KR910012333U - 기판 세정장치 - Google Patents

기판 세정장치

Info

Publication number
KR910012333U
KR910012333U KR2019890019749U KR890019749U KR910012333U KR 910012333 U KR910012333 U KR 910012333U KR 2019890019749 U KR2019890019749 U KR 2019890019749U KR 890019749 U KR890019749 U KR 890019749U KR 910012333 U KR910012333 U KR 910012333U
Authority
KR
South Korea
Prior art keywords
cleaning device
substrate cleaning
substrate
cleaning
Prior art date
Application number
KR2019890019749U
Other languages
English (en)
Other versions
KR930001816Y1 (ko
Inventor
안순섬
Original Assignee
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전관 주식회사 filed Critical 삼성전관 주식회사
Priority to KR2019890019749U priority Critical patent/KR930001816Y1/ko
Publication of KR910012333U publication Critical patent/KR910012333U/ko
Application granted granted Critical
Publication of KR930001816Y1 publication Critical patent/KR930001816Y1/ko

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Liquid Crystal (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019890019749U 1989-12-23 1989-12-23 기판 세정장치 KR930001816Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019890019749U KR930001816Y1 (ko) 1989-12-23 1989-12-23 기판 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019890019749U KR930001816Y1 (ko) 1989-12-23 1989-12-23 기판 세정장치

Publications (2)

Publication Number Publication Date
KR910012333U true KR910012333U (ko) 1991-07-30
KR930001816Y1 KR930001816Y1 (ko) 1993-04-15

Family

ID=19293853

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019890019749U KR930001816Y1 (ko) 1989-12-23 1989-12-23 기판 세정장치

Country Status (1)

Country Link
KR (1) KR930001816Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100636709B1 (ko) * 2004-10-01 2006-10-19 주식회사 신안에스엔피 로터리식 세정기

Also Published As

Publication number Publication date
KR930001816Y1 (ko) 1993-04-15

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20000331

Year of fee payment: 8

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