KR880014663A - Automatic inspection device for inspected objects such as wafer or substrate by computer control - Google Patents

Automatic inspection device for inspected objects such as wafer or substrate by computer control Download PDF

Info

Publication number
KR880014663A
KR880014663A KR870005407A KR870005407A KR880014663A KR 880014663 A KR880014663 A KR 880014663A KR 870005407 A KR870005407 A KR 870005407A KR 870005407 A KR870005407 A KR 870005407A KR 880014663 A KR880014663 A KR 880014663A
Authority
KR
South Korea
Prior art keywords
plate
computer control
inspection device
automatic inspection
wafer
Prior art date
Application number
KR870005407A
Other languages
Korean (ko)
Other versions
KR890005216B1 (en
Inventor
더블유 타일러 아서
Original Assignee
정문술
디에스코리아 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 정문술, 디에스코리아 주식회사 filed Critical 정문술
Priority to KR1019870005407A priority Critical patent/KR890005216B1/en
Publication of KR880014663A publication Critical patent/KR880014663A/en
Application granted granted Critical
Publication of KR890005216B1 publication Critical patent/KR890005216B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

내용 없음No content

Description

컴퓨터 제어에 의한 웨이퍼나 기판등 피검사물의 자동 검사장치Automatic inspection device for inspected objects such as wafer or substrate by computer control

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 사시도, 제2도는 피검사물 홀더와 홀더의 구동부를 나타낸 상부체의 저면 사시도, 제3도는 홀더부분만을 도시한 분해 사시도.Figure 1 is a perspective view of the present invention, Figure 2 is a bottom perspective view of the upper body showing the inspection object holder and the driving portion of the holder, Figure 3 is an exploded perspective view showing only the holder portion.

Claims (3)

검사기(1)를 하부케이스(2)와 상부케이스(5)로 분할 형성하여 힌지(6)로 결합하고 상부 케이스(5) 내에는 전·후 방향으로 이동하는 지지대(8)와 좌·우 방향으로 이동하는 작동판(13) 그리고 상판(17)과 하판(18)으로 구성된 홀더를 설치하여 피검사물을 콘베어의 상방에서 클램핑할 수 있도록 함을 특징으로 하는 컴퓨터 제어에 의한 웨이퍼나 기판등 피검사물의 자동 검사장치.The inspection machine 1 is divided into a lower case 2 and an upper case 5, coupled to the hinge 6, and the support 8 moving in the front and rear directions in the upper case 5 and the left and right directions. A test object such as a wafer or a substrate controlled by a computer control, characterized by installing a holder consisting of an operating plate 13 and an upper plate 17 and a lower plate 18 that move to the upper surface of the conveyor. Automatic inspection device. 제1항에 있어서, 홀더를 구성하는 상판(17)의 저면에 걸림돌기(17a)를 형성하고 하판(18)에는 한쌍의 돌출부(18a)를 형성하여 하판(18)을 전진시키면 하판(18)의 돌출부(18a)가 걸림돌기(17a)에 끼워짐과 동시에 피검사물이 클램핑될 수 있도록 한 컴퓨터 제어에 의한 웨이퍼나 기판등 피검사물의 자동 검사장치.The lower plate 18 according to claim 1, wherein the locking plate 17a is formed on the bottom surface of the upper plate 17 constituting the holder, and the lower plate 18 is provided with a pair of protrusions 18a to advance the lower plate 18. An automatic inspection device for inspected objects such as a wafer or a substrate by computer control in which the projecting portion (18a) of the projected portion (18a) is fitted to the engaging projection (17a) and clamps the inspected object. 제1항에 있어서, 상판(17)의 후방에 실린더 고정판(19)을 연결하여 에어실린더(20)를 고정하고 실린더 고정판(19)과 지지대(8) 사이에는 에어실린더(20)에 의해 진퇴하는 이동편(21)을 설치하여 이동편(21)의 진퇴에 따라 피검사물의 각도를 조절할 수 있게 한 컴퓨터 제어에 의한 웨이퍼나 기판등 피검사물의 자동 검사장치.The method of claim 1, wherein the cylinder holding plate 19 is connected to the rear of the upper plate 17 to fix the air cylinder 20, and between the cylinder holding plate 19 and the support 8 to advance and retreat by the air cylinder 20. An automatic inspection device for inspected objects such as wafers and substrates by computer control by providing a movable piece (21) to adjust the angle of the inspected object as the movable piece (21) moves forward and backward. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019870005407A 1987-05-29 1987-05-29 Apparatus for testing of semiconductor KR890005216B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019870005407A KR890005216B1 (en) 1987-05-29 1987-05-29 Apparatus for testing of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019870005407A KR890005216B1 (en) 1987-05-29 1987-05-29 Apparatus for testing of semiconductor

Publications (2)

Publication Number Publication Date
KR880014663A true KR880014663A (en) 1988-12-24
KR890005216B1 KR890005216B1 (en) 1989-12-18

Family

ID=19261755

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870005407A KR890005216B1 (en) 1987-05-29 1987-05-29 Apparatus for testing of semiconductor

Country Status (1)

Country Link
KR (1) KR890005216B1 (en)

Also Published As

Publication number Publication date
KR890005216B1 (en) 1989-12-18

Similar Documents

Publication Publication Date Title
KR930021319A (en) Parts assembly device
ATE105054T1 (en) CARRIER STRIPS FOR POWDER-POWERED SETTING TOOLS.
EP0111661A3 (en) Photometric printing apparatus
KR920016188A (en) Workpiece support
KR880014663A (en) Automatic inspection device for inspected objects such as wafer or substrate by computer control
KR900000999A (en) Semiconductor Wafer Processing System
FR2363405A1 (en) METHOD FOR ESTABLISHING A BASE LINE IN AN AUTOMATIC MACHINE-TOOL CONTROL, AND THIS MACHINE-TOOL
GB2217448B (en) Apparatus for finely actuating glass electrode or the like
FI933009A (en) GLISATYCKE FOER DRAGKEDJA
KR900016995A (en) Cassette loading device
ATE38483T1 (en) VICE, ESPECIALLY MACHINE VICE.
KR890011020A (en) Horizontal Wafer Feeder of Silicon Wafer
SE7905258L (en) VOLTAGE FOR TOOL MACHINES
KR950005439A (en) Chip changer
JPS6474784A (en) Fixing structure for positioning semiconductor laser chip and input lens
JPS6433941A (en) Positioning apparatus of wafer boat
JPS57211440A (en) Automatic assembly device
ATE269777T1 (en) SUPPORT DEVICE FOR A ROD-LIKE WORKPIECE ON A PROCESSING MACHINE
KR860001528Y1 (en) Arrangment device for forming lead wire
KR950007931Y1 (en) An position detining apparatus for parts of a heteromorphy parts insertion
JPS6436016A (en) Aligner for semiconductor wafer
JPH0314077Y2 (en)
JPS6462626A (en) Glass stage for long strip film
ATE30761T1 (en) LAMP HOLDER.
JPS57201023A (en) Cassette holder for electron beam drawing apparatus

Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20051201

Year of fee payment: 17

LAPS Lapse due to unpaid annual fee