KR900016493A - 스퍼터링 장치 - Google Patents
스퍼터링 장치 Download PDFInfo
- Publication number
- KR900016493A KR900016493A KR1019900005116A KR900005116A KR900016493A KR 900016493 A KR900016493 A KR 900016493A KR 1019900005116 A KR1019900005116 A KR 1019900005116A KR 900005116 A KR900005116 A KR 900005116A KR 900016493 A KR900016493 A KR 900016493A
- Authority
- KR
- South Korea
- Prior art keywords
- optical device
- target
- vacuum chamber
- laser
- sputtering
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예에 있어서의 스퍼터링 장치의 구성도,
제2도는 동 가공상태의 개념도.
Claims (2)
- 진공조와, 진공조내에 설치된 타아깃 및 기판과, 레이저 발진기와, 진공조의 진공밀봉창을 통해서 타아깃에 레이저광을 조사하기 위한 비임정형장치, 주사광학장치 및 집광광학장치를 구비한 것을 특징으로 하는 스퍼터링 장치.
- 제1항에 있어서, 레이저, 스포트가 타아깃위를 동일 직경과 동일속도로 이동하도록, 주사광학장치의 동작과 비임정형장치 혹은 집광광학장치의 광축방향의 이동을 동기시킨것을 특징으로 하는 스퍼터링 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1-93530 | 1989-04-13 | ||
JP1093530A JPH0826451B2 (ja) | 1989-04-13 | 1989-04-13 | スパッタリング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR900016493A true KR900016493A (ko) | 1990-11-13 |
KR920010303B1 KR920010303B1 (ko) | 1992-11-26 |
Family
ID=14084858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900005116A KR920010303B1 (ko) | 1989-04-13 | 1990-04-13 | 스퍼터링장치 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5037521A (ko) |
JP (1) | JPH0826451B2 (ko) |
KR (1) | KR920010303B1 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4229399C2 (de) * | 1992-09-03 | 1999-05-27 | Deutsch Zentr Luft & Raumfahrt | Verfahren und Vorrichtung zum Herstellen einer Funktionsstruktur eines Halbleiterbauelements |
JP3255469B2 (ja) * | 1992-11-30 | 2002-02-12 | 三菱電機株式会社 | レーザ薄膜形成装置 |
US5429732A (en) * | 1994-02-14 | 1995-07-04 | Hughes Aircraft Company | High rate ion beam sputtering process |
DE4405598C1 (de) * | 1994-02-22 | 1995-09-21 | Deutsche Forsch Luft Raumfahrt | Verfahren zum Beschichten und Beschichtungsvorrichtung |
JP3623001B2 (ja) * | 1994-02-25 | 2005-02-23 | 住友電気工業株式会社 | 単結晶性薄膜の形成方法 |
US5490912A (en) * | 1994-05-31 | 1996-02-13 | The Regents Of The University Of California | Apparatus for laser assisted thin film deposition |
KR101293247B1 (ko) * | 2006-02-07 | 2013-08-09 | 삼성전자주식회사 | 자율 이동 로봇 및 그 제어 방법 |
US8875319B2 (en) | 2011-12-30 | 2014-11-04 | Sport Maska Inc. | Protective element for use in sport |
US10676814B2 (en) * | 2017-09-28 | 2020-06-09 | The United States Of America As Represented By The Secretary Of The Navy | System and method for controlling the elemental composition of films produced by pulsed laser deposition |
EP4097271A1 (en) * | 2020-04-09 | 2022-12-07 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Thermal laser evaporation system and method of providing a thermal laser beam at a source |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2542327B1 (ko) * | 1983-03-07 | 1986-03-07 | Bensoussan Marcel | |
US4664769A (en) * | 1985-10-28 | 1987-05-12 | International Business Machines Corporation | Photoelectric enhanced plasma glow discharge system and method including radiation means |
DE3787440T2 (de) * | 1986-11-20 | 1994-01-13 | Nec Corp | Verfahren und Vorrichtung um eine Linie auf einem strukturierten Substrat zu schreiben. |
JP2555045B2 (ja) * | 1987-01-19 | 1996-11-20 | 株式会社日立製作所 | 薄膜形成方法及びその装置 |
US4814259A (en) * | 1987-11-09 | 1989-03-21 | Rockwell International Corporation | Laser generated electrically conductive pattern |
-
1989
- 1989-04-13 JP JP1093530A patent/JPH0826451B2/ja not_active Expired - Fee Related
-
1990
- 1990-04-04 US US07/504,548 patent/US5037521A/en not_active Expired - Fee Related
- 1990-04-13 KR KR1019900005116A patent/KR920010303B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH0826451B2 (ja) | 1996-03-13 |
US5037521A (en) | 1991-08-06 |
KR920010303B1 (ko) | 1992-11-26 |
JPH02270962A (ja) | 1990-11-06 |
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