KR920001918B1 - METHOD OF MANUFACTURING YBa2Cu3Ox SUPERCONDUCTOR THIN FILM WITH USING FLAZA - Google Patents
METHOD OF MANUFACTURING YBa2Cu3Ox SUPERCONDUCTOR THIN FILM WITH USING FLAZA Download PDFInfo
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- KR920001918B1 KR920001918B1 KR1019890012153A KR890012153A KR920001918B1 KR 920001918 B1 KR920001918 B1 KR 920001918B1 KR 1019890012153 A KR1019890012153 A KR 1019890012153A KR 890012153 A KR890012153 A KR 890012153A KR 920001918 B1 KR920001918 B1 KR 920001918B1
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- H—ELECTRICITY
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- H10N60/00—Superconducting devices
Abstract
Description
제1도는 본 발명으로 제조된 초전도 박막의 온도에 따른 전압강하도.1 is a voltage drop according to the temperature of the superconducting thin film manufactured by the present invention.
본 발명은 스텐리스 기판에 Y2O3, BaCO3, CuO의 혼합원료분말을 플라스마 용사한후 열처리함으로서 제조되게한 초전도 박막의 제조방법에 관한 것이다.The present invention relates to a method for producing a superconducting thin film which is prepared by thermally spraying a plasma of thermally mixed mixed powder of Y 2 O 3 , BaCO 3 , CuO on a stainless steel substrate.
고온 세라믹 초전도체는 1987년 휴스턴 대학의 Chu 교수가 Y-Ba-Cu-O계(일명 1-2-3계라고도 함)에서 임계 온도 92K의 초전도체를 발명함으로써 이전까지 4K라는 극저온에서나 가능했던 초전도 재료가 액체질소온도(77K)를 뛰어넘게 되었다.High-temperature ceramic superconductors are superconducting materials that were previously possible at cryogenic temperatures of 4K by Professor Chu of the University of Houston in 1987, inventing a superconductor with a critical temperature of 92K in the Y-Ba-Cu-O system (also known as 1-2-3 system). Exceeded the liquid nitrogen temperature (77K).
지금까지 개발된 고온초전도체는 겉보기 화학조성과 임계온도에 따라 제1세대인 Tc 30K 수준의 La-ba-Cu-O계와 제2세대인 90K 부근의 Y-Ba-Cu-O계 그리고 임계온도 100K이상의 Bi-St-Ca-Cu-O계로 분류할 수 있다. 세라믹 초전도체는 일반적인 소결체의 제작방법에 의해 쉽게 제작할 수 있어 이 분야의 기초 물성연구는 별다른 어려움이 없이 진행되고 있으나 향후 산업분야의 실제 응용을 위해서는 선재나 박막의 제작 기술의 개발이 요망되고 있다. 한편, 선재와 박막 형태의 초전도재료는 나름대로의 용용분야가 정해져 있지만 세라믹의 기본특성인 기계적 취성의 극복이라는 관점에서 볼매 박막형태의 제조기법의 우선연구 개발되어야 한다. 플라즈마 용사를 이용한 1-2-3세라믹 초전도 박막의 제조방법은 피용사체의 형상에 제약이 없고 코팅층을 단시간내에 얻을 수 있으며, 세라믹과 같은 비전도, 고융점의 재료의 코팅에도 적용할 수 있다는 점에서 여타의 방법에 비해 우수한 것이다. 이하 발명의 요지를 그 제조공정의 실시예에 의하여 상세히 설명하면 다음과 같다. 플라즈마 용사를 이용한 1-2-3계의 초전도 박막제조는 2공정으로 대별할 수 있는 그 하나는 용사기판(SUBSTRATE)의 준비과정이며 다른 하나는 용사용 분말의 제조와 용사과정이다.The high-temperature superconductors developed so far are La-ba-Cu-O system of the first generation Tc 30K level and Y-Ba-Cu-O system near the second generation 90K and critical temperature depending on the apparent chemical composition and critical temperature. It can be classified as Bi-St-Ca-Cu-O system of over 100K. The ceramic superconductor can be easily manufactured by the general method of manufacturing a sintered body, so the basic physical property research in this field is progressing without any difficulties, but for the actual application of the industrial field, development of the production technology of the wire rod or the thin film is desired. On the other hand, wire rods and superconducting materials in the form of thin films have their own application fields. However, in view of overcoming mechanical brittleness, which is a basic characteristic of ceramics, the research and development of thin film type manufacturing methods should be conducted first. The method of manufacturing 1-2-3 ceramic superconducting thin film using plasma spraying has no limitation on the shape of the sprayed object, and the coating layer can be obtained in a short time, and can be applied to coating non-conductive, high melting point materials such as ceramics. Is superior to other methods. Hereinafter, the gist of the present invention will be described in detail with reference to examples of the manufacturing process as follows. The production of superconducting thin film of 1-2-3 system using plasma spraying can be roughly divided into two processes: preparation of thermal spray substrate and preparation of thermal spray powder and thermal spraying process.
원료 분말의 제조Preparation of Raw Powder
순도 99.9%이상의 Y2O2, VaCO3, CuO를 무게비로 각각 15.13%, 52.89%, 31.98%가 되게 ±0.01g의 정확도로 칭량하여 지르코니아(WrO2)포트와 볼을 사용하여 24시간동안 습식 혼합, 분쇄한다. 습식 분쇄한 분말은 건조기에서 건조한 뒤 알루미나(Al2O3)도가니에 20g씩 넣고, 950℃ 대기준에서 24시간동안 하소(CALCINATION)한뒤 알루미나 유발과 막자를 사용하여 분새하여 100mesh를 통과하고 230mesh를 통과하지 않은 분말(68-168um)을 취하여 용사를 위한 원료 분말로 사용한다.Wy mixed with zirconia (WrO2) port and ball for 24 hours using Y 2 O 2 , VaCO 3 and CuO with a purity ratio of 99.9% or higher and weighed with an accuracy of ± 0.01g to be 15.13%, 52.89% and 31.98%, respectively. To crush. The wet pulverized powder is dried in a dryer, 20g each in an alumina (Al2O3) crucible, calcined for 24 hours at 950 ° C standard, separated by alumina induction and mortar, and passed through 100mesh and does not pass through 230mesh. Take powder (68-168um) and use it as raw powder for thermal spraying.
기판의 준비Preparation of the board
기판의 재질은 AISI 304 스테인레스강을 사용하고, 접착력을 향상시킬 목적으로 기판 표면을 5bar의 공기압으로 스틸그리트(STEEL GRIT)를 사용하여 브라스팅을 실시한뒤 표면에 존재하는 기름 및 불순물을 제거하기 위하여 추가로 기판을 아세톤에 침지하여 초음파 세척기로 탈지한다.The material of the board is AISI 304 stainless steel, and the surface of the board is blasted by using steel grits at 5 bar of air pressure for the purpose of improving adhesion. The substrate is further immersed in acetone and degreased with an ultrasonic cleaner.
용사Warrior
플라스마 용사는 접착력을 향상시키는 본드 코팅과 1-2-3계의 용사의 2단계로 나누어 실시하며, 용사조건은 플라스마 개스유량을 Ar과 He를 각각 80, 30cfh로 하고 전력은 500A, 45V로 분말송급속도 및 토치와 기판간의 거리는 각각 30~45g/min와 5~100mm로 한다.Plasma spraying is carried out in two stages of bond coating and 1-2-3 spraying to improve adhesion.The spraying conditions are the plasma gas flow rate of Ar and He of 80 and 30cfh, and the power to 500A and 45V. The feeding speed and distance between torch and board should be 30 ~ 45g / min and 5 ~ 100mm respectively.
후열처리Post heat treatment
용사로부터 얻은 코팅층은 950℃에서 산소중에서 1시간 열처리한뒤 400~500℃까지 노냉한 뒤 그 이하에서 공냉한다. 이때 얻어진 1-2-3에 코팅층의 임계 온도는 제1도에서 보는 바와 같이 83K이었다. 이와 같이 된 본 발명의 방법으로 제조된 세라믹 초전도 박막은 피용사체의 형상에 제약이 없고 코팅층을 단시간에 얻을 수 있으며 세라믹과 같은 비전도, 고융점의 재료의 코팅에도 적용할 수 있는 우수한 제조방법으로서 해당산업분야에 널리 보급할 수 있는 효과가 있는 것이다.The coating layer obtained from the thermal spraying is heat-treated in oxygen at 950 ° C. for 1 hour, and then cooled to 400-500 ° C., followed by air cooling thereafter. The critical temperature of the coating layer in 1-2-3 obtained at this time was 83K as shown in FIG. The ceramic superconducting thin film manufactured by the method of the present invention has no limitation on the shape of the workpiece and can be obtained in a short time, and is an excellent manufacturing method that can be applied to coating non-conductive, high melting point materials such as ceramics. There is an effect that can be widely distributed in the industry.
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KR1019890012153A KR920001918B1 (en) | 1989-08-25 | 1989-08-25 | METHOD OF MANUFACTURING YBa2Cu3Ox SUPERCONDUCTOR THIN FILM WITH USING FLAZA |
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KR1019890012153A KR920001918B1 (en) | 1989-08-25 | 1989-08-25 | METHOD OF MANUFACTURING YBa2Cu3Ox SUPERCONDUCTOR THIN FILM WITH USING FLAZA |
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KR920001918B1 true KR920001918B1 (en) | 1992-03-06 |
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