KR900008548A - Magnetic head using soft magnetic alloy film and soft magnetic alloy film - Google Patents

Magnetic head using soft magnetic alloy film and soft magnetic alloy film Download PDF

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KR900008548A
KR900008548A KR1019890013134A KR890013134A KR900008548A KR 900008548 A KR900008548 A KR 900008548A KR 1019890013134 A KR1019890013134 A KR 1019890013134A KR 890013134 A KR890013134 A KR 890013134A KR 900008548 A KR900008548 A KR 900008548A
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soft magnetic
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alloy film
average particle
particle diameter
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KR1019890013134A
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KR920001939B1 (en
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나오야 하세가와
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가다오까 마사다까
알프스 덴기 가부시기가이샤
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Priority claimed from JP27830288A external-priority patent/JPH07114006B2/en
Priority claimed from JP1055571A external-priority patent/JP2635402B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15316—Amorphous metallic alloys, e.g. glassy metals based on Co

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)

Abstract

내용 없음.No content.

Description

연자성 합금막 및 그 연자성합금막을 사용한 자기헤드Magnetic head using soft magnetic alloy film and soft magnetic alloy film

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 실시예와 비교예의 각합금막의 금속조직을 동정하기 위하여 행산 x 선회절패턴을 나타낸 그래프,1 is a graph showing the x-ray diffraction pattern for identifying metal structures of the respective alloy films of Examples and Comparative Examples of the present invention;

제2도는 스퍼터가스중의 CH4농도와 생성막중의 C농도의 관계를 나타낸 그래프,2 is a graph showing the relationship between the concentration of CH 4 in the sputter gas and the concentration of C in the resulting film,

제3도는 본 발명의 실시예의 초투자율에 대한 주파수특성을 나타낸 그래프,3 is a graph showing the frequency characteristics for the super-permeability of the embodiment of the present invention,

제4도는 본 발명의 실시예의 합금막의 금속조직을 동정하기 위하여 행한 x 선회절패턴을 나타낸 그래프,4 is a graph showing the x-ray diffraction pattern performed to identify the metal structure of the alloy film of the embodiment of the present invention;

제5도 및 제6도는 본 발명의 자기헤드의 일실시예를 나타낸 도로서, 제5도는 요부확대도.5 and 6 show an embodiment of the magnetic head of the present invention, and FIG. 5 is an enlarged view of the main part.

Claims (16)

조성식이 Co x M z C w로 표시되고 M은 Ti, Zr, Hf, Nb, Ta, Mo, W중 1종 또는 2종 이상으로 이루어진 금속원소 또는 그 혼합물이고 조성비 x, z, w는 원자 %로 55x96, 2z25, 0.1w20, x+z+w=100의 관계를 만족시킴과 동시에 그 금속조직이 기본적으로 평균입경 0.05㎛이하의 결정립으로 이루어지고, 그 일부에 원소 M의 탄화물의 결정상을 포함하는 것을 특징으로 하는 연자성 합금막.The composition formula is represented by Co x M z C w, M is a metal element or a mixture of one or two or more of Ti, Zr, Hf, Nb, Ta, Mo, W, and the composition ratio x, z, w is the atomic% To 55 x 96, 2 z 25, 0.1 w 20, x + z + w = 100, while the metal structure is basically composed of grains having an average particle diameter of 0.05 µm or less, and a part thereof includes a crystal phase of carbide of element M Magnetic alloy film. 제1항에 있어서, 금속조직이 기본적으로 평균입경 0.05㎛이하의 결정립과 비정질조직으로 이루어진 것을 특징으로 하는 연자성 합금막.The soft magnetic alloy film according to claim 1, wherein the metal structure is basically composed of grains and amorphous structures having an average particle diameter of 0.05 µm or less. 조성식이 Co x Ty M z C w로 표시되고 T는 Fe, Ni, Mn중 1종 또는 2종이상으로 이루어진 금속원소 또는 그 혼합물, M은 Ti, Zr, Hf, Nb, Ta, Mo, W중 1종 또는 2종 이상으로 이루어진 금속원소 또는 그 혼합물이고 조성비 x, y, z, w는 원자 %로 50x96, 0.1y20, 2z25, 0.1w20, x+y+z+w=100의 관계를 만족시킴과 동시에 그 금속조직이 기본적으로 평균입경 0.05㎛이하의 결정립으로 이루어지고, 그 일부에 원소 M의 탄화물의 결정상을 포함하는 것을 특징으로 하는 연자성 합금막.The compositional formula is represented by Co x Ty M z C w and T is a metal element consisting of one or two or more of Fe, Ni and Mn, or a mixture thereof, M is Ti, Zr, Hf, Nb, Ta, Mo, W A metal element consisting of one or two or more thereof, or a mixture thereof; composition ratios x, y, z, w are 50% by atom x 96, 0.1 y 20, 2 z 25, 0.1 w Satisfying the relationship of 20, x + y + z + w = 100, and the metal structure is basically composed of crystal grains having an average particle diameter of 0.05 µm or less, and a part thereof includes a crystal phase of carbide of element M Soft magnetic alloy film. 제3항에 있어서, 금속조직이 기본적으로 평균입경 0.05㎛이하의 결정립과 비정질조직으로 이루어진 것을 특징으로 하는 연자성 합금막.4. The soft magnetic alloy film according to claim 3, wherein the metal structure basically consists of grains and amorphous structures having an average particle diameter of 0.05 mu m or less. 조직성이 Co a V c C e로 표시되고 조성비 a, c, e는 원자 %로 55a93, 5c25, 0.5e25, a+c+e=100의 관계를 만족함과 동시에 그 금속조직이 평균입경 0.05㎛이하의 결정립으로 이루어지고, 결정립의 일부에 V의 탄화물의 결정상을 포함하는 것을 특징으로 하는 연자성 합금막.The organization is expressed as Co a V c C e and the composition ratios a, c and e are% by atom 55 a 93, 5 c 25, 0.5 e 25, a + c + e = 100, the soft magnetic alloy film characterized in that the metal structure is composed of crystal grains having an average particle diameter of 0.05 µm or less, and the crystal grains of carbides of V are included in a part of the crystal grains. . 제5항에 있어서 금속조직이 평균입경 0.05㎛이하의 결정립과 비정질조직으로 이루어진 것을 특징으로 하는 연자성 합금막.The soft magnetic alloy film according to claim 5, wherein the metal structure is composed of grains and amorphous structures having an average particle diameter of 0.05 µm or less. 조성식이 Co a V c Md C e로 표시되고 M은 Ti, Zr, Hf, Nb, Ta, Mo, W중 1종 또는 2종 이상으로 이루어진 금속원소 또는 그 혼합물이고 조성비a,c,d,e는 원자 %로 55a96, 0.5c25, 0.5d25, 0.5e25, 2c+d, a+c+d+e=100의 관계를 만족함과 동시에 그 금속조직이 평균입경 0.05㎛이하의 결정립으로 이루어지고, 결정립의 일부에 V의 탄화물의 결정상을 포함하는 것을 특징으로 하는 연자성 합금막.The compositional formula is represented by Co a V c Md C e and M is a metal element consisting of one or two or more of Ti, Zr, Hf, Nb, Ta, Mo, and W or a mixture thereof and the composition ratios a, c, d, e Is 55% by atomic a 96, 0.5 c 25, 0.5 d 25, 0.5 e 25, 2 satisfying the relationship of c + d and a + c + d + e = 100, the metal structure is composed of crystal grains having an average particle diameter of 0.05 µm or less, and a part of the crystal grains includes a V carbide phase Soft magnetic alloy film. 제7항에 있어서, 금속조직이 평균입경 0.05㎛이하의 결정립과 비정질조직으로 이루어진 것을 특징으로 하는 연자성 합금막.The soft magnetic alloy film according to claim 7, wherein the metal structure is composed of grains and amorphous structures having an average particle diameter of 0.05 µm or less. 조성식이 Co a V c M d C e로 표시되고 T는 Fe, Ni, Mn중 1종 또는 2종 이상으로 이루어진 금속원소 또는 그 혼합물이고 조성비a,c,d,e는 원자 %로 50a96, 0.1b20, 5c25, 0.5e25, 2c+e, a+c+d+e=100의 관계를 만족함과 동시에 그 금속조직이 평균입경 0.05㎛이하의 결정립으로 이루어지고, 결정립의 일부에 V의 탄화물의 결정상을 포함하는 것을 특징으로 하는 연자성 합금막The compositional formula is represented by Co a V c M d C e, T is a metal element consisting of one or two or more of Fe, Ni, and Mn, or a mixture thereof, and the composition ratios a, c, d, and e are 50% by atom. a 96, 0.1 b 20, 5 c 25, 0.5 e 25, 2 satisfying the relationship of c + e and a + c + d + e = 100, and the metal structure is composed of crystal grains having an average particle diameter of 0.05 µm or less, and a part of the crystal grains includes a V carbide phase Soft magnetic alloy film 제9항에 있어서, 금속조직이 평균입경 0.05㎛이하의 결정립과 비정질조직으로 이루어진 것을 특징으로 하는 연자성 합금막.10. The soft magnetic alloy film according to claim 9, wherein the metal structure is composed of grains and amorphous structures having an average particle diameter of 0.05 mu m or less. 조성식이 Co a T b V c M d C e로 표시되고 조성비a,b,c,d,e는 원자 %로 50a93, 0.1b20, 0.5c25, 0.5d25, 0.5e25, a+b+c+d+e=100의 관계를 만족함과 동시에 그 금속조직이 평균입경 0.05㎛이하의 결정립으로 이루어지고, 결정립의 일부에 V의 탄화물과 M의 탄화물의 결정상을 포함하는 것을 특징으로 하는 연자성 합금막.The composition formula is expressed as Co a T b V c M d C e and the composition ratio a, b, c, d, e is 50% by atom a 93, 0.1 b 20, 0.5 c 25, 0.5 d 25, 0.5 e 25, a + b + c + d + e = 100, and the metal structure is composed of crystal grains having an average particle diameter of 0.05 µm or less, and a part of the crystal grains includes crystal phases of carbides of V and carbides of M. Soft magnetic alloy film, characterized in that. 제11항에 있어서, 금속조직이 평균입경 0.05㎛이하의 결정립과 비정질조직으로 이루어진 것을 특징으로 하는 연자성 합금막.12. The soft magnetic alloy film of claim 11, wherein the metal structure is composed of grains and amorphous structures having an average particle diameter of 0.05 µm or less. 갭부측에 연자성막을 형성한 한쌍의 자기코어반체를 상기 연자성막과 상기 갭부를 개재시켜 유리본딩에 의하여 접합되어있는 자기헤드에 있어서, 상기 연자성막은 상기 자기코어반체측이 Co x M z C w (M은 Ti, Zr, Hf, Nb, Ta, Mo, W중의 적어도 1종이상이고 x,z,w는 조성비(원자%)이다)의 조성을 가지고 우위적으로 결정입경이 0.05㎛이하의 미세 결정질 조직으로 이루어지고 상기 갭부측이 Co x M z (M은 Ti, Zr, Hf, Nb, Ta, Mo, W 중의 적어도 1종 이상이고 x,z,는 조성비 (원자%)이다)의 조성을 가지고 비정질로 이루어진 것을 특징으로 하는 자기헤드.A magnetic head in which a pair of magnetic core halves having a soft magnetic film formed on a gap portion side are bonded by glass bonding through the soft magnetic film and the gap portion, wherein the soft magnetic film has Co x M z C on the magnetic core half side. w (M is at least one of Ti, Zr, Hf, Nb, Ta, Mo, W and x, z, w is the composition ratio (atomic%)) and has a fine grain size of 0.05 µm or less The gap portion is amorphous and has a composition of Co x M z (M is at least one of Ti, Zr, Hf, Nb, Ta, Mo, and W, and x, z is a composition ratio (atomic%)). Magnetic head, characterized in that consisting of. 갭부측에 연자성막을 형성한 한쌍의 자기코어반체를 상기 연자성막과 상기 갭부를 개재시켜 유리본딩에 의하여 접합되어 있는 자기헤드에 있어서, 상기 연자성막은 상기 자기코어 반체측이 Co x T y M z C w (T은 Fe, Ni, Mn중 적어도 1종 이상이고 M은 Ti, Zr, Hf, Nb, Ta, Mo, W중의 적어도 1종이상이고 x,y,z,w는 조성비(원자%)이다)의 관계를 가지고 우위적으로 결정 입경이 0.05㎛이하의 미세 결정질 조직으로 이루어지고 상기 갭부측이 Co x M z (M은 Ti, Zr, Hf, Nb, Ta, Mo, W 중의 적어도 1종 이상이고 x,z,는 조성비 (원자%)이다)의 조성을 가지고 비정질로 이루어진 것을 특징으로 하는 자기헤드.In a magnetic head in which a pair of magnetic core halves having a soft magnetic film formed on a gap part side are bonded by glass bonding through the soft magnetic film and the gap part, the soft magnetic film has Co x T y M on the magnetic core half body side. z C w (T is at least one of Fe, Ni, Mn, M is at least one of Ti, Zr, Hf, Nb, Ta, Mo, W and x, y, z, w is composition ratio (atomic%)) Has a crystal grain diameter of 0.05 µm or less, and the gap portion has Co x M z (M is at least one of Ti, Zr, Hf, Nb, Ta, Mo, and W). And x, z, is the composition ratio (atomic%), and has a composition comprising an amorphous magnetic head. 갭부측에 연자성막을 형성한 한쌍의 자기코어반체를 상기 연자성막과 상기 갭부를 개재시켜 유리본딩에 접합되어 있는 자기헤드에 있어서, 상기 연자성막은, Co x M z C w (M은 Ti, Zr, Hf, Nb, Ta, Mo, W중의 적어도 1종이상이고 x,z,w는 조성비(원자%)이다)의 조성을 가지고 우위적으로 결정입경이 0.05㎛이하의 미세 결정질 조직으로 이루어진 것을 특징으로 하는 자기헤드.In a magnetic head in which a pair of magnetic cores having a soft magnetic film formed on the gap portion is bonded to glass bonding through the soft magnetic film and the gap portion, the soft magnetic film is formed by Co x M z C w (M is Ti, At least one of Zr, Hf, Nb, Ta, Mo, and W, x, z, w is a composition ratio (atomic%) and has a fine crystalline structure of predominantly grain size less than 0.05㎛ Magnetic head. 갭부측에 연자성막을 형성한 한쌍의 자기코어반체를 상기 연자성막과 상기 갭부를 개재시켜 유리본딩에 의하여 접합되어 있는 자기헤드에 있어서, 상기 연자성막은, Co x T y M z C w (T은 Fe, Ni, Mn중 적어도 1종 이상이고 M은 Ti, Zr, Hf, Nb, Ta, Mo, W중의 적어도 1종이상이고 x,y,z,w는 조성비(원자%)이다)의 조성을 가지고 우위적으로 결정 입경이 0.05㎛이하의 미세 결정질 조직으로 이루어진 것을 특징으로 하는 자기헤드.In a magnetic head in which a pair of magnetic cores having a soft magnetic film formed on a gap portion is bonded by glass bonding through the soft magnetic film and the gap portion, the soft magnetic film is Co x T y M z C w (T Is at least one of Fe, Ni, and Mn, M is at least one of Ti, Zr, Hf, Nb, Ta, Mo, and W, and x, y, z, and w have a composition of composition ratio (atomic%). Advantageously, the magnetic head comprising a fine crystalline structure of less than 0.05㎛ grain size. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019890013134A 1988-11-02 1989-09-11 Soft magnetic compound metal and magnetic head thereof KR920001939B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP88-278302 1988-11-02
JP27830388 1988-11-02
JP88-278303 1988-11-02
JP27830288A JPH07114006B2 (en) 1988-11-02 1988-11-02 Magnetic head
JP1055571A JP2635402B2 (en) 1988-11-02 1989-03-08 Soft magnetic alloy film
JP89-55571 1989-03-08

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KR900008548A true KR900008548A (en) 1990-06-04
KR920001939B1 KR920001939B1 (en) 1992-03-07

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US5755986A (en) * 1995-09-25 1998-05-26 Alps Electric Co., Ltd. Soft-magnetic dielectric high-frequency composite material and method for making the same

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JPS6050605A (en) * 1983-08-27 1985-03-20 Alps Electric Co Ltd Magnetic head for video tape recorder
JPH0770020B2 (en) * 1985-06-14 1995-07-31 株式会社日立製作所 Magnetic head
JP2555057B2 (en) * 1987-03-25 1996-11-20 株式会社日立製作所 Corrosion resistant ferromagnetic film

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