KR900010898A - 집속 이온빔 시스템의 이온 광학계 - Google Patents

집속 이온빔 시스템의 이온 광학계

Info

Publication number
KR900010898A
KR900010898A KR1019880017977A KR880017977A KR900010898A KR 900010898 A KR900010898 A KR 900010898A KR 1019880017977 A KR1019880017977 A KR 1019880017977A KR 880017977 A KR880017977 A KR 880017977A KR 900010898 A KR900010898 A KR 900010898A
Authority
KR
South Korea
Prior art keywords
optical system
ion
ion beam
focused
focused ion
Prior art date
Application number
KR1019880017977A
Other languages
English (en)
Other versions
KR910007805B1 (ko
Inventor
장원익
이용일
이종현
배남진
이상수
Original Assignee
재단법인 한국전자통신연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 재단법인 한국전자통신연구소 filed Critical 재단법인 한국전자통신연구소
Priority to KR1019880017977A priority Critical patent/KR910007805B1/ko
Publication of KR900010898A publication Critical patent/KR900010898A/ko
Application granted granted Critical
Publication of KR910007805B1 publication Critical patent/KR910007805B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
KR1019880017977A 1988-12-30 1988-12-30 집속 이온빔 시스템의 이온 광학계 KR910007805B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019880017977A KR910007805B1 (ko) 1988-12-30 1988-12-30 집속 이온빔 시스템의 이온 광학계

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019880017977A KR910007805B1 (ko) 1988-12-30 1988-12-30 집속 이온빔 시스템의 이온 광학계

Publications (2)

Publication Number Publication Date
KR900010898A true KR900010898A (ko) 1990-07-11
KR910007805B1 KR910007805B1 (ko) 1991-10-02

Family

ID=19280977

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880017977A KR910007805B1 (ko) 1988-12-30 1988-12-30 집속 이온빔 시스템의 이온 광학계

Country Status (1)

Country Link
KR (1) KR910007805B1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100978793B1 (ko) * 2008-11-19 2010-08-30 한국원자력연구원 다중 전극을 이용한 저에너지·대전류·대면적 빔 제조 장치 및 수송 장치

Also Published As

Publication number Publication date
KR910007805B1 (ko) 1991-10-02

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Legal Events

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E902 Notification of reason for refusal
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Payment date: 19980929

Year of fee payment: 8

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