KR910018794A - 극미량의 오염물을 검출하기 위한 방법 및 장치 - Google Patents

극미량의 오염물을 검출하기 위한 방법 및 장치 Download PDF

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Publication number
KR910018794A
KR910018794A KR1019910006302A KR910006302A KR910018794A KR 910018794 A KR910018794 A KR 910018794A KR 1019910006302 A KR1019910006302 A KR 1019910006302A KR 910006302 A KR910006302 A KR 910006302A KR 910018794 A KR910018794 A KR 910018794A
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South Korea
Prior art keywords
sample
filtered
substance
concentrated
image
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KR1019910006302A
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English (en)
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엠. 퍼셀 로렌
에프. 로렌스 알버트
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완다 케이. 덴슨-로우
휴우즈 에어크라프트 캄파니
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Application filed by 완다 케이. 덴슨-로우, 휴우즈 에어크라프트 캄파니 filed Critical 완다 케이. 덴슨-로우
Publication of KR910018794A publication Critical patent/KR910018794A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8571—Investigating moving fluids or granular solids using filtering of sample fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/418—Imaging electron microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/426—Imaging image comparing, unknown with known substance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/637—Specific applications or type of materials liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/638—Specific applications or type of materials gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Biological Materials (AREA)

Abstract

내용 없음

Description

극미량의 오염물을 검출하기 위한 방법 및 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도면은 본 발명의 양호한 실시예의 개략적인 흐름도.

Claims (3)

  1. 공지된 기체 또는 액체 매질 내에 극미량으로 존재하는 미식별 물질의 성질을 식별하기 위한 장치에 있어서, 미질 내의 미식별 물질의 샘플을 수집하기 위한 수단, 상기 샘플을 여과하기 위한 수단, 여과되고 집중된 샘플을 집중시키기 위한 수단, 공지된 기판상에 상기 여과되고 집중된 샘플의 최소한 일부분을 피착시키기 위한 수단, 상기 미식별 물질의 최소한 1개의 영상 특성을 형성하도록 SETM, NFOM 및 AFM 수단으로부터 선택된 상기 기판 상에서 여과되고 집중되며 피착된 샘플을 분석하기 위한 수단 및 상기 물질을 식별하도록 SETM, NFOM 및 AFM 분석으로 부터의 공지된 물질의 영상과 상기 최소한 1개의 영상을 비교하기 위한 수단을 포함하는 것을 특징으로 하는 장치.
  2. 공지된 기체 또는 액체 매질 내의 미식별 물질의 성질을 식별하기 위한 방법에 있어서, 매질 내의 상기 물질의 샘플을 수집하는 단계, 여과된 샘플을 형성하도록 상기 샘플을 여과하는 단계, 여과되고 집중되는 샘플을 형성하도록 상기 여과된 샘플을 집중하는 단계, 공지된 기판 상에 상기 여과되고 집중된 샘플을 최소한 일부분을 피착하는 단계, 상기 물질의 최소한 1개의 영상 특성을 형성하도록 SETM, NFOM 및 AFM 기술들중 최소한 한 기술을 이용하여 상기 기판 상에서 상기 여과되고 집중된 샘플을 분석하는 단계, 및 상기 최소한 1개의 영상으로부터 상기 물질을 식별하는 단계를 포함하는 것을 특징으로 하는 방법.
  3. 제 2항에 있어서, SETM, NFOM 및 /또는 AFM 기술에 의해 공지된 이러한 물질들을 분석함으로써 유도되는 공지된 물질들의 영상과 상기 영상을 비교하는 단계를 포함하는 것을 특징으로 하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019910006302A 1990-04-20 1991-04-19 극미량의 오염물을 검출하기 위한 방법 및 장치 KR910018794A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/511,672 US5023452A (en) 1990-04-20 1990-04-20 Method and apparatus for detecting trace contaminents
US511672 1990-04-20

Publications (1)

Publication Number Publication Date
KR910018794A true KR910018794A (ko) 1991-11-30

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ID=24035933

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910006302A KR910018794A (ko) 1990-04-20 1991-04-19 극미량의 오염물을 검출하기 위한 방법 및 장치

Country Status (7)

Country Link
US (1) US5023452A (ko)
EP (1) EP0453225A1 (ko)
JP (1) JPH04230828A (ko)
KR (1) KR910018794A (ko)
CA (1) CA2039108C (ko)
FI (1) FI911928A (ko)
NO (1) NO911530L (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100808356B1 (ko) * 2005-05-13 2008-02-27 오므론 가부시키가이샤 부품 실장 기판 구조와 그 제조 방법

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0622627A1 (en) * 1993-04-30 1994-11-02 Applied Materials, Inc. Method and apparatus for detecting particles on a substrate
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5410910A (en) * 1993-12-22 1995-05-02 University Of Virginia Patent Foundation Cryogenic atomic force microscope
US5821545A (en) * 1995-11-07 1998-10-13 Molecular Imaging Corporation Heated stage for a scanning probe microscope
US5654546A (en) * 1995-11-07 1997-08-05 Molecular Imaging Corporation Variable temperature scanning probe microscope based on a peltier device
US5859362A (en) * 1996-10-22 1999-01-12 Revenue Canada Trace vapor detection
US7759134B2 (en) * 2003-09-10 2010-07-20 Auburn University Magnetostrictive ligand sensor

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US4013888A (en) * 1975-07-24 1977-03-22 Macias Edward S Monitor for atmospheric pollutants
DE2654057B1 (de) * 1976-11-29 1978-04-27 Varian Mat Gmbh Verfahren zur Ionisierung von organischen Substanzen,sowie dieses Verfahren benutzendes Analysegeraet
GB1575409A (en) * 1977-08-23 1980-09-24 Awdeh Z Concentration apparatus
US4395493A (en) * 1981-05-14 1983-07-26 Coulter Electronics, Inc. Monolayer device using filter techniques
EP0148290A1 (en) * 1983-12-14 1985-07-17 Försvarets Forskningsanstalt Method and device at the analysis of liquid samples
US4594506A (en) * 1984-09-10 1986-06-10 Nicolet Instrument Corporation Gas chromatograph/mass spectrometer interface
JPS6177747A (ja) * 1984-09-25 1986-04-21 Murata Mfg Co Ltd 分析試料を担体に保持する方法および分析試料を担体に保持させるための装置
JPS633244A (ja) * 1986-06-24 1988-01-08 Japan Spectroscopic Co 赤外スペクトル測定のサンプリング法及び高速液クロと赤外分光光度計のインタ−フエイス並びに高速液クロ検出器用赤外分光光度計
US4740298A (en) * 1986-09-08 1988-04-26 Sepragen Corporation Chromatography column/moving belt interface
JPH0750042B2 (ja) * 1987-03-18 1995-05-31 株式会社島津製作所 スペクトル分析装置における状態分析方法
JPS63243853A (ja) * 1987-03-31 1988-10-11 Shimadzu Corp 自動定性分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100808356B1 (ko) * 2005-05-13 2008-02-27 오므론 가부시키가이샤 부품 실장 기판 구조와 그 제조 방법

Also Published As

Publication number Publication date
JPH04230828A (ja) 1992-08-19
CA2039108C (en) 1994-11-08
US5023452A (en) 1991-06-11
FI911928A (fi) 1991-10-21
CA2039108A1 (en) 1991-10-21
FI911928A0 (fi) 1991-04-19
EP0453225A1 (en) 1991-10-23
NO911530D0 (no) 1991-04-18
NO911530L (no) 1991-10-21

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