KR890001622A - 폐가스 처리방법 - Google Patents

폐가스 처리방법 Download PDF

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Publication number
KR890001622A
KR890001622A KR1019880009459A KR880009459A KR890001622A KR 890001622 A KR890001622 A KR 890001622A KR 1019880009459 A KR1019880009459 A KR 1019880009459A KR 880009459 A KR880009459 A KR 880009459A KR 890001622 A KR890001622 A KR 890001622A
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KR
South Korea
Prior art keywords
waste gas
calcium
magnesium
compound
treatment method
Prior art date
Application number
KR1019880009459A
Other languages
English (en)
Other versions
KR960010382B1 (ko
Inventor
나가 아끼라 후꾸
요우이찌 모리
Original Assignee
니야마 사다마사
가부시기 가이샤 에바라 세이사꾸쇼
야마꾸지 게이
가부시기 가이샤 에바라소오고오 겐규쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니야마 사다마사, 가부시기 가이샤 에바라 세이사꾸쇼, 야마꾸지 게이, 가부시기 가이샤 에바라소오고오 겐규쇼 filed Critical 니야마 사다마사
Publication of KR890001622A publication Critical patent/KR890001622A/ko
Application granted granted Critical
Publication of KR960010382B1 publication Critical patent/KR960010382B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)

Abstract

내용 없음

Description

페가스 처리방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명에 사용되는 장치의 개략도이다.

Claims (3)

  1. 먼저 페가스를 탑내에 충전된 마그네슘 화합물 함유 처리제와 처리하고, 이어서 페가스를 같거나 또는 다른 탑내에 충전된 칼슘 화합물을 함유한 처리제와 처리하는 것으로 이루어지고, 상기 탑내의 온도는 약 20 내지 80℃ 범위이고, 페가스는 약 0.9 내지 2기압의 압력으로 탑을 통과시키며, 그리고 처리계의 입경은 약 0.3㎜ 내지 5.0㎜인, 적어도 산염화붕소와 염소를 함유하는 페가스의 처리방법.
  2. 제 1 항에 있어서, 마그네슘 화합물의 수산화마그네슘, 산화마그네슘, 탄산마그네슘 및 이들의 혼합물로 구성되는 그룹에서 선택되고, 칼슘 화합물이 수산화칼슘, 산화칼슘, 탄산칼슘 및 이들의 혼합물로 구성되는 그룹에서 선택되는 페가스의 처리방법.
  3. 제 1 항 또는 제 2 항에 있어서, 페가스가 반도체 제조공정에서 염화물 그리고/또는 염소 함유 가스를 사용하는 화학 건식 식각 단계로부터 배출되는 것인 페가스의 처리방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880009459A 1987-07-28 1988-07-27 폐가스 처리방법 KR960010382B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62186587A JPS6430626A (en) 1987-07-28 1987-07-28 Treatment of exhaust gas
JP87-186587 1987-07-28
JP62-186587 1987-07-28

Publications (2)

Publication Number Publication Date
KR890001622A true KR890001622A (ko) 1989-03-28
KR960010382B1 KR960010382B1 (ko) 1996-07-31

Family

ID=16191159

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880009459A KR960010382B1 (ko) 1987-07-28 1988-07-27 폐가스 처리방법

Country Status (5)

Country Link
US (1) US4861578A (ko)
EP (1) EP0303368B1 (ko)
JP (1) JPS6430626A (ko)
KR (1) KR960010382B1 (ko)
DE (1) DE3875192T2 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8813270D0 (en) * 1988-06-04 1988-07-06 Plasma Products Ltd Dry exhaust gas conditioning
GB8927314D0 (en) * 1989-12-02 1990-01-31 Plasma Products Limited Exhaust gas conditioning
US5486340A (en) * 1989-12-02 1996-01-23 The Boc Group Plc Exhaust gas conditioning
JPH04156919A (ja) * 1990-10-19 1992-05-29 Ebara Res Co Ltd ハロゲン系化合物を含有する排ガスの処理方法
US5378444A (en) * 1991-12-11 1995-01-03 Japan Pionics Co., Ltd. Process for cleaning harmful gas
ATE205419T1 (de) * 1994-01-10 2001-09-15 Advanced Tech Materials Metallo-oxomerische scrubberzusammensetzungen und methode zur gasreinigung unter verwendung dieser zusammensetzungen
US5688479A (en) * 1994-12-22 1997-11-18 Uop Process for removing HCl from hydrocarbon streams
IL117775A (en) * 1995-04-25 1998-10-30 Ebara Germany Gmbh Inhalation system with gas exhaust cleaner and operating process for it
JP5765724B2 (ja) * 2010-06-11 2015-08-19 一般財団法人電力中央研究所 ガスの処理方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744976A (en) * 1970-11-23 1973-07-10 Grace W R & Co Venting device
CH559573A5 (en) * 1973-09-14 1975-03-14 Luehr Heinrich Vdi Staubtechni Sulphur and chlorine cpds removal - from dust laden gas treams
US3847552A (en) * 1973-11-23 1974-11-12 Ibm Environmental monitoring device and method
DE3137812A1 (de) * 1981-09-23 1983-03-31 Vereinigte Elektrizitätswerke Westfalen AG, 4600 Dortmund "verfahren zum abscheiden von chlor, fluor und schwefel aus brenn- und rauchgasen"
DE3308927A1 (de) * 1983-03-12 1984-09-13 L. & C. Steinmüller GmbH, 5270 Gummersbach Verfahren zur bindung von in rauchgasen enthaltenen gasfoermigen schadstoffen
US4594231A (en) * 1983-09-22 1986-06-10 Takeda Chemical Industries, Ltd. Method for removal of poisonous gases
JPS6135849A (ja) * 1984-07-27 1986-02-20 Ube Ind Ltd ドライエツチング排ガス処理剤
JPS6161619A (ja) * 1984-09-04 1986-03-29 Asahi Glass Co Ltd 排ガスの処理方法

Also Published As

Publication number Publication date
EP0303368A1 (en) 1989-02-15
DE3875192D1 (de) 1992-11-12
KR960010382B1 (ko) 1996-07-31
US4861578A (en) 1989-08-29
DE3875192T2 (de) 1993-03-04
JPS6430626A (en) 1989-02-01
EP0303368B1 (en) 1992-10-07

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