KR870009167A - Piezo-actuated Valves for Fluid Control - Google Patents

Piezo-actuated Valves for Fluid Control Download PDF

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Publication number
KR870009167A
KR870009167A KR870002138A KR870002138A KR870009167A KR 870009167 A KR870009167 A KR 870009167A KR 870002138 A KR870002138 A KR 870002138A KR 870002138 A KR870002138 A KR 870002138A KR 870009167 A KR870009167 A KR 870009167A
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KR
South Korea
Prior art keywords
valve
fluid control
piezoelectric
valve member
piezocrystal
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Application number
KR870002138A
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Korean (ko)
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KR920007766B1 (en
Inventor
슈톨 쿠르트
케트너 지그프리트
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로타르 뮐러
페스토 카게
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Publication of KR870009167A publication Critical patent/KR870009167A/en
Application granted granted Critical
Publication of KR920007766B1 publication Critical patent/KR920007766B1/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/04Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
    • F16K11/044Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves with movable valve members positioned between valve seats
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/04Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/004Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005Piezoelectric benders
    • F16K31/006Piezoelectric benders having a free end

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

내용 없음No content

Description

유체제어용 압전작동 밸브Piezo-actuated Valves for Fluid Control

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도와 제2도는 두 개의 피에조 크리스탈 요소를 이용한 본 발명의 제1작동 실시예의 도시도.1 and 2 illustrate a first operating embodiment of the present invention using two piezo crystal elements.

제3도와 제4도는 단일피에조 크리스탈 요소를 이용한 본 발명의 제2작동 실시예의 도시도.3 and 4 illustrate a second operating embodiment of the present invention using a single piezo crystal element.

Claims (14)

유체제어용 압전작동 밸브에 있어서, 내부에 공동을 형성한 하우징과 ,상기 하우징의 공동으로 돌출되도록 상기 하우징의 한단에 고착된 길이 방향의 피에조크리스탈 배열과, 상기 피에조크리스탈배열에 의해 생긴 밀봉 밸브 부재와, 전기작동을 위한 피에조크리스탈 요소상의 터미널을 구성하고,A piezoelectric valve for fluid control, comprising: a housing having a cavity formed therein; a longitudinal piezocrystal arrangement fixed to one end of the housing to protrude into a cavity of the housing; and a sealing valve member formed by the piezocrystal array; , Constitute a terminal on the piezocrystal element for electrical operation, 상기 밸브하우징은 공동으로 열려 있는 공급과 배출 및 작동 덕트를 구비하여서 공급 및 배출덕트가 서로 마주보며 밸브 시이트단에 배열되어 있고, 상기 밸브부재는 상기 대향 밸브사이에 배열되어 있으며 교대로 상기 대향밸브시이트를 밀봉 가능하게 접촉시키기 위해 무부하덕트와 이송덕트의 역할로써 공급덕트 및 배출덕트를 경유해 각각 연결되고, 공동으로 열려있는 상기 작동덕트는 상기 피에조크리스탈 배열에 의해 유도된 밸브 부재의 움직임에 따라서 공급덕트나 배출덕트와 연결하여 구성하는 것을 특징으로 하는 유체제어용 압전작동밸브.The valve housing has a jointly open supply and discharge and actuation duct so that the supply and discharge ducts are arranged at the valve seat end facing each other, and the valve member is arranged between the opposing valves and alternately the opposing valves. The actuating ducts, which are connected via the supply duct and the discharge duct, respectively, in the role of the no-load duct and the transfer duct to sealably contact the sheet, are opened in accordance with the movement of the valve member induced by the piezocrystal arrangement. Piezoelectric actuating valve for fluid control, characterized in that it is configured in connection with the supply duct or discharge duct. 제1항에 있어서, 밸브시이트는 관처럼 서로 향하여 공동으로 뻗어있는 돌출부 형태로 공급 및 배출덕트의 내부단부에 설치되는 것을 특징으로 하는 유체제어용 압전작동밸브.The fluid control piezoelectric valve according to claim 1, wherein the valve seat is installed at the inner end of the supply and discharge ducts in the form of protrusions extending jointly toward each other like a pipe. 제2항에 있어서, 밸브시이트는 돌출부의 원주형 외부면형태로 이루어진 것을 특징으로 하는 유체제어용 압전작동밸브.The fluid control piezoelectric valve according to claim 2, wherein the valve seat is formed in a cylindrical outer surface of the protrusion. 제2항에 있어서, 밸브시이트는 부분구형형태로 이루어진 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 2, wherein the valve seat has a partial spherical shape. 제1항에 있어서, 피에조 크리스탈배열은 두 개의 압전요소로 구성되며 각 요소는 밸브부재를 구비하고 있어서 비작동상태에서 한 요소상의 밸브부재는 밸브시이트의 한단에 기계적 바이어스로 가압되고 반면에 작동상태에서 다른 요소의 밸브부재는 다른 밸브시이트를 지지하는 것을 특징으로 하는 유체제어용 압전작동밸브.2. The piezo crystal array of claim 1, wherein the piezo crystal array consists of two piezoelectric elements, each element having a valve member such that in an inoperative state the valve member on one element is pressurized with mechanical bias at one end of the valve seat while the operating state. The valve member of the other element in the piezoelectric valve for fluid control, characterized in that for supporting the other valve seat. 제1항에 있어서, 피에조크리스탈배열은 각면에 한 밸브 부재를 지지하는 단일피에조크리스탈요소형태이어서 비작동상태에서는 한 밸브부재가 기계의 바이어싱작용에 의해 한 밸브시이트에 지지되고, 작동상태에서는 그 요소가 상대적으로 다른 밸브시이트로 다른 밸브부재를 가압하는 작용을 특징으로 하는 유체제어용 압전작동밸브.2. A piezocrystal arrangement according to claim 1, wherein the piezocrystal arrangement is in the form of a single piezocrystal element supporting one valve member on each side such that in a non-operating state, one valve member is supported on one valve seat by a biasing action of the machine, and in the operating state the A piezoelectric actuating valve for fluid control, characterized in that an element presses another valve member with a valve seat having a relatively different element. 제6항에 있어서, 피에조 크리스탈요소 자체가 기계적 바이어스가 되는 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 6, wherein the piezo crystal element itself is a mechanical bias. 제7항에 있어서, 비작동상태에서는 한 밸브부재가 밸브시이트와 접촉하는 위치로 피에조 크리스탈 요소를 지지하기 위하여 스프링을 구비하는 것을 특징으로 하는 유체제어용 압전작동밸브.8. A piezoelectric valve for fluid control as claimed in claim 7, wherein a spring is provided for supporting the piezo crystal element in a position in which the valve member is in contact with the valve seat in the inoperative state. 제8항에 있어서, 상기 스프링이 헬리컬스프링인 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 8, wherein the spring is a helical spring. 제9항에 있어서, 스프링은 밸브부재위의 소울더를 지지하는 한단을 구비한 것을 특징으로 하는 유체제어용 압전작동밸브.10. A piezoelectric valve for fluid control according to claim 9, wherein the spring has one end for supporting the sole on the valve member. 제1항에 있어서, 상기 하우징은 합성수지로 이루어진 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 1, wherein the housing is made of synthetic resin. 제1항에 있어서, 하우징은 직사각형의 프리즘(prism)형으로 되어 있는 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric actuating valve for fluid control according to claim 1, wherein the housing has a rectangular prism shape. 제1항에 있어서, 하우징은 피에조 크리스탈 배열의 한단을 조이는 두부분으로 구성된 것을 특징으로 하는 유체제어용 압전작동밸브.The fluid control piezoelectric valve according to claim 1, wherein the housing is composed of two parts which tighten one end of the piezo crystal array. 제1항에 있어서, 상기 피에조 크리스탈 배열은 적어도 1개 이상의 산화 피에조 바이모포판으로 된 것을 특징으로 하는 유체제어용 압전작동밸브.The piezoelectric valve for fluid control according to claim 1, wherein the piezo crystal array is made of at least one oxidized piezo bimorph plate. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019870002138A 1986-03-14 1987-03-11 Piezoelectrically operating valve for fluid control KR920007766B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3608550.2 1986-03-14
DEP3608550.2 1986-03-14
DE19863608550 DE3608550A1 (en) 1986-03-14 1986-03-14 Piezoelectrically actuated valve

Publications (2)

Publication Number Publication Date
KR870009167A true KR870009167A (en) 1987-10-23
KR920007766B1 KR920007766B1 (en) 1992-09-17

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Application Number Title Priority Date Filing Date
KR1019870002138A KR920007766B1 (en) 1986-03-14 1987-03-11 Piezoelectrically operating valve for fluid control

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JP (1) JPS62220782A (en)
KR (1) KR920007766B1 (en)
DE (1) DE3608550A1 (en)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3714337C2 (en) * 1987-04-29 1997-03-20 Rexroth Mannesmann Gmbh Servo valve with piezo control and piezoelectric control motor
DE3837705A1 (en) * 1988-11-07 1990-05-10 Hydraulik Ring Gmbh PISTON VALVE
DE3935474A1 (en) * 1989-06-22 1991-01-03 Hoechst Ceram Tec Ag PIEZOELECTRIC BENDING CONVERTER AND ITS USE
ES2057509T3 (en) * 1989-11-08 1994-10-16 Ciba Geigy Ag VALVE.
AT397134B (en) * 1991-02-19 1994-02-25 Hoerbiger Ventilwerke Ag VALVE
AT397700B (en) * 1991-12-11 1994-06-27 Hoerbiger Fluidtechnik Gmbh PIEZO VALVE
US5267589A (en) * 1993-04-05 1993-12-07 Ford Motor Company Piezoelectric pressure control valve
US5445185A (en) * 1993-04-05 1995-08-29 Ford Motor Company Piezoelectric fluid control valve
DE19547149A1 (en) * 1995-12-16 1997-06-19 Marco Systemanalyse Entw Fluidic valve
GB9611147D0 (en) * 1996-05-29 1996-07-31 Flight Refueling Ltd A flapper valve
DE29611808U1 (en) * 1996-07-06 1996-09-05 Festo Kg, 73734 Esslingen Valve
US5986369A (en) * 1997-08-19 1999-11-16 Siemens Building Technologies, Inc. Actuator having piezoelectric braking element
DE29722085U1 (en) * 1997-12-13 1998-02-26 Festo AG & Co, 73734 Esslingen Valve
US6164621A (en) * 1999-07-09 2000-12-26 Deka Products Limited Partnership Simplified piezoelectric valve
DE19961736B4 (en) * 1999-12-09 2006-08-31 Caterpillar Inc., Peoria Piezoelectrically actuated valve
EP1106882A3 (en) 1999-12-09 2002-11-13 Drei-S-Werk Präzisionswerkzeuge GmbH & Co. Fertigungs-KG Piezo electrically actuated fluid valve
EP1229278B1 (en) 2001-01-31 2005-10-12 Caterpillar Inc. Piezoelectric actuator
DE10148532B4 (en) 2001-10-01 2004-04-15 Karl Storz Gmbh & Co. Kg Rod lens and method of making a rod lens
KR100453993B1 (en) * 2001-10-09 2004-10-20 경원훼라이트공업 주식회사 Piezo valve
US7147006B2 (en) 2001-10-10 2006-12-12 Haldex Brake Products, Ltd. Pilot operated valve
CN1585868A (en) * 2001-10-10 2005-02-23 霍尔德克斯制动产品有限公司 Pilot operated valve
EP1357321A1 (en) 2002-04-26 2003-10-29 Siemens Aktiengesellschaft Piezoelectric valve
AT412365B (en) * 2002-06-18 2005-01-25 Hygrama Ag VALVE
DE10233601A1 (en) 2002-07-24 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ball valve is controlled by wires made from shape memory alloy attached to spring, on which ball is mounted, which shorten when they are heated and remove ball from, or lower it into, fluid channel
DE202005021271U1 (en) 2004-03-30 2007-09-27 Bühner, Kurt By means of the inverse piezo effect actuated drive
DE102004026963B4 (en) * 2004-06-02 2007-04-12 Festo Ag & Co Valve arrangement for fluid control
JP2008507673A (en) * 2004-07-23 2008-03-13 エイエフエイ・コントロールズ,リミテッド・ライアビリティ・カンパニー Method of operating microvalve assembly and related structure and related device
US8082952B2 (en) 2008-08-22 2011-12-27 Hamilton Sundstrand Corporation Piezoelectric bending element actuator for servo valve
DE102008051837B3 (en) * 2008-10-17 2010-04-22 Festo Ag & Co. Kg Fluid control device and use thereof
GB201214270D0 (en) * 2012-08-09 2012-09-26 Wilson Stephen A A piezo-electric actuator and applications thereof
US20140333703A1 (en) * 2013-05-10 2014-11-13 Matthews Resources, Inc. Cantilevered Micro-Valve and Inkjet Printer Using Said Valve
WO2019215668A1 (en) 2018-05-11 2019-11-14 Matthews International Corporation Micro-valves for use in jetting assemblies
BR112020022988A2 (en) 2018-05-11 2021-02-02 Matthews International Corporation microvalve and blasting set
US11639057B2 (en) 2018-05-11 2023-05-02 Matthews International Corporation Methods of fabricating micro-valves and jetting assemblies including such micro-valves
US11608840B2 (en) 2018-08-21 2023-03-21 Michael Yuan Piezoelectric ring bender servo valve assembly for aircraft flight control actuation and fuel control systems
JP7424560B2 (en) * 2020-09-15 2024-01-30 有限会社メカノトランスフォーマ piezoelectric valve
WO2023165888A1 (en) * 2022-03-02 2023-09-07 Koninklijke Philips N.V. Independent dual actuation piezo valve for magnetic resonance environments

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2511752A1 (en) * 1975-03-18 1976-10-07 Ver Flugtechnische Werke Signal transducer for electrically controlled valves - has strip shaped piezo crystal controlling regulating unit with negative feedback loop
US4340083A (en) * 1978-11-30 1982-07-20 Carleton Controls Corporation Deflectable beam valve
DE2918377A1 (en) * 1979-05-07 1980-11-20 Schenck Ag Carl Flow control valve for HF range with precise regulation - uses piezoelectric element directly or indirectly varying cross=section of stream
DE3233161A1 (en) * 1982-09-07 1983-10-27 Daimler-Benz Ag, 7000 Stuttgart Directional control valve for liquid or gaseous media

Also Published As

Publication number Publication date
DE3608550A1 (en) 1987-09-17
KR920007766B1 (en) 1992-09-17
JPS62220782A (en) 1987-09-28

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