JPS6275180A - Metallic diaphragm valve - Google Patents

Abstract

PURPOSE:To reduce the inner volume of a valve chamber by providing a metallic diaphragm with a valve portion facing and capable of freely contacting or parting from a valve seat and with a projection connected to a valve shaft. CONSTITUTION:A metallic diaphragm 28 installed in a body 21 to face a valve seat 24 is provided in the proximity of its center with a valve portion 31 facing and capable of freely contacting or parting from the valve seat 24. On the back side of the metallic diaphragm 28 or opposite to the valve portion 31 is arranged a projection 32. As the valve portion 31 is arranged on the metallic diaphragm 28, there are no needs for the valve stem and accordingly springs and guides, which makes it possible to reduce the inner volume of the valve chamber drastically.

Description

[Detailed description of the invention] [Field of application of the invention] The present invention relates to metal diaphragm valves.

[Conventional technology]

In lines that handle ultra-high purity fluids, metal diaphragm valves are increasingly being used in place of metal vessel seal valves because there is less fluid retention inside the valve.

However, the conventional metal diaphragm valve is constructed as shown in FIG. As the central part of the metal diaphragm 5 is pushed down and the valve stem 6 is pushed down against the spring 7, the valve part 8 provided at its lower end is pressed against the valve qro of the valve box 9 and the valve is closed. It is now possible to Further, when the knob 1 is rotated in the opposite direction to the above-mentioned direction, the valve shaft 3 is raised, and the repulsive force of the spring 7 pushes up the valve stem 6, metal diaphragm 5, actuator button 4, etc., and the valve part 8 The valve is opened by moving away from the seat IO.

The spring 7 is provided to raise the valve stem 6 when the pressure force applied to the metal diaphragm 5 by the valve stem 3 is released, and to hold the valve stem 6 in the correct posture in cooperation with the guide °11. There is.

[Problem that the invention seeks to solve]

In the conventional metal diaphragm valve configured as described above, not only the internal volume of the valve chamber 12 is large, but also the stem 6, the spring 7, the guide 11, and other members are accommodated, so that the fluid in the valve body 9 is reduced. Since the stagnation portion is large and the flow of fluid within the valve chamber 12 is obstructed, fluid replacement performance is poor. Further, since the contact area with the fluid of the valve stem 6, spring 7, guide 11, valve chamber I2, etc. is large, the amount of gas released into the fluid from these metal surfaces tends to be large. Furthermore, since metal parts such as the metal diaphragm 5 and the valve stem 6, the valve stem 6 and the spring 7, and the spring 7 and the inner surface of the valve chamber 12 are in contact with each other, fine metal particles generated by these sliding contacts may enter the fluid. These problems include problems such as fluid leakage or adhesion between contact parts, which impairs replacement performance.
This is a particular problem in the biochemical field.

The present invention has been made under the above circumstances, and its purpose is to minimize the internal volume of the valve chamber and minimize the surface area of the metal parts accommodated therein. The metal diaphragm valve is particularly suitable for lines handling ultra-high purity fluids, as it can effectively prevent the release of metal particles, etc., significantly improve fluid displacement, and also reduce costs. It is about providing.

[Means for solving problems]

The present invention is characterized by comprising a valve part provided on a metal diaphragm so as to be able to move toward and away from a valve seat, and a valve shaft connected to the Metafre diaphragm so as to be able to drive the valve part back and forth. It is something to do.

〔Effect of the invention〕

The present invention includes a valve section provided on a metal diaphragm as described above, and a valve shaft connected to the metal diaphragm so that the valve section can be reciprocated. Since the valve is reciprocally driven only by external force applied through the valve, the spring 7 as in the conventional example described above is not required, the valve stem 6 and the guide I1, etc. are also not required, and the internal volume of the valve chamber is extremely small. It will be a good thing. That is, the internal volume of the valve chamber and the contact area between the metal parts inside the valve chamber can be significantly reduced, so that the fluid displacement performance is significantly improved.

In addition, as the surface area of the Osmanthus parts that come into contact with the fluid decreases, the amount of released gas is reduced by 1 Illi K, and the sliding contact between metal parts is also eliminated, making it possible to effectively prevent the generation of metal particles. . Therefore, it is possible to provide a metal diaphragm valve that is not only particularly suitable for lines handling ultra-high purity fluids, but also has a simple structure, low cost, and can perform opening/closing operations reliably.

[Case of actual restraint of invention]

Hereinafter, the present invention will be described with reference to an illustrated embodiment. 1st
In the figure, a fluid flow path 22 is formed in the main body 2I of the valve box 20. A valve port 23 provided in the middle of the flow path 22
A valve seat 24 is provided around the valve. The sleeve 25 fitted into the main body 2I is pressed in the axial direction by a fastener 26, and a cylindrical member 27 is screwed onto the outer end.

The metal diaphragm 28, which is disposed inside the main body 21 and facing the valve 24, has its peripheral edge sandwiched between the sleeve 25 and a sealing member (for example, a metal gasket or a metal C-ring) 29. Bento box 20
The valve chamber 30 is supported in a fluid-tight manner by the valve body 20.
is formed. The metal diaphragm 28 is provided with a valve portion 31 located near the center thereof and facing the valve V@24 so as to be able to freely move toward and away from the valve V@24 (in the illustrated example, the plate surface of the metal tire phragm 28 is connected to the valve portion 3I). A protrusion 32 is provided on the back side of the metal diaphragm 28 facing away from the valve portion 3I.

The valve shaft 33 supported by the valve box 20 has an inner end connected to the metal diaphragm 28 so as to be able to reciprocate the valve part 31 in the axial direction, and a handle 34 is attached to the outer end. ing.

In the illustrated example, the valve stem 33 is provided with a collar portion 35,
This collar portion 35 is connected to the stepped portion of the sleeve 25 and the cylindrical member 2.
7, the valve shaft 33 is prevented from being displaced in the axial direction.

Further, the inner end of the valve shaft 33 is connected to the metal diaphragm 28.
By rotating the valve shaft 33 through the handle 34, the center portion of the metal diaphragm 28 is reciprocated in the axial direction together with the valve portion 31, and the valve port 23 is opened and closed. It has become so.

The material of the metal diaphragm 28, the outer diameter and thickness of the plate-like portion, etc. are appropriately selected depending on the properties, flow rate, pressure, etc. of the fluid used. Further, when manufacturing the same, the plate-like portion and the protrusion 32 may be integrally formed from the same material, or they may be formed separately and then bonded to each other using an adhesive or the like. If necessary, the plate-shaped portion may be formed into a bowl shape or the like.

According to the above configuration, the valve portion 3z is the metal diaphragm 28.
Since the valve stem 6 in the above conventional example is provided with
Since there is no need for the spring 7, the guide 11, etc., the internal volume of the valve chamber 30 can be significantly reduced.

For example, in the case of a valve of the same size with a diameter of 4 inches, the internal volume of the valve in the conventional example is 2.6 mA, whereas in the present invention, the volume can be reduced by about 42% to 1.5 ml.

As a result, the mutual contact area of the metal parts has been reduced, making it possible to significantly improve fluid displacement.

In addition, the surface area of the metal part that comes into contact with the fluid is significantly reduced, and in the case of the above-mentioned signature inch diameter, the conventional example had a diameter of 43d, but in the present invention, it can be reduced by about 72d to 12d. It was possible to significantly reduce the amount of gas released from the surface into the fluid. Furthermore, since there are no sliding contact parts between metal parts, there is no generation of metal particles due to wear.

Moreover, since there are no parts that require precision finishing and precision cleaning, such as the valve stem 6, spring 7, guide IX, etc. in the conventional example, not only can costs be greatly reduced, but the valve can also be accessed from the outside via the valve stem 33. Since the portion 3Z can be directly reciprocated, the reliability of the opening and closing operation can be improved compared to the conventional example in which the double movement depends on the spring 7.

Note that the present invention is not limited to the above embodiments. For example, instead of directly using the vicinity of the central part of the plate surface of the metal diaphragm 28 as the valve part 28 as described above, as illustrated in FIGS. It may also be provided so as to protrude. At this time, if it is not preferable to use an adhesive, the valve portion 40 and the metal diaphragm 28 may be joined via a suitable bottle 4I. However, the hole 42 into which the bottle 4I is press-fitted and the screw hole 43 are designed so that they do not communicate with each other, as shown in FIG. 3, and this prevents even the slightest leak from occurring. There is. Further, it is preferable to fill the gap between the metal diaphragm 28 and the valve element 40, the gap between the valve part 28 and the bottle holder hole 42, etc. using a synthetic resin coating agent similar to that of the valve part 4o.

If such a valve part 40 is used, the sealing characteristics with the valve part 24 can be improved. Furthermore, instead of providing the valve part 40 protruding from the metal diaphragm 28, a synthetic resin valve part 50 may be provided on the main body 21 side as illustrated in FIG. The sealing characteristics may be improved in either case.

Furthermore, if it is necessary to improve the pressure resistance characteristics of the metal diaphragm, a desired number of sub-metal diaphragms 6I... are added to the back side of the main metal diaphragm 60, as illustrated in FIGS. 5 and 6. It may be arranged in a polymerized manner.

In such a case, a protrusion 32 for connecting with the valve shaft 33 is provided on the front side of the main metal diaphragm 42,
This protrusion 32 is provided with a straddle 40 for the valve portion 3I.

Further, instead of the above-mentioned metal gasket or metal C-ring, the sealing member 29 is provided on the metal diaphragm 28 side and on the main body 2! as illustrated in FIG.
It may be 70 or the like that has an edge portion that digs into the side. When using such a device, in order to prevent fatigue failure of the metal diaphragm 28, the I? It is preferable to form a thick portion 7I on the i1 edge.

Furthermore, instead of the valve shaft 33 being prevented from being displaced in the axial direction with respect to the valve body 20VC as described above and being rotatable, and being connected to the metal diaphragm 28 with a wooden joint,
For example, the valve body 20 may be provided so as to be freely displaceable in the axial direction, while the metal diaphragm 28 may be provided so as to be prevented from relative displacement in the axial direction.

In this latter case, GO/J is used for reciprocating the valve stem.
Cams, links or other suitable means may be used.

It goes without saying that other than the above, various modifications and applications can be made within the scope of the gist of the present invention.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing one embodiment of the present invention, FIGS. 2 to 7 are partial sectional views showing different modifications of the main parts on the same side, and FIG. 8 is a sectional view showing a conventional example. be. 20... Valve box, 2I... Main body, 24.41... Valve seat, 2B, 42.43... Metal diaphragm, 29
．． 44... Seal member, 31.40... Valve part, 32
...Protrusion, 33...Valve stem. Applicant's agent Patent attorney Takehiko Suzue Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 I Figure 6 Figure 7 Figure 8 Procedural amendments Showa 91.1 or 1 Completion date

Claims (1)

[Claims] A valve body having a valve seat and a metal diaphragm facing the valve seat and having a peripheral edge fluid-tightly supported by the valve body, the metal diaphragm facing the valve seat so as to be movable toward and away from the valve seat. A metal diaphragm valve comprising: a valve portion provided on the metal diaphragm; and a valve shaft connected to the metal diaphragm so as to be able to reciprocate the valve portion.