2 as shown in fig. 3), the channel sealing surface 21 is separated from the second surface 31 of the valve port member 3 opposite to the elastic member 2, so as to be separated from the air outlet end of the first air inlet channel 32, thereby communicating the space a defined by the first recess 20 with the first air inlet channel 32.
In this embodiment, the resilient diaphragm overlies the valve port member 3 and its first surface 23 includes an annular sealing region that surrounds the first recess 20 and is in sealing contact with the second surface 31. Meanwhile, the elastic diaphragm is driven by the driving assembly 1 to deform or recover to the initial state, so that the first air inlet channel 32 can be communicated or isolated with or from the space a defined by the first concave part 20. The elastic diaphragm can replace the existing valve core and reed, realizes two functions of sealing and on-off, thereby simplifying the structure, reducing the number of parts in contact with gas and further reducing the processing and product cost. Meanwhile, the elastic diaphragm replaces the reed, so that the fault caused by the failure of the reed can be avoided, and the reliability of the device can be improved.
In addition, by providing the second recess 22, on the one hand, contact of the driving part of the driving assembly 1 with the elastic membrane is facilitated; on the other hand, it is possible to make the central region 201 of the bottom face of the first recess 20 convex with respect to its annular edge region 202, i.e. to make the channel sealing surface 21 convex with respect to its annular edge region 202, so as to facilitate the contact sealing of the channel sealing surface 21 with the outlet end of the first inlet channel 32.
In the present embodiment, a first air outlet channel 33 is further provided in the valve port member 3, and an air inlet end of the first air outlet channel 33 corresponds to the annular edge region 22 of the first recess, so that the first air outlet channel 33 can communicate with the space a defined by the first recess 20.
When the elastic member 2 is elastically deformed, the channel sealing surface 21 is in contact with and seals the air outlet end of the first air inlet channel 32, and the space a defined by the first air inlet channel 32 and the first concave portion 20 is isolated by the elastic member 2, so that the first air inlet channel 32 is not communicated with the first air outlet channel 33. When the resilient member is in the initial state, the channel sealing surface 21 is separated from the air outlet end of the first air inlet channel 32, and the first air inlet channel 32 is communicated with the space a defined by the first concave portion 20, so that the first air inlet channel 32 is communicated with the first air outlet channel 33.
In the present embodiment, as shown in fig. 6, a first annular groove 34 is provided on the second surface 31 of the valve port member 3 opposite to the elastic diaphragm 2, and the first annular groove 34 surrounds the first air intake passage 32 and communicates with the space a defined by the first recess 20. By means of the first annular groove 34, the communication area of the first air outlet channel 33 and the space a defined by the first concave portion 20 can be increased, thereby improving the smoothness of the air flow.
Also, a plurality of first through holes 331 provided at intervals in the circumferential direction of the first annular groove 34 are provided on the bottom surface of the first annular groove 34, one of the first through holes 331 serving as the above-described first air outlet passage 33. Thus, when the elastic member is in the initial state, the gas flows through the first air inlet passage 32, the space a defined by the first recess 20, the first annular groove 34, and each of the first through holes 331 in this order, and finally flows out of the valve port member 3 through one of the first through holes 331.
In the present embodiment, as shown in fig. 4, the gas flow rate regulating device further includes a channel member 4, the channel member 4 is located on the side of the valve port member 3 away from the elastic diaphragm 2, and is overlapped with the valve port member 3, and a second gas inlet channel 42 and a second gas outlet channel 43 are provided in the channel member 4, wherein the gas outlet end of the second gas inlet channel 42 is butted against the gas inlet end of the first gas inlet channel 32; the inlet end of second outlet channel 43 is butted against the outlet end of first outlet channel 33.
In the present embodiment, as shown in fig. 3, 4, and 6, a first groove 35 is further provided on the surface of the valve port member 3 opposite to the channel member 4, and a first annular seal gasket 5 is provided in the first groove 35, the first annular seal gasket 5 being in sealing contact with the bottom surface 351 of the first groove 35 and the surface of the channel member 4 opposite to the valve port member 3, respectively; the space 51 defined by the first annular packing 5 communicates with each of the first through holes 331 and the second outlet passage 43, respectively. The gap between the valve port member 3 and the channel member 4 can be sealed by the first annular seal 5. Meanwhile, the space 51 formed by the first annular seal 5 can still ensure that each first through hole 331 is communicated with the second air outlet channel 43.
In the present embodiment, a second groove 36 is further provided in the bottom surface 351 of the first groove 35, and a second annular seal gasket 6 is provided in the second groove 36, the second annular seal gasket 6 being in sealing contact with the bottom surface 361 of the second groove 36 and the surface of the passage member 4 opposite to the valve port member 3, respectively; the space 61 defined by the second annular seal 6 communicates with the first intake passage 32 and the second intake passage 42, respectively. By means of the second annular seal 6, the joint of the inlet end of the first inlet channel 32 and the outlet end of the second inlet channel 42 can be sealed, so that gas leakage from the joint can be avoided. At the same time, the space 51 defined by the first annular seal 5 can still ensure communication between the first intake passage 32 and the second intake passage 42.
In the present embodiment, as shown in fig. 3, a third groove 41 is provided on the surface of the channel member 4 facing the valve port member 3, and the valve port member 3 and the elastic member 2 are both provided in this third groove 41. By means of the third groove 41, the valve port member 3 and the channel member 4 can be nested, thereby facilitating the sealing of the two.
In the present embodiment, the driving assembly is a piezoelectric ceramic driving structure, which has the advantages of large output driving force (typically hundreds or even thousands of newtons), high control accuracy, compact structure, short response time, small electromagnetic pollution, low power consumption, etc. as shown in fig. 2, the driving assembly includes a push rod member 17, a fixed member 13, a compression spring 14 and a connecting cavity 11, wherein the push rod member 17 is located on the side of the elastic member 2 away from the channel sealing surface 21 (i.e., the upper side of the elastic member 2), the fixed member 13 is disposed at intervals on the side of the push rod member 17 away from the elastic member 2 (the upper side of the push rod member 17), and is fixed to an annular fixed seat 16 by screws, the annular fixed seat 16 is fixed to the channel member 4 and is disposed around the push rod member 17 and the compression spring 14, the compression spring 14 is disposed between the fixed member 13 and the push rod member 17, the connecting cavity 11 is composed of a connecting sleeve and a cover plate 15 disposed at the upper end of the connecting sleeve, the connecting sleeve is located on the side of the fixed member 13 away from the compression spring 14, the connecting sleeve penetrates the fixed member 13 and is connected to the push rod member 17, the connecting sleeve 15 and the connecting sleeve is filled with a piezoelectric ceramic material 3514, the piezoelectric ceramic material, so as to form a closed piezoelectric ceramic material, when the piezoelectric ceramic material, the piezoelectric ceramic material 111 is moved to the piezoelectric ceramic sealing surface 21, the piezoelectric ceramic material is moved to adjust the piezoelectric ceramic material, thereby the piezoelectric ceramic material, the piezoelectric ceramic sealing surface 21, the piezoelectric ceramic material, and the piezoelectric ceramic material, the piezoelectric ceramic material is moved to adjust the piezoelectric ceramic material, so as shown in the piezoelectric ceramic material.
Optionally, the compression spring 14 is always in a compressed state, so that when the piezoelectric material 111 is not energized, under the action of the elastic force of the compression spring 14, one end of the push rod member 17 can apply pressure to a position corresponding to the channel sealing surface 21 of the elastic member 2, so that the channel sealing surface 21 is in contact sealing with the air outlet end of the first air inlet channel 32, thereby implementing a normally-closed function.
It should be noted that in the present embodiment, the driving assembly uses a piezoelectric ceramic driving structure to drive the push rod member 17 to move in a direction approaching or moving away from the first air intake passage 32, but the present invention is not limited to this, and in practical applications, a linear driving source may also be used to drive the push rod member 17 to move in a direction approaching or moving away from the first air intake passage 91. The linear driving source is, for example, a linear motor, a voice coil motor, an electric push rod, or the like.
As another technical solution, an embodiment of the present invention further provides a mass flow controller, which includes the gas flow regulating device provided in the embodiment of the present invention.
In the present embodiment, as shown in fig. 8, the mass flow controller further includes a housing 101, a gas flow regulating device 102, a gas passage 103, an inflow interface 104, a flow measuring device 105, a gas passage 103, and an outflow interface 107, wherein an inlet end of the gas passage 103 is connected to the inflow interface 104; a gas flow rate adjusting device 102 is provided on the gas passage 103 for adjusting the gas flow rate in the gas passage 103; the outflow interface 107 is connected to the outlet end of the gas channel 103.
In this embodiment, the mass flow controller further includes a control circuit board 106 for receiving the flow detection signal sent from the flow measurement device 102, performing a difference calculation between the flow detection signal and the set flow value, and controlling the gas flow regulation device 102 to regulate the gas flow passing through the gas passage 103 according to the calculation result until the gas flow is consistent with the set flow value. Thus, the gas mass flow can be always set to the set flow value. Optionally, the control circuit board 106 may also provide a digital communication function, and may perform data interaction with a computer, so as to implement remote control of the computer.
The mass flow controller provided by the embodiment of the invention has the advantages that by adopting the gas flow regulating device provided by the embodiment of the invention, the structure can be simplified, the number of parts in contact with gas can be reduced, and the processing and product cost can be reduced; and the failure caused by the failure of the reed can be avoided, thereby improving the reliability of the device.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (14)
1. A gas flow regulating device, comprising:
a valve port member in which a first intake passage is provided;
a resilient member comprising a channel sealing surface;
and the driving assembly is used for driving the elastic piece to elastically deform or recover to an initial state so as to enable the channel sealing surface to be in contact with and sealed with or separated from the air outlet end of the first air inlet channel.
2. The gas flow regulating device according to claim 1, wherein the elastic member comprises an elastic diaphragm including a first recess recessed from a first surface of the elastic diaphragm opposite the valve port member in a direction away from the valve port member;
when the elastic piece is elastically deformed, the central area of the bottom surface of the first concave part is used as the channel sealing surface and is in contact sealing with the air outlet end of the first air inlet channel; when the elastic member is in an initial state, a space defined by the first recess communicates with the first intake passage.
3. The gas flow regulating device according to claim 2, wherein the elastic diaphragm further comprises a second recess recessed from a second surface of the elastic diaphragm facing away from the valve port member in a direction toward the valve port member, the second recess having a central region of a bottom surface of the first recess projecting relative to an annular edge region of the first recess in a direction toward the valve port member.
4. The gas flow regulating device according to claim 2 or 3, wherein a first gas outlet channel is further provided in the valve port member, and a gas inlet end of the first gas outlet channel corresponds to an annular edge region of the first recess.
5. The gas flow regulating device of claim 2 or 3, wherein the first surface comprises an annular sealing region surrounding the first recess and in sealing contact with a surface of the valve port component opposite the first surface.
6. The gas flow regulating device according to claim 4, wherein a first annular groove is provided on a surface of the valve port member opposite to the elastic diaphragm, the first annular groove surrounding the first air intake passage and communicating with a space defined by the first recess; and a plurality of first through holes are arranged on the bottom surface of the first annular groove at intervals along the circumferential direction of the first annular groove, wherein one of the first through holes is used as the first air outlet channel.
7. The gas flow regulating device according to claim 6, further comprising a channel member that is located on a side of the valve port member away from the elastic diaphragm and overlaps the valve port member, and in which a second inlet channel and a second outlet channel are provided, wherein an outlet end of the second inlet channel is butted against an inlet end of the first inlet channel; and the air inlet end of the second air outlet channel is in butt joint with the air outlet end of the first air outlet channel.
8. The gas flow regulating device according to claim 7, wherein a first groove is further provided on a surface of the valve port component opposite to the channel component, and a first annular gasket is provided in the first groove, the first annular gasket being in sealing contact with a bottom surface of the first groove and a surface of the channel component opposite to the valve port component, respectively;
and the space formed by the first annular sealing gasket is respectively communicated with each first through hole and each second air outlet channel.
9. The gas flow regulating device according to claim 8, wherein a second groove is further provided in a bottom surface of the first groove, and a second annular gasket is provided in the second groove, the second annular gasket being in sealing contact with a bottom surface of the second groove and a surface of the channel member opposite the valve port member, respectively;
and the space formed by the second annular sealing gasket is communicated with the first air inlet channel and the second air inlet channel respectively.
10. The gas flow regulating device according to claim 7, wherein a third groove is provided on a surface of the channel member facing the valve port member, and both the valve port member and the elastic member are provided in the third groove.
11. The gas flow regulating device of claim 1, wherein the drive assembly comprises:
a pusher member located on a side of the resilient member remote from the channel sealing surface;
the fixing pieces are arranged on one side of the push rod part away from the elastic piece at intervals;
a compression spring disposed between the push rod member and the fixing member;
one end of the connecting cavity penetrates through the fixing piece from one side far away from the compression spring and is connected with the push rod part; the connecting cavity and the fixing piece form a closed space, and piezoelectric materials are filled in the closed space; the extension amount of the piezoelectric material is adjusted by adjusting the voltage applied to the piezoelectric material, so that the displacement of the connecting cavity moving along the direction away from the push rod component along with the extension of the piezoelectric material is adjusted.
12. The gas flow regulating device according to claim 11, wherein the compression spring is in a compressed state so that, when the piezoelectric material is not energized, one end of the push rod member is pressed toward a position of the elastic member corresponding to the passage sealing surface by the elastic force of the compression spring to seal the passage sealing surface in contact with the gas outlet end of the first gas inlet passage.
13. The gas flow regulating device of claim 1, wherein the drive assembly comprises a linear drive source.
14. A mass flow controller comprising the gas flow regulating device of any one of claims 1 to 13, further comprising:
an inflow interface;
the gas inlet end of the gas channel is connected with the inflow interface; the gas flow regulating device is arranged on the gas channel and used for regulating the gas flow in the gas channel;
and the outflow interface is connected with the air outlet end of the gas channel.
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| CN201811589355.3A CN111365484A (en) | 2018-12-25 | 2018-12-25 | Gas flow regulating device and mass flow controller |
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| CN201811589355.3A CN111365484A (en) | 2018-12-25 | 2018-12-25 | Gas flow regulating device and mass flow controller |
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| CN112965537A (en) * | 2021-01-29 | 2021-06-15 | 中汽创智科技有限公司 | Control device and system |
| CN113351387A (en) * | 2021-07-01 | 2021-09-07 | 兰州空间技术物理研究所 | Integrated micro-nozzle for gas mass flow controller |
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| CN113700916A (en) * | 2021-08-27 | 2021-11-26 | 北京七星华创流量计有限公司 | Flow controller |
| CN113970006A (en) * | 2021-10-29 | 2022-01-25 | 北京七星华创流量计有限公司 | Mass flow controller and flow regulating mechanism thereof |
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