KR890016380A - 불순물 측정방법 - Google Patents

불순물 측정방법 Download PDF

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Publication number
KR890016380A
KR890016380A KR1019890005358A KR890005358A KR890016380A KR 890016380 A KR890016380 A KR 890016380A KR 1019890005358 A KR1019890005358 A KR 1019890005358A KR 890005358 A KR890005358 A KR 890005358A KR 890016380 A KR890016380 A KR 890016380A
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KR
South Korea
Prior art keywords
stick
measurement method
tip
brought
contact
Prior art date
Application number
KR1019890005358A
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English (en)
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KR910004154B1 (en
Inventor
모쿠지 가게야마
아야코 마에다
Original Assignee
아오이 죠이치
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 아오이 죠이치, 가부시키가이샤 도시바 filed Critical 아오이 죠이치
Publication of KR890016380A publication Critical patent/KR890016380A/ko
Application granted granted Critical
Publication of KR910004154B1 publication Critical patent/KR910004154B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
    • Y10T436/255—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.] including use of a solid sorbent, semipermeable membrane, or liquid extraction

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

내용 없음

Description

불순물 측정방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 방법을 실시하는데에 사용되는 장치의 구성을 설명하기 위한 도면이다.

Claims (1)

  1. 피측정물(10)을 구동시켜서 이 피측정물(10)의 표면상에 용해액을 막대 모양으로 냉각시켜 응고시킨 스틱(11)을 접촉시킴으로써 피측정물(10)의 표면에 형성되어 있는 자연산화막을 용해해서 상기 스틱(11)의 선단부에 그 용해액(13)을 유지시키면서 회수하고, 상기 스틱(11)을 상기 피측정물(10)의 전면에 걸쳐 접촉시킨 후 스틱(11)의 선단부에회수된 상기 용해액(13)을 화학적 분석법으로 분석해서 상기 피측정물(10)의 표면상에 부착되어 있던 불순물의 종류 및농도를 측정하도록 된 것을 특징으로 하는 불순물 측정방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR8905358A 1988-04-25 1989-04-24 Impurity mesuring method KR910004154B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63102198A JPH0625717B2 (ja) 1988-04-25 1988-04-25 不純物の測定方法
JP63-102198 1988-04-25

Publications (2)

Publication Number Publication Date
KR890016380A true KR890016380A (ko) 1989-11-29
KR910004154B1 KR910004154B1 (en) 1991-06-22

Family

ID=14320964

Family Applications (1)

Application Number Title Priority Date Filing Date
KR8905358A KR910004154B1 (en) 1988-04-25 1989-04-24 Impurity mesuring method

Country Status (5)

Country Link
US (1) US5055413A (ko)
EP (1) EP0339561B1 (ko)
JP (1) JPH0625717B2 (ko)
KR (1) KR910004154B1 (ko)
DE (1) DE68907437T2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05273198A (ja) * 1992-03-26 1993-10-22 Nec Corp 半導体シリコン基板表面及び基板上薄膜表面の分析方法
JP3278513B2 (ja) * 1993-12-09 2002-04-30 株式会社東芝 半導体基板の不純物分析方法
US5569328A (en) * 1995-01-10 1996-10-29 Petvai; Steve I. Silicon semiconductor wafer test
US6412358B1 (en) * 2000-08-15 2002-07-02 Lsi Logic Corporation Cleanliness verification system
JP4804950B2 (ja) * 2005-09-26 2011-11-02 東京応化工業株式会社 有機膜の液浸リソグラフィ溶解成分測定方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1211009A (en) * 1966-09-13 1970-11-04 Franklin Ray Elevitch Diffusion analysis device and method of testing by diffusion analysis
DE2644281C2 (de) * 1976-09-30 1979-02-01 Battelle-Institut E.V., 6000 Frankfurt Verfahren und Vorrichtung zur Entnahme und Gewinnung von Probenmaterial, insbesondere für wissenschaftliche oder diagnostische Untersuchungen
JPH0658927B2 (ja) * 1983-09-26 1994-08-03 株式会社東芝 半導体薄膜の分析方法および分析用試料の回収装置
JPS617639A (ja) * 1984-06-22 1986-01-14 Toshiba Corp 半導体薄膜の分解装置
US4990459A (en) * 1988-04-25 1991-02-05 Kabushiki Kaisha Toshiba Impurity measuring method

Also Published As

Publication number Publication date
JPH0625717B2 (ja) 1994-04-06
JPH01272939A (ja) 1989-10-31
US5055413A (en) 1991-10-08
DE68907437T2 (de) 1993-12-09
DE68907437D1 (de) 1993-08-12
EP0339561A3 (en) 1990-11-22
KR910004154B1 (en) 1991-06-22
EP0339561A2 (en) 1989-11-02
EP0339561B1 (en) 1993-07-07

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