KR910017584A - Method for separating elements of semiconductor devices - Google Patents

Method for separating elements of semiconductor devices

Info

Publication number
KR910017584A
KR910017584A KR1019900003161A KR900003161A KR910017584A KR 910017584 A KR910017584 A KR 910017584A KR 1019900003161 A KR1019900003161 A KR 1019900003161A KR 900003161 A KR900003161 A KR 900003161A KR 910017584 A KR910017584 A KR 910017584A
Authority
KR
South Korea
Prior art keywords
semiconductor devices
separating elements
separating
elements
semiconductor
Prior art date
Application number
KR1019900003161A
Other languages
Korean (ko)
Other versions
KR930010726B1 (en
Inventor
김홍식
김기홍
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR1019900003161A priority Critical patent/KR930010726B1/en
Publication of KR910017584A publication Critical patent/KR910017584A/en
Application granted granted Critical
Publication of KR930010726B1 publication Critical patent/KR930010726B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
KR1019900003161A 1990-03-09 1990-03-09 Isolation method of semiconductor KR930010726B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900003161A KR930010726B1 (en) 1990-03-09 1990-03-09 Isolation method of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900003161A KR930010726B1 (en) 1990-03-09 1990-03-09 Isolation method of semiconductor

Publications (2)

Publication Number Publication Date
KR910017584A true KR910017584A (en) 1991-11-05
KR930010726B1 KR930010726B1 (en) 1993-11-08

Family

ID=19296837

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900003161A KR930010726B1 (en) 1990-03-09 1990-03-09 Isolation method of semiconductor

Country Status (1)

Country Link
KR (1) KR930010726B1 (en)

Also Published As

Publication number Publication date
KR930010726B1 (en) 1993-11-08

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