KR890004785B1 - Sensitizing agent for electroless plating and method for sensitizing substrate with the agent - Google Patents

Sensitizing agent for electroless plating and method for sensitizing substrate with the agent Download PDF

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KR890004785B1
KR890004785B1 KR1019850004562A KR850004562A KR890004785B1 KR 890004785 B1 KR890004785 B1 KR 890004785B1 KR 1019850004562 A KR1019850004562 A KR 1019850004562A KR 850004562 A KR850004562 A KR 850004562A KR 890004785 B1 KR890004785 B1 KR 890004785B1
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copper
sensitizer
electroless plating
substrate
agent
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KR860000409A (en
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이사오 마쓰자끼
겐지 도노끼
다께히꼬 이시바시
하루끼 요꼬노
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히다찌 가세이 고오교 가부시끼가이샤
요꼬야마 료오지
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/28Sensitising or activating
    • C23C18/30Activating or accelerating or sensitising with palladium or other noble metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/28Sensitising or activating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/422Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0392Pretreatment of metal, e.g. before finish plating, etching

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A sensitizing agent for an electroless plating consists of a water or alcohol and a soln. of one or more of palladium(II), silver(I), copper(I), copper(II) or niclel(II) cpds. dissolved in an amide solvent. The concentration of the metal cpd. in the agent is 0.01- 1.0 wt.%, and the agent has PH 11-13. The agent is useful for plating through-holes in multilayer printed circuit boards.

Description

무전해 도금용 증감(增感)제 및 기질의 증감법Sensitizers and Substrates for Electroless Plating

본 발명은 무전해 도금용 증감제와 증감제로써 기질을 증감시키는 방법에 관한 것이다.The present invention relates to a sensitizer for electroless plating and a method for sensitizing a substrate with a sensitizer.

플래스틱 박판 등과 같은 전기 절연 기질에 회로를 형성시키는 인쇄회로기판의 제작 분야에는 무전해 구리도금을 포함한 무전해 도금 기술이 광범위하게 이용된다. 이경우에 무전해 도금할 기질을 무전해 도금욕에 침지하기 전에 증감처리, 즉 기질상에 무전해 도금에 대한 촉매핵(catalytic nuclei)을 형성시키는 처리를 한다. 이를테면, 욕중의 등이온이 상기 촉매핵 주위에서 금속등으로 석출하여 등막(copper film)으로 성장함으로써 회로가 형성된다. 전기절연 기질을 증감시키기 위해서는 무전해 도금의 촉매핵으로서 작용하는 미립의 금속 팔라듐, 은, 구리, 또는 니켈이 기질의 표면에 형성되어야 한다. 일예로서 종래 기술에서 상기 목적을 위한 팔라듐 입자는 다음과 같은 반응식에 따라 생성한다.Electroless plating techniques including electroless copper plating are widely used in the field of manufacturing printed circuit boards that form circuits on electrically insulating substrates such as plastic thin plates. In this case, before the substrate to be electroless plated is immersed in the electroless plating bath, a sensitization treatment is performed, i.e., a catalyst nuclei for electroless plating is formed on the substrate. For example, a circuit is formed by isothermal ions in a bath precipitated with a metal or the like around the catalyst nucleus to grow into a copper film. To increase or decrease the electrically insulating substrate, particulate metal palladium, silver, copper, or nickel, which acts as a catalyst nucleus for electroless plating, must be formed on the surface of the substrate. As an example, palladium particles for this purpose in the prior art are produced according to the following scheme.

Figure kpo00001
Figure kpo00001

상기 PdCl2-SnCl2-HCl 증감시스템은 미합중국 특허 제3, 011, 920호 및 제3, 960, 573호에 개재되어 있다. Sn 및 Cl을 포함한 많은 불순물을 함유하는 PdCl2-SnCl2-HCl 증감시스템은 강산성이기 때문에 시스템에 노출되는 장치가 손상되고, 다층 회로 기판에서 내층 회로에 핑크-링(pink-ring)현상이 야기된다.The PdCl 2 -SnCl 2 -HCl-sensitized systems are disposed in U.S. Patent No. 3, 011, 920 and No. 3, 960, 573 call. PdCl 2 -SnCl 2 -HCl-sensitized system is damaged device that is exposed to the system because it is a strong acid, in an inner layer circuit in the multilayer circuit board pink containing many impurities, including Sn and Cl - present a ring (pink-ring) developing do.

내층 회로의 핑크-링현상은 다음과 같이 발생한다.The pink-ring phenomenon of the inner layer circuit occurs as follows.

다층 인쇄 회로기판의 제작 방법은 동접합(clad) 박판을 식각(부식)(etching)하여 회로를 형성시키고, 상기 내층 회로와 프리프래그(prepreg)(종이 및 유리섬유와 같은 기지재료를 열경화성 수지에 함침시켜 건조한 제품)을 하나씩 번갈아 중첩시키며, 맨 윗층에는 등박(copper foil) 또는 한쪽에 구리가 접합된 박판을 중첩시키고, 상기 적층제의 전체를 가열 및 단일체로 압착하며, 윗층의 동을 처리하여 내층 회로의 패턴에 상응하는 회로를 형성시킨 다음, 희망하는 위치에서 층을 뚫어(내층 회로의 일부를 포함) 관통구를 형성시키고, 이어서 무전해 도금으로써 각 관통구의 내벽상에 금속층을 형성시킨다. 상기 공정에서 내층 회로의 표면에 동산화물(통상 1∼3㎛두께)을 피복하여 각각의 내층회로와 이것과 접하고 있는 프리프레그와의 접착력을 향상시킨다. 각 관통구의 내벽은 무전해 도금하기 전에 증감시킨다. 상기 증감 처리에 PdCl2-SnCl2-HCl 증감 시스템이 사용될 때, 관통구에 노출된 산화물 피복의 일부가 염산에 용해되고, 내층 회로의 표면과 프리프래그 수지층 간의 계면에 염산이 확산하여 박리(delamination)현상을 야기시킨다. 이것이 핑크-링 현상이며, 이러한 현상이 야기될 때 접착강도와 절연 저항이 저하될 것이다.In the method of manufacturing a multilayer printed circuit board, a circuit is formed by etching (clad) a copper clad thin plate, and the base material such as the inner layer circuit and prepreg (paper and glass fiber) is transferred to a thermosetting resin. Impregnated and dried), one by one, and the top layer is overlapped with a copper foil or a copper-bonded thin plate on one side, and the whole laminate is heated and pressed into a single body, and the copper of the top layer is treated. A circuit corresponding to the pattern of the inner layer circuit is formed, and then a layer is drilled (including a portion of the inner layer circuit) at a desired position to form a through hole, followed by electroless plating to form a metal layer on the inner wall of each through hole. In the above step, copper oxide (usually 1 to 3 mu m thickness) is coated on the surface of the inner layer circuit to improve the adhesion between each inner layer circuit and the prepreg in contact with the inner layer circuit. The inner wall of each through hole is increased or decreased before electroless plating. When the PdCl 2 -SnCl 2 -HCl-sensitized system is used to increase or decrease the process, a portion of the oxide coating on the exposed through-hole is dissolved in hydrochloric acid, hydrochloric acid, separation by diffusion at the interface between the surface of the prepregs and the resin layer of the inner layer circuit ( cause delamination. This is a pink-ring phenomenon, and when this occurs, the adhesive strength and insulation resistance will be reduced.

본 발명의 목적은 노출된 장치의 손상을 극소화 시키고 핑크-링 현상을 야기시키지 않은 무전해 도금용 증감제를 제공하기 위함이다.It is an object of the present invention to provide a sensitizer for electroless plating that minimizes damage to the exposed device and does not cause pink-ring phenomena.

본 발명의 다름 목적은 상기 증감제로써 기질을 증감시키는 방법을 제공하기 위한 것이다.Another object of the present invention is to provide a method for sensitizing a substrate with the sensitizer.

본 발명에 따른 무전해 도금용 증감제로는 아미드에 용해된 팔라듐(Ⅱ)화합물, 동(Ⅰ)화합물, 동(Ⅰ)화합물, 동(Ⅱ)화합물 및 니켈(Ⅱ)화합물 중 적어도 하나의 용액으로 구성한다.The sensitizer for electroless plating according to the present invention may be a solution of at least one of palladium (II) compounds, copper (I) compounds, copper (I) compounds, copper (II) compounds and nickel (II) compounds dissolved in amides. Configure.

본 발명에 적합한 아미드로는 포름아미드, 디메틸 포름아미드, 디에틸포름아미드, 디메틸아세트아미드, 디메틸아릴아미드 및 이들 아미드의 혼합물로 구성된다.Amides suitable for the present invention consist of formamide, dimethyl formamide, diethylformamide, dimethylacetamide, dimethylarylamide and mixtures of these amides.

본 발명에 적합한 팔라듐(Ⅱ), 은(Ⅰ), 동(Ⅰ), 동(Ⅱ), 니켈(Ⅱ)의 화합물로서는 염화물, 불화물, 브롬화물, 요오드화물, 질산염, 황산염, 산화물, 황화물 및 상기 화합물의 혼합물이 있다. 특히 상기 화합물 중에서 염화물이 바람직하다.Suitable compounds of palladium (II), silver (I), copper (I), copper (II) and nickel (II) suitable for the present invention include chlorides, fluorides, bromide, iodides, nitrates, sulfates, oxides, sulfides and the like. There is a mixture of compounds. Especially chloride is preferable among the said compounds.

상기 화합물을 전술한 각각의 아미드에 용해하고, 그 용액을 물 또는 알콜로 희석하여 화합물의 농도가 0.01∼1.0wt%, pH가 3∼14, 바람직하게는 11∼13, 가장 바람직한 것은 11.5∼12.5인 증감제를 제조한다. 상기 아미드에 용해된 화합물은 아미드와 착물(complex)을 형성하는 것으로 생각된다.The compound is dissolved in each of the amides described above, and the solution is diluted with water or alcohol so that the concentration of the compound is 0.01-1.0 wt%, pH is 3-14, preferably 11-13, most preferably 11.5-12.5. To prepare a phosphor sensitizer. Compounds dissolved in these amides are believed to form complexes with the amide.

플래스틱 박판, 세라믹판, 플래스틱 성형제품 및 플래스틱 필름과 같이 도금시킬 기질을 증감제에 담군 다음, 환원 용액에 침지시켜서 팔라듐, 은, 구리 및/또는 니켈의 금속핵을 기질 표면에 형성시킨다.Substrates to be plated, such as plastic sheets, ceramic plates, plastic molded articles and plastic films, are immersed in a sensitizer and then immersed in a reducing solution to form metal nuclei of palladium, silver, copper and / or nickel on the substrate surface.

여기에서 사용되는 적절한 환원 용액으로서는 포름알데히드, 염화주석(Ⅱ), NaBH4, 포도당 등의 수용액 또는 알코올 용액을 사용한다. 그 농도는 0.01∼10wt%가 좋으며, 바람직하게는 0.1∼1wt%이고, pH는 3∼14가 좋다.Examples of suitable reducing solution used herein is an aqueous solution or an alcohol solution such as formaldehyde, tin chloride (Ⅱ), NaBH 4, glucose. The concentration is preferably 0.01-10 wt%, preferably 0.1-1 wt%, and pH 3-14.

상기 환원 물질은 단독으로 사용할 수도 있고, 서로를 조합하여 사용하거나 또는 완충 작용을 하는 안정화제와 조합하여 사용할 수 있는데, 예를들면 포름알데히드에는 메탄올, 염화주석(Ⅱ)에는 염산 또는 NaBH4에는 수산화나트륨을 조합하여 사용할 수 있다.The reducing substances may be used alone or in combination with each other, or in combination with a stabilizer that acts as a buffer, for example, methanol in formaldehyde, hydrochloric acid in tin (II) chloride or hydroxide in NaBH 4 . Sodium may be used in combination.

무전해 도금은 도금을 위해 팔라듐 등의 핵이 형성되어 있는 기질을 무전해 도금욕에 침지시켜 수행하며, 무전해 도금욕은 통상사용되는 구리, 니켈 등의 무전해 도금용액일 수 있다.Electroless plating is performed by immersing a substrate in which nucleus such as palladium is formed for plating in an electroless plating bath, and the electroless plating bath may be an electroless plating solution such as copper or nickel which is commonly used.

상기한 본 발명의 무전해 도금용 증감제에 침지하기 전에 도금시킬 기질을 예비 처리함으로써 증감 효과를 더욱 개선할 수 있다.The sensitization effect can be further improved by pretreating the substrate to be plated before immersing it in the electroless plating sensitizer of the present invention.

이러한 예비처리를 위해서는 0.1∼10% 과산화수소 수용액, 이와 동일한 농도이며 황산으로 pH을 3∼6으로 조절한 과산화수소 수용액, pH3∼6의 염산, pH3∼6의 황산, 물 알코올 또는 메틸 에틸 케톤 중의 0.1∼10% 비스페놀 A형 에폭시수지 용액 0.1∼10% 및 전술한 환원 용액을 사용할 수 있다.For this pretreatment, 0.1 to 10% aqueous hydrogen peroxide solution, the same concentration and hydrogen peroxide solution adjusted to pH 3-6 with sulfuric acid, hydrochloric acid pH3-6, sulfuric acid pH3-6, water alcohol or methyl ethyl ketone 0.1 to 10% of the 10% bisphenol A epoxy resin solution and the above-described reducing solution can be used.

무전해 도금용 증감제 및 환원 용액에 침지하는 대신에 상기 용액을 기질에 분사시킬 수도 있다.Instead of immersing in the sensitizer and reducing solution for electroless plating, the solution may be sprayed onto the substrate.

[실시예 1]Example 1

사전에 수산화나트륨, 염화칼륨 및 인산나트륨의 혼합물 수용액에 담구어 각각의 동 표면에 산화물 피복을 형성시킨 양면에 동접합된 유리 에폭시 박판(두께 1.6mm)에 관통구를 뚫은 다음, 포름아미드 중의 2.0 중량% PdCl2용액을 물로써 PdCl2농도를 0.1% 및 pH를 12.5로 희석시켜 준비한 증감제 용액에 5분 동안 침지하였다. 액체를 제거한 다음, 1% NaOH 수용액 중의 1% NaBH4용액에서 박판을 흔들면서 5분간 침지한 후, 무전해 도금 용액 CUST-201(Hirachi Chemical Co., Ltd. 의 상표명)에 20분 동안 침지한 후, 물로 씻었다. 무전해 동도금의 결과, 유리 에폭시 박판의 관통구 내벽에 구리가 균일하게 석출하였으며, 동표면을 덮고 있는 산화물 피복의 화학적 침식은 관측되지 않았다.The through-holes were drilled through a glass epoxy thin film (1.6 mm thick), which was previously immersed in an aqueous solution of a mixture of sodium hydroxide, potassium chloride and sodium phosphate, and formed an oxide coating on each copper surface, followed by 2.0 weight in formamide. The% PdCl 2 solution was immersed in water for 5 minutes in a sensitizer solution prepared by diluting the PdCl 2 concentration with water to 0.1% and the pH to 12.5. After the liquid was removed, the plate was immersed in a 1% NaBH 4 solution in 1% NaOH aqueous solution for 5 minutes while shaking the plate, and then immersed in the electroless plating solution CUST-201 (Hirachi Chemical Co., Ltd.) for 20 minutes. After, washed with water. As a result of the electroless copper plating, copper was uniformly deposited on the inner wall of the through-hole of the glass epoxy sheet, and no chemical erosion of the oxide coating covering the copper surface was observed.

[실시예 2]Example 2

실시예 1에서와 같이 양면에 동접합된 유리 에폭시 박판(두께 1.6mm)에 산화물을 피복하여 관통구를 뚫는다음 세척하였다.As in Example 1, an oxide was coated on a glass epoxy thin plate (1.6 mm thick) copper-bonded on both sides to drill through-holes, followed by washing.

이어서 0.1%NaOH 수용액 중의 1.0% NaBH4용액으로 상기 박판을 처리하였다.The thin plates were then treated with a 1.0% NaBH 4 solution in 0.1% NaOH aqueous solution.

포름아미드 중의 1% PdCl2용액을 0.3% NaOH수용액으로 PdCl2농도가 0.05% 및 pH를 1.2로 희석하여 증감제를 제조하였다.A sensitizer was prepared by diluting a 1% PdCl 2 solution in formamide with 0.05% aqueous NaOH solution and diluting PdCl 2 concentration to 0.05% and pH 1.2.

상기 증감제에 박판을 침지하여 5분 동안 잘 흔들어 주었다. 액체를 제거시킨 후, 0.1% NaCH 수용액 중의 10% NaBH4환원 용액으로 상기 박판을 처리하고, 이어서 무전해 동도금 용액 CUST-201(실시예 1과동일)에 침지시 킨 후, 물로 세척하였다. 상기 무전해 동도금의 결과, 박판의 관통구 내벽에 균일하게 구리가 석출하였으며, 동표면을 덮고 있는 산화물 박막의 화학적 침식은 관측되지 않았다.The thin plate was immersed in the sensitizer and shaken well for 5 minutes. After removing the liquid, the thin plate was treated with a 10% NaBH 4 reducing solution in 0.1% NaCH aqueous solution, and then immersed in electroless copper plating solution CUST-201 (the same as Example 1), followed by washing with water. As a result of the electroless copper plating, copper was uniformly deposited on the inner wall of the through hole of the thin plate, and no chemical erosion of the oxide thin film covering the copper surface was observed.

본 발명에 따른 효과는 다음과 같다.Effects according to the present invention are as follows.

(1) 용액의 pH가 3∼14로서 무전해 도금용 증감제에 노출된 장치의 손상이 감소된다.(1) The damage of the apparatus exposed to the electroless plating sensitizer with the pH of solution 3-14 is reduced.

(2) 도금을 균일하게 할 수 있다.(2) Plating can be made uniform.

(3) 다층 회로 기판의 내층 회로의 화학적 침식이 일어나지 않는다.(3) No chemical erosion of the inner layer circuit of the multilayer circuit board occurs.

Claims (6)

아미드에 용해된 팔라듐(Ⅱ)화합물, 은(Ⅰ)화합물, 동(Ⅰ)화합물, 동(Ⅱ)화합물 및 니켈(Ⅱ)화합물 중에서 선택된 하나 이상의 용액과 물 또는 알코올로 구성되며 동산화합물을 화학적으로 침식하지 않은 무전해 도금용 증감제로서, 이 증감제의 pH범의가 11∼13이고, 증감제에서 상기 금속화합물의 농도 범위가 0.01∼1.0중량%임을 특징으로 하는 무전해 도금용 증감제.Palladium (II) compound, silver (I) compound, copper (I) compound, copper (II) compound and nickel (II) compound dissolved in amide, and water or alcohol. A sensitizer for electroless plating without erosion, wherein the pH range of the sensitizer is 11 to 13, and the concentration range of the metal compound in the sensitizer is 0.01 to 1.0% by weight. 제1항에 있어서, 상기 아미드가 포름아미드, 디메틸 포름아미드, 디에틸 포름아미드, 디메틸 아세트아미드 및 디메틸 아릴아미드로 구성되는 군에서 하나 이상 선택된 것임을 특징으로 하는 무전해 도금용 증감제.The sensitizer for electroless plating according to claim 1, wherein the amide is at least one selected from the group consisting of formamide, dimethyl formamide, diethyl formamide, dimethyl acetamide and dimethyl arylamide. 제2항에 있어서, 상기 금속 화합물이 그 금속의 염화물, 불화물, 브롬화물, 요오드화물, 질산염, 황산염, 산화물 및 황화물로 구성되는 군에서 하나 이상 선택된 것임을 특징으로 하는 무전해 도금용 증감제.The sensitizer for electroless plating according to claim 2, wherein the metal compound is at least one selected from the group consisting of chloride, fluoride, bromide, iodide, nitrate, sulfate, oxide and sulfide of the metal. 무전해 도금할 기질을 증감시키기 위한 것으로서, 아미드에 용해된 팔라듐(Ⅱ)화합물, 은(Ⅰ)화합물, 동(Ⅰ)화합물, 동(Ⅱ)화합물 및 니켈(Ⅱ)화합물 중에서 선택된 하나 이상의 용액과 물 또는 알코올로 구성되고 동산화물을 화학적으로 침식하지 않으며 pH범위가 11∼13이고 상기 금속화합물의 농도 범위가 0.01∼1.0중량%인 증감제를 이용하여 상기 기질을 처리한 다음, 환원 용액으로 상기 기질을 처리하여 상기 금속을 금속 형태로 기질에 부여함을 특징으로 하는 무전해 도금할 기질의 증감법.One or more solutions selected from the group consisting of palladium (II) compounds, silver (I) compounds, copper (I) compounds, copper (II) compounds, and nickel (II) compounds dissolved in amides for increasing or decreasing the substrate to be electroless plated. The substrate is treated with a sensitizer, consisting of water or alcohol, which does not chemically corrode copper oxide, has a pH range of 11-13, and a concentration range of 0.01-1.0% by weight of the metal compound. Treating the substrate to impart the metal in the form of a metal to the substrate. 제4항에 있어서, 상기 아미드가 포름아미드, 디메틸 포름아미드, 디에틸 포름아미드, 디메틸 아세트아미드 및 디메틸 아릴아미드로 구성되는 군에서 하나 이상 선택된 것임을 특징으로 하는 무전해 도금할 기질의 증감법.The method of claim 4, wherein the amide is at least one selected from the group consisting of formamide, dimethyl formamide, diethyl formamide, dimethyl acetamide and dimethyl arylamide. 제5항에 있어서, 상기 금속 화합물이 그 금속의 염화물, 불화물, 브롬화물, 요오드화물, 질산염, 황산염, 산화물 및 황화물로 구성되는 군에서 하나 이상 선택된 것임을 특징으로 하는 무전해 도금할 기질의 증감법.The method according to claim 5, wherein the metal compound is at least one selected from the group consisting of chloride, fluoride, bromide, iodide, nitrate, sulfate, oxide and sulfide of the metal. .
KR1019850004562A 1984-06-29 1985-06-26 Sensitizing agent for electroless plating and method for sensitizing substrate with the agent KR890004785B1 (en)

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JP59-136041 1984-06-29
JP59136041A JPS6115982A (en) 1984-06-29 1984-06-29 Electroless plating method
JP136041/84 1984-06-29

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