KR880003020A - Silicon Purification Method and Apparatus - Google Patents

Abstract

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Description

Silicon Purification Method and Apparatus

Since this is an open matter, no full text was included.

1 is a vertical sectional view showing a first specific example of the apparatus used in the practice of the method of the present invention,

2 is a vertical sectional view showing a second specific example of the apparatus used in the practice of the method of the present invention,

3 is a vertical sectional view showing a third specific example of the apparatus used in the embodiment of the method of the present invention.

Claims (10)

The crude silicon to be purified is dissolved, and the molten crude silicon is kept in a state exceeding the solidification temperature in an inert gas atmosphere, and the hollow rotary cooling body is immersed in the molten auxiliary silicon, and the cooling fluid is inside the hollow rotary cooling body. A method of stagnation of silicon consisting of rotating the rotary cooling body while sending a high purity silicon on its surface. The method for purifying silicon according to claim 1, wherein the circumferential speed of the cooling body at the time of rotation is 500-600 mm / sec. The method for purifying silicon according to claim 1, wherein the circumferential speed of the cooling body during rotation is 500-1500 mm / sec. The method of purifying silicon according to claim 1, wherein the inert gas is argon gas. A melting furnace having a heating element; The apparatus includes a device in which a crucible is placed in a melting furnace and a molten silicon charged in the crucible is placed under an inert gas atmosphere, a hollow rotating cooling body disposed in the crucible, and a device supplying a cooling fluid in the hollow rotating cooling body. A refiner of silicon for purifying crude silicon characterized by obtaining high purity silicon. A melting furnace body having an upper end opening, a lid blocking an upper opening of the main body, a melting furnace having a heating element therein; a crucible having an upper end opening and disposed in the melting furnace; An inert gas supply pipe for supplying an inert gas into the melting furnace, a hollow rotary coolant that is rotatable through the lid and disposed in the crucible, and a cooling fluid supply pipe that is disposed in the hollow rotary coolant and supplies cooling fluid to the hollow rotary coolant Refining device of silicon for purifying crude silicon, characterized in that consisting of high purity silicon. 7. The lid of claim 6, wherein at least one molten silicon flux reducing baffle is provided on the lid. 持: suspended support) silicon, which is installed in a suspended state via a member, the upper end of which is below the liquid level of the molten silicon in the crucible, and the lower end is slightly lower than the lower end of the cooling body. Refiner. 7. A molten silicon flow rate lowering baffle plate is provided on the inner surface of the crucible, the upper end of which is below the liquid level of the molten silicon contained in the crucible, and the lower end is lower than the lower end of the cooling body. Purifier of silicon characterized in that. The silicon purifier according to claim 5 or 6, wherein the crucible is made of graphite or alumina, and a silicon dioxide layer is present on an inner surface thereof. 7. The silicon purifier according to claim 5 or 6, wherein the hollow rotary cooling body is made of silicon nitride or graphite. ※ Note: The disclosure is based on the initial application.