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Application filed by 한형수, 삼성코닝 주식회사filedCritical한형수
Priority to KR1019900007756ApriorityCriticalpatent/KR910020821A/en
Publication of KR910020821ApublicationCriticalpatent/KR910020821A/en
단결정 성장용 원료봉의 제조방법Manufacturing method of raw material rod for single crystal growth
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제4도는 본 발명에 의한 원료봉의 제조공정을 나타낸 개략장치도로서, (a)는 초기 상태도이고, (b)는 용융물에 주형이 장입된 상태도이며, (c)는 원료봉이 제조된 상태도.4 is a schematic diagram showing a manufacturing process of a raw material rod according to the present invention, (a) is an initial state diagram, (b) is a state diagram in which a mold is charged in a melt, and (c) is a state diagram in which a raw material rod is manufactured.
Claims (3)
부유 대역 용융법에 사용되는 단결정 성장용 원료봉을 제조하는 방법에 있어서, 도가니에 장입된 입상 또는 괴상의 원료를 가열장치로 용해시킨후 용해로 외부를 감압상태로 유지하여 내부와 외부의 압력차에 의해 용융물을 주형에 흡입시킨후 응고하여 단결정 성장용 원료봉이 제조되도록 하는 것을 특징으로 하는 단결정 성장용 원료봉의 제조방법.In the method of manufacturing the raw material rod for single crystal growth used in the floating zone melting method, the granular or bulky material charged in the crucible is dissolved with a heating device, and then the outside of the melting furnace is kept under reduced pressure to A method for producing a single crystal growing raw material rod, characterized in that the melt is sucked into the mold and then solidified to produce a raw material raw material rod for single crystal growth.제1항에 있어서, 가열장치로서 고주파 유도 가열 방식을 사용하는 것을 특징으로 하는 단격정 성장용 원료봉의 제조방법.The method of manufacturing a raw material rod for single crystal growth according to claim 1, wherein a high frequency induction heating method is used as a heating device.제1항에 있어서, 주형에 흡입되는 용융물의 속도는 2∼100m/분이 되도록 하는 것을 특징으로 하는 단결정 성장용 원료봉의 제조방법.The method of manufacturing a raw material rod for single crystal growth according to claim 1, wherein the melt is sucked into the mold to have a speed of 2 to 100 m / min.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: This is to be disclosed by the original application.
KR1019900007756A1990-05-291990-05-29
Manufacturing method of raw material rod for single crystal growth
KR910020821A
(en)
Method for manufacturing a semiconductor material rod or block expanded by solidification by crystallization of a melt produced from granular material, and apparatus for performing the method
Production of fibers by a floating zone fiber drawing technique(Production of fibers by CO 2 laser heated, floating zone fiber growth process)[Final Report]