KR890016037A - 아세탈 공중합체, 이의 제조방법 및 이를 포함하는 포토레지스트 - Google Patents
아세탈 공중합체, 이의 제조방법 및 이를 포함하는 포토레지스트 Download PDFInfo
- Publication number
- KR890016037A KR890016037A KR1019890004831A KR890004831A KR890016037A KR 890016037 A KR890016037 A KR 890016037A KR 1019890004831 A KR1019890004831 A KR 1019890004831A KR 890004831 A KR890004831 A KR 890004831A KR 890016037 A KR890016037 A KR 890016037A
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist
- acetal copolymer
- halogen
- preparation
- same
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D321/00—Heterocyclic compounds containing rings having two oxygen atoms as the only ring hetero atoms, not provided for by groups C07D317/00 - C07D319/00
- C07D321/02—Seven-membered rings
- C07D321/04—Seven-membered rings not condensed with other rings
- C07D321/06—1,3-Dioxepines; Hydrogenated 1,3-dioxepines
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G4/00—Condensation polymers of aldehydes or ketones with polyalcohols; Addition polymers of heterocyclic oxygen compounds containing in the ring at least once the grouping —O—C—O—
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Polyethers (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (8)
- 트리옥산을 하기 식의 화합물 공중합 시키는 것을 포함하는 골격 할로겐 관능기를 함유하는 아세탈 공중합체의 제조방법:상기식에서, R은 할로겐이다.
- 제 1 항의 방법에 의해 생성된 아세탈 공중합체.
- 트리옥산과 5,6-디브로모-1,3-디옥세펜을 공중합시키는 것을 포함하는 골격 브로모-관능기를 함유하는 아세탈 공중합체의 제조방법.
- 제 1 항의 방법에 의해 생산된 아세탈 공중합체.
- 골격 할로겐-관능기를 함유하는 폴리아세탈을 포함하는 포토레지스트.
- 제 5 항에 있어서, 할로겐이 브롬인 포토레지스트.
- 제 5 항에 있어서, 할로겐이 염소인 포토레지스트.
- 제 5 항에 있어서, 폴리아세탈이 트리옥산과 1,3-디옥세프-5-엔의 공중합체 또는 그의 유도체인 포토레지스트.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/181,237 US4906728A (en) | 1988-04-13 | 1988-04-13 | Acetal copolymers with backbone bromo functional groups |
| US181237 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR890016037A true KR890016037A (ko) | 1989-11-28 |
Family
ID=22663444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019890004831A KR890016037A (ko) | 1988-04-13 | 1989-04-12 | 아세탈 공중합체, 이의 제조방법 및 이를 포함하는 포토레지스트 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4906728A (ko) |
| EP (1) | EP0337754A3 (ko) |
| JP (1) | JPH0211629A (ko) |
| KR (1) | KR890016037A (ko) |
| CN (1) | CN1039600A (ko) |
| BR (1) | BR8901747A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5206308A (en) * | 1989-05-12 | 1993-04-27 | Hoechst Celanese Corporation | Grafting of amine functional polymers onto functionalized oxymethylene polymers and the resulting graft polymers thereof |
| JPH0761337A (ja) * | 1993-08-26 | 1995-03-07 | Aisin Seiki Co Ltd | 車輪ブレーキのリトラクト機構付きブレーキ装置 |
| AU2001288953A1 (en) * | 2000-09-08 | 2002-03-22 | Shipley Company, L.L.C. | Novel polymers and photoresist compositions comprising labile polymers backbonesfor short wave imaging |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA720516A (en) * | 1965-10-26 | Farbwerke Hoechst Aktiengesellschaft Vormals Meister Lucius And Bruning | Trioxane-1,3-dioxepane copolymers | |
| US3337587A (en) * | 1960-03-21 | 1967-08-22 | Union Carbide Corp | 2-hydrocarbon-5, 6-epoxy-1, 3-dioxepanes |
| NL271273A (ko) * | 1960-11-15 | |||
| BE631682A (ko) * | 1962-04-28 | |||
| DE2062958A1 (de) * | 1970-01-23 | 1971-07-29 | Perstorp Ab | Verfahren zur Herstellung von stabilen Trioxan Copolymeren |
| BE787798A (fr) * | 1971-08-19 | 1973-02-21 | Hoechst Ag | Procede de preparation d'homopolymeres et de copolymeres d'acetals cycliques |
| US4399272A (en) * | 1979-11-15 | 1983-08-16 | Asahi Kasei Kogyo Kabushiki Kaisha | Process for producing polyacetal copolymers |
| US4751272A (en) * | 1986-05-01 | 1988-06-14 | Toray Industries, Inc. | Process for producing oxymethylene copolymer and resinous composition |
-
1988
- 1988-04-13 US US07/181,237 patent/US4906728A/en not_active Expired - Lifetime
-
1989
- 1989-04-12 BR BR898901747A patent/BR8901747A/pt not_active Application Discontinuation
- 1989-04-12 JP JP1092775A patent/JPH0211629A/ja active Pending
- 1989-04-12 EP EP89303605A patent/EP0337754A3/en not_active Ceased
- 1989-04-12 CN CN89102216A patent/CN1039600A/zh active Pending
- 1989-04-12 KR KR1019890004831A patent/KR890016037A/ko not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| BR8901747A (pt) | 1989-11-28 |
| CN1039600A (zh) | 1990-02-14 |
| EP0337754A3 (en) | 1990-03-14 |
| JPH0211629A (ja) | 1990-01-16 |
| EP0337754A2 (en) | 1989-10-18 |
| US4906728A (en) | 1990-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITB | Written withdrawal of application |